0.5

Visible Visible Air suction side Filter Filter holder LED Indicators PWR Power supply indicator ION/HV Static neutralization operation/ Incorrect high voltage indicator ALM Error indicator NDL Maintenance indicator 4 Fan Type Ionizer IZF Series Models and Functions New New IZF21 IZF31 IZF10 IZF10R P.11 P.11 P.21 P.21 Size (Depth x Width x Height) (mm) 40 x 104 x 155 40 x 144 x 195 39 x 80

3

A G i 2 x P Port size G A 2 x P Port size b B Conduit DIN terminal D F Q S Cable 6 to 12 G1/2 F Q 280 D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

7 Oil-impregnated sintered alloy Urethane 40 or larger: Lead-bronze casted Bushing t Urethane Cushion seal A !8 NCM Bumper A y Urethane Cushion seal B !

Cylinder with Lock Series MNB

W GL1 T GE VA Rc(PT)P Rear cylinder port Effective thread length S + Stroke H ?

10

CM2 Y type Double knuckle joint I type Single knuckle joint RR1 MM NDH10 RR1 CM3 45 NDH10 MM E1 CG1 E1 NX NZ U1 A1 L1 NX U1 A CG3 L1 [mm] [mm] JMB Part no. Bore size [mm] A A1 E1 L1 MM R1 U1 NDH10 NX Part no.

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 U1 Part no.

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: J, K, T Q1 = M L2 + (3 x P) L2 + (3 x P) L2 = L1 + (3 x P) L1 = Q2 = M Q2 = M L2 = [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Symbol: A35 Symbol: A36 Symbol: A37

CNG

t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

Cylinder with Lock Series CNG

t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Zb2 JJ Eb Eb Q1 Zb1 JJ H H Eb Eb P A2 A1 L (Counterbore depth) Detail drawing of Zb2 (adjustable range) 2 x 2-LD L (Counterbore depth) Detail drawing of Zb1 (adjustable range) 2 x 2-LD MY3 Floating Bracket Mounting Dimensions (mm) Adjusting range Applicable cylinder Model Common JJ L P LD H G Ea Eb MYAJ16 MYAJ25 MYAJ40 MYAJ63 MY316 MY325 MY340 MY363 M4 x 0.7 M6 x1 M8 x1.25 M10 x1.5 1 1 1

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Produced upon receipt of order (Robotic cable only) Connector A B1 (Terminal no.) 1 2 5 6 A1 (14) (18) (17.7) (10.2) A6 B1 B3 A1 A3 B6 (13.5) With lock and sensor 1 2 15 16 Connector B Connector D (30.7) L (11) (14.7) Cable type (10) Robotic cable (Flexible cable) Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators M5 x 0.8 Relief port (10-, 21-) Vacuum port (11-, 22-) GC GB X 2 x LD 2 x P (Rc, NPT, G) GA H1 Y Width across flats B1 I NDh8 D B LH N MM Width across flats KA L LX H K A AL 3 ZZ + Stroke S + Stroke N Thread depth A1 Female thread MM (mm) Female Rod End A1 10 10 10 10 H M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 MM 86 86 88 114 ZZ Bore size 8 8 12

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

RH PH P A FW WE PL HR 20.5 F A' 8.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L LA PL HA Z + Stroke HA U B D Width across flats MB (lock plate fixing bolt) WD MA (Stroke adjuster) QW WR W H Section AA' TH (Head height of mounting bolt) +0.03 0 RL T TB +0.03

KK/KK13

P-80 (D)

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

S Couplers Series KK/KK13

Female thread type Female thread type L1 L1 T 20 27.2 13 T Width across flats H Width across flats H H Width across flats 103 H Width across flats 27 T Connection female threads T Connection female threads Effective area mm Min. bore Weight g Model Effective area mm Min. bore Weight g Model L L Rc 1/4 Rc 1/4 47 35.5 KK13S-02F KK13P-02F 17 10.5 25.7 22 Rc 3/8 32 Rc 3/8 107 52 39 -03F -03F

MU

Snap ring m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part No.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Rod boot Basic style Foot style Rod side flange style Head side flange style Single clevis style Double clevis style Center trunnion style B L F G C D T Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Cushion Nil If specifying more than one symbol, indicate them in

Series KC Self-seal Fittings

T Attach thread Weight (g) H1 (Hex.) H2 (Hex.) A1 M A2 D L Part No.

HRX-OM-W038

(Optional accessory: DI filter set: HRS-DP001) 6.3 Option T [High-pressure pump] 6.3.1 Option T [High-pressure pump] With option T (high pressure pump), the discharge pressure is raised. The high head pump uses a mechanical seal. Thermo Chiller makes AL28 alarm when driving time is passed a recommended preventive maintenance hours.