High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Electric Actuators

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

Table of Contents

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

Air Fittings & Tubing

Male run tee Union elbow L Plug-in elbow Delta union Male delta D Reducer elbow Branch Y Male branch connector Universal female elbow VS Hex. socket head universal male elbow Universal male elbow K 45 male elbow Branch union elbow LU Union Y U Different dia. union Y Plug-in Y V Delta branch Bulkhead union R Plug-in reducer Different dia. plug-in Y XD Double plug-in Y Different dia. double

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

ISO Cylinder

Applicable head cover A Rail mounting B Band mounting Action Head cover type N E F Y Single acting, Spring return V V V V *1 The symbol is Nil for no magnet.

MY1

X m3 x g m2 x g Vertical mounting Mounting orientation Horizontal mounting Ceiling mounting Wall mounting Vertical mounting M3 Static load (m) m1 m2 m3 m4 Note) M1 Static moment M1 m1 x g x X m2 x g x X m4 x g x Z z y M2 m1 x g x Y m2 x g x Y m3 x g x Z Y Z M3 m3 x g x X m4 x g x Y m4 x g Note) m4 is a mass movable by thrust.

High Vacuum Angle Valve

Construction/Operation Auto switch (Option) Heater (Option) Pilot port (Pressurize to close) P-2 q Bonnet assembly (Maintenance parts)1 (Including w, e, y, u, i, o) Magnet (Option) Pilot port (Pressurize to open) P-1 r Exterior seal (Maintenance part)1 i Bellows holder (Material: Stainless steel 304) u Bellows assembly (Maintenance parts)1 (Including y, i) Bellows (Material: Stainless steel

Electric Actuator with Integrated Guide

Tact time Moving distance: _mm t = Tact time: _s s = Cycle time: _s Time t s z x Example) Projection distance x: _mm y: _mm z: _mm Work piece moment y Environment General, Clean room, Mist environment, Dusty environment 94 98 Series LTF Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

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Branch Y' Double branch Different dia. double union'Y' Universal male elkiow Double universal male elbow Uhiversal female elbow Hex. socket head universal elbow Triple universal male elbow Extended male elbow Extended oluo-in elbow Different dia branch "Y' Double branch "Y" Male run tee Double branch universal elbow Branch universalelbow Branch universal female elbow Triple branch universal

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

0 q t r i S u y o !4 !8 !

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Center of Gravity x z z y x y z MY1H Center of gravity Mass m Work piece X-axis Y-axis Z-axis Refer to page 1230 for wall mounting, ceiling mounting and vertical mounting types.

KR

Note) D1: Max. diameter Union Y: KRU Effective area (mm2) Applicable tubing O.D.

•

A, H DimenSions when Mounting a Single/Double Knuckle Joint together with a Rod End Nul H, Applicable knuckle joint part number ~bol B~ L, H, H A I type single knuckle sIZe (mm) Ytype double knuckle " Bore size (mm) A H 125 3.5 100 1-12A Y-12A 50 156.5 110 125 65 125 ~ 140 3.5 105 1-14A Y-14A 50 161.5 110 140 65 125 160 1-16A Y-16A 56 3.5 110 170.5 120 160 76 140 11 ., Ie 'I.'"

Pulse Valve

1 u y t r e w q i r e IN w IN q t y u i o !0 u y t o i !0 Component Parts Component Parts No. Description Material 1 Body ADC 2 Main valve Resin 3 O-ring NBR 4 Bonnet ADC 5 Seal NBR 6 Washer Fe (Chromated) 7 Compression nut ADC 8 Hexagon bolt Stainless steel No. Description Material No.

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Clevis Y-O5A Y.O5A Y-O8A Y-1OA Fod Clevis Pin CDP.3 CDP-3 CDP-5 CDP-6 Rod Nul NT.05 NT-05 NT.O8 NT-10 Mounlinq Brackel Clevis Pln CDP.3 CDP.4 CDP.6 CDP-7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS CPA1 B N vr/o Boot with Boot' BORE B D E K L M MM N s H z.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

0 i y u q o !0 i y Component Parts No. Description Material Note 1 Body A PBT 2 Knob POM 3 Body B PBT 4 Needle PBT 5 Needle guide Stainless steel 6 U-seal HNBR 7 Spacer PBT1 Component Parts No.

Cylinder with Lock

Axial foot: MWBLm-UT-m Flange: MWBFm-UT-m 4 x FD LY LH FY FB 4 x LD LT FT FE FX FZ Y LA LB X X Y LZ LX [mm] [mm] Model LA LB LD LH LT LX LY LZ X Y 32 137 119 7 30 3.2 32 68.5 50 22 9 40 159 137 9 33 3.2 38 75.5 55 24 11 50 170 148 9 40 3.2 46 89 70 27 11 63 188 160 12 48 3.6 56 100.5 80 27 14 80 218 190 12 55 4.5 72 119.5 100 30 14 100 244 212 14 65 4.5 89 138.5 120 32 16 Model FB FD FE

EXxx-OMY0006CN

Y Y (EX245-DX1EX245-DY1) Y 2 2 x M12 M12 2 x M8 M12 PCA-1557785 Y (2 x M12 M12) Fig. 13-2 PCA-1557785 81 No.EX##-OMY0006CN PCA-1557798 Y (2 x M8 M12) Fig. 13-3 PCA-1557798 13.3. EX245-FPS1/2/3EX245-DX1EX245-DY1 M12IP65 EX9-AWTS (M12 10 ) Fig. 13-4 EX9-AWTS 0.2Nm 82 No.EX##-OMY0006CN 14. 14.1.

Stainless Steel One-touch Fittings Series KG

KGD P. 124 P. 128 P. 129 Branch elbow Double branch Y Union Y Use to 4 branch piping in the same direction from female thread. KGLU Use to branch connection of tubes at right angle. KGUD KGU Use to branch connection of tubes in the same direction.