Speed Controller: Standard Type Series AS In-line Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Free Mount Cylinder

8] 2-P through Seal washer Vacuum port size Socket (Only 16) M5 x 0.8 d Through d Through d through Hexagon width across flats 8 Width across flats L 2-P through HA + Stroke 4-T counterbore S + Stroke Z + 2 x Stroke Port size A Stroke range (mm) 5 to 30 GA A' B C d D E F FK FL FY GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKQ16 ZC(D)UKQ20 ZC(D)UKQ25 ZC(D)UKQ32 M5

Air Slide Table Series MXW

MXS MXQ 8 x M5 x 0.8 thread depth 13 Note) MXF 6H9 + 0.030 0 depth 5.5 (Insert) 6H9 + 0.030 0 depth 5.5 7 MXW MXJ 72 98 48 MXP MXY Y Y 25 160 40 L 40 40 MTS 11 24 24 K A 60 50 32.5 Z A Bottom through-hole 5.1 N x M6 x 1 thread depth 12 (N-1) x H G H 7 GG HH 6H9 + 0.030 0 depth 5.5 NN x M6 x 1 thread depth 12 Bottom through-hole 5.1 F E 6H9 + 0.030 0 depth 5.5 (mm) DHH H J K L E N F NN G Z

Modular Type Air Filters Series AF

10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30

3 Port Solenoid Valve Metal Seal Series VZ200 1

(L) (M) (D) With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor 19.5 14.5 n-M5 x 0.8 2-4.3 8.5 mounting hole 21.6 17 P E PE 9.5 9.5 43 Max. 10 78 4-Rc 1/8 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5x0.8 2-M5 x 0.8 (Pilot EXH) 300 (Lead wire length) 300 (Lead wire length) 76 68.5 2-M5 x 0.8 (Pilot EXH) Stations n: Stations Formula L1 = 16n

MHZ2/MHZJ2

M5 x 0.8 Axial port Side Ported [E] Auto switch mounting groove (4 locations) (except 10) End boss assembly D2 D1 B 5 A E Auto switch mounting groove (both sides) Refer to the dimension table.

0.55

Caution Tightening torque of the pilot valve assembly mounting screw M2.5: 0.32 Nm 4 Series VP300/500/700 Series VP300/Body Ported/Dimensions Grommet (G) 1/8, 1/4 2(A) port M5 x 0.8 External pilot port (External pilot specification: R) 26.2 11 2 x 3.2 (For mounting) X 21.5 NC 2A 1.3 3.4 0.8 Manual override 20.4 16 57.6 (1.6) 96.1 Approx. 300 (Lead wire length) (9) Grommet (G) DC without light

0.

(G). [ ]: AC Unless otherwise indicated, dimensions are the same as Grommet (G).

80

A B C D E F G H J 1.6 M5 2.3 3.2 For other special options, refer to page 462.

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

CG5-S

Stainless steel used for improved corrosion resistance Operating range Centre of Sphere Stainless steel (SUS304) e 5 g n a r U U Centre axis g n ti a r 5 e p O Cylinder connection threads Spherical rotation No leakage of water, etc., from the threads into the interior.

7.5

Direction Horizontal, Upward, Downward (Using elbow fittings for upward or downward) C6, C8, N7, N9 (Inch size elbow fitting is not available.) 1(P), 3/5(E) port Port size C2, C4, N1, N3, M3 SJ2000 4(A), 2(B) port C2, C4, C6, N1, N3, N7, M5 SJ3000 Weight W (g) Note 2) W = 51n + m + 133 n: Number of SUP/EXH blocks m: Weight of DIN rail Note 1) When many valves are operated simultaneously,

5 Port Solenoid Valve

1/4 3/8 (Rc, NPT, NPTF, G) VFR VQ7 1/2 (Rc, NPT, NPTF, G) 1/2 (Rc, NPT, NPTF, G) C6 (for 6) C8 (for 8) C10 (for 10) C12 (for 12) N7 (1/4") N9 (5/16") N11 (3/8") 1/4 3/8 1/4 (Bottom ported) ^{1/2 (Rc, NPT, NPTF, G) V V V V V Page 626 Page 628 Page 630 Page 632 Page 634 3/4 (Rc, NPT, NPTF, G) (Rc, NPT, NPTF, G) D side 1/2 (Rc, NPT, NPTF, G) U side 3/8 (Rc, NPT}

High-Precision Digital Pressure Switch

Compact: Max. 17.5 mm shorter Lightweight: Max. 21 g lighter (When an M5 female thread is used.) (When an M5 female thread is used.)

Sine Rodless Cylinder Series REA/REB

8 M5 x 0.8 108 48.5 75.5 M5 x 0.8 41.5 53 16 42.5 26.5 22 54 102.5 58.5 10 28 M6 x 1.0 86 56 25 138 M6 x 1.0 61.5 63 46 46 24 125 29 REC Model N NL NT P PA PB PP W XB Z ZZ S TW CY Nil TF TN REAH15 REAH20 REAH25 62 21 161 65 88.5 194 17.5 50 16.5 15 8 M5 x 0.8 CX 50 65 23 169 70 92.5 205 19.5 18 15 8 Rc 1/8 G 1/8 NPT 1/8 75 27 209 75 103 9.5 250 23.5 65 20.5 18 9 G 1/8 Rc 1/8 NPT 1/8

0.55

Unless otherwise indicated, dimensions are the same as Grommet (G). 6 Series VF1000/3000/5000 (mm) Dimensions: Series VF1000/Body Ported 2-position double Grommet (G) (H): VF1220-; ;;1-M5; G H Grommet (G) (H): VF1220-; ;;1-01; G H (16.6) (Distance M5 x 0.8 [4(A), 2(B) port] 1/8 [4(A), 2(B) port] (11.7) (Distance between between ports) ports) (4) Manual override Manual override 1.7 1.7 26.4

MXW

CX 27 58 46 D-X (Y) 29 26 103 26 (Y) 20L 5H9 +0.030 depth 4.5 0 Data 10 15 15 K A 35 20 26.5 A 3 Z N-M5 x 0.8 thread depth 10 (N 1) x H G H 6 Bottom through-hole 4.2 M5 x 0.8 thread depth 10 GG 5H9 +0.030 depth 4.5 Bottom through-hole 4.2 0 F E 5H9 +0.030 depth 4.5 0 (mm) E F G Model GG H J K L N Z MXW12-100 91 123 82.5 30 35 114 35 51 5 280 MXW12-125 111 158 102.5 32.5 35 137 60 76 6 330