Rotary Table/

to the plate (also the same in case of a thicker plate) = m 2 r2 = m 5 2r2 = m 4 r2 = m 12 a2 + b2 !

Digital Flow Switch

Bracket A (Vertical mounting) L Power supply/output connection lead wire (Lead wire length: 2 m) Power supply/output connection lead wire ZS-46-A2 Options/Part Nos.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

5 2r2 = m 4 r2 CRQ2 = m 12 a2 + b2 MSQ MRQ 10.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

CY1F

m P 0.1 x mcos + msin P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m mv P Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 29) 1 Review of operating conditions Determination of load factor () = Load mass (m) Maximum allowable load (m max) + Static moment (M) Allowable static moment (Mmax)+ Dynamic moment (ME) Allowable dynamic moment

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

OMR0031

Options 15.1 I/O cable 1) How to Order the I/O cable (2) Parallel I/O cable connector terminals L A T H LATH2LATH5Terminal Insulator Insulator number color Dot Dot color color A1 Red Light Red *LE CP1 Cable length [L] brown A2 Grey Black A3 Grey Yellow Red 1 1 m A4 Grey Black 3 3 m A5 Green Light Red green A6 Grey Black 5 5 m A7 Grey Grey Red A8 Grey Black A9 Grey White Red A10 Green Black

MXS Series Air Slide Table

Note2) Functional options are not available for MXS L.

3

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order. For D-P3DWA, 32 to 63 are available.

Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: NPT 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: NPT 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8)

Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8)

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8)

Clean Regulator/Fluororesin Type

Clean Regulator/Fluororesin Type SRF Series RoHS ARJ AR425 to 935 ARX Wetted part materials Wetted part materials Wetted part materials Body: New PFA Body: New PFA AMR Body: New PFA ARM Diaphragm: PTFE Diaphragm: PTFE Diaphragm: PTFE ARP IR-A IR Recommended maximum flow rate IRV 2 L/min 5 L/min 20 L/min VEX SRF10 SRF30 SRF50 SRH SRP SRF SRF Inlet pressure: 0.3 MPa, Fluid: Water ITV Washing

MXF

12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V Relay, PLC 2-wire 24 V Grommet F9NWV F9NW 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PWV F9PW 3-wire (PNP) 2-wire F9BWV F9BW 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

V

Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L E T P O R T B Box type D Body type 06 6mm Tube 08 8mm Tube 01 Rc1/8 07 1/4 Tube 09 5/16 Tube T01 1/8NPT V A C U U M P R E S S U R E S 660mm Hg L 360mm Hg D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) Nozzle Diameter mm Specifications

Vacuum System Peripherals:

length 0.6 m (Applicable to only DC) Air operated L ZCU Y LN Plug connector type LO AMJ M MN Misc.