VQ5000

PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds VV5Q 5 1 08 K 03 F U1 Option Option None Exhaust cleaner for Rc1: D side exhaust Exhaust cleaner

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds VV5Q 5 1 08 K 03 F U1 Option Option None Exhaust cleaner for Rc1: D side exhaust Exhaust cleaner

MHZ2/MHZJ2

Flat Finger Type [3] 4-MM thread depth L Attachment mounting thread K J A A D G B D B K J F C S W O Unit: mm Weight g F G Open Closed 2 2.5 3 4 J K MM L B C D Model A W 5.4 7.4 4.45 5.8 7.45 8.9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 55 115 235 420 5.2 8.3 10.5 13.1 10.9 14.1 17.9 21.8 2.45 3.05 3.95 4.9 6 8 10 12 5 8 10 12 +2.2 0 2H9 2.5H9 3H9 4H9 1.4 1.4 1.6 2 0 -0.2 0 -0.2 0 -

High Power Cylinder:

61.5 B 32 36 44 53 A 18 22 22 24 I 26 31 38 47 H2 8 8 9 11 Bore (mm) 20 25 32 40 WH S 192 193 195 201.5 Rc(PT) P 1/4 1/4 3/8 3/8 NN M22 X 1.5 M24 X 1.5 M30 X 1.5 M33 X 2.0 ND 15.0 19.6 19.6 25.4 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NF 13 17 17 22 K 5 5.5 5.5 7.5 NB 30 36.9 43.9 47.3 JD 30.5 25.5 28.5 23 NA 26 32 38 41 JC 43 39 36 32 NE 33.5 37 43.5 52.5 ZZ 252 257 265 277 N 22 27

0.5

Visible Visible Air suction side Filter Filter holder LED Indicators PWR Power supply indicator ION/HV Static neutralization operation/ Incorrect high voltage indicator ALM Error indicator NDL Maintenance indicator 4 Fan Type Ionizer IZF Series Models and Functions New New IZF21 IZF31 IZF10 IZF10R P.11 P.11 P.21 P.21 Size (Depth x Width x Height) (mm) 40 x 104 x 155 40 x 144 x 195 39 x 80

VCB

4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Circuits and Wiring Examples p. 9 Options/Part Nos.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Q H 05 1 3 5 ZM JIS Symbol Air supply port Exhaust port Vacuum port Port size connection Nozzle diameter 05 07 0.5 mm 0.7 mm 3 5 M5 x 0.8 M3 x 0.5 Specifications Ejector System Circuit 10 1.0 mm 13 1.3 mm Applicable nozzle size (mm) Supply valve P Q Supply valve and release valve 0.5, 0.7, 1.0, 1.3 Air operated valve H M 0.35 MPa 0.5 MPa Supply pressure Components Port size M3 x 0.5 M5 x

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

Manifold Regulator Modular Type ARM2500/3000 Series

End plate assembly 1 pc. 28 x 25 x 1.5 35 x 31 x 2 2500 3000 A B 756 Manifold Regulator ARM2500/3000 Series Dimensions Pressure gauge (Option) Pressure gauge (Option) (With pressure gauge) ARJ AR425 to 935 Panel mounting hole ARX ARM2500: 4 x 6 ARM3000: 4 x 7 AMR ARM ARM ARP IN (Common IN) IR-A ARM2500: 2 x 3/8 ARM3000: 2 x 1/2 IR IRV ARM2500: n x 1/4 ARM3000: n x 3/8 Gauge port n x 1/8 VEX

Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

AS-FPQ/FPG

AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D. Note) Metric sizes 04 06 08 10 12 4 6 8 10 12 Elbow Control type 0 1 Meter-out Meter-in Note) For applicable tubing O.D. selection, refer to the Model on page 711.

This is a legacy product, and replaced byZSE20A-Y-01-J, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, JC, ZSE30 1/8 PORTED, .32388 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator lightEnviron- ment resistanceTemperature

This is a legacy product, and replaced byZSE20A-V-01-J, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, JC, ZSE30 1/8 PORTED, 1.48443 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator lightEnviron- ment resistanceTemperature

This is a legacy product, and replaced byZSE20AF-V-01-J-X531, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, JC, ZSE30 1/8 PORTED, .34539 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator lightEnviron- ment resistanceTemperature

Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: ø4 One-touch Fitting, Elbow Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)