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Hea\,y duty gu de rod type Wdide bearng lOpott typ" l l l l l l l l l l r r t t t r r l l l t t t t t t l l l l tza t t t t t t t t t l t t t t t t t t t l ,75 _ t t t l l l l l l l znn t r t t t t l t l l ' For bore sizes 12 & 16, only tu15 x 0.8 is availade.

Vacuum Pad: Ball Joint Type

Vacuum Pad: Ball Joint Type ZPT/ZPR Series Pad Diameter: 10, 13, 16, 20, 25, 32, 40, 50 on n io on n a io a pt pt s s or la or la ds nt ds nt ed ed a a or or w w l f l f or or ea ea k k id su id su pe rfa pe rfa ty ty ce ce nt nt s s oi oi ac ac l j l j ac ac al al e e B B s s ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR ZPT ZPR XT661 ZPT Series: Vertical Vacuum Entry Type ZPR Series: Lateral Vacuum Entry

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

chart ON ON Output transistor Output transistor OFF OFF Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.

LEC-OM07605CN

(3) (a) EMC HF3010A-UN [:mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN (41) 258 4 65 4 273 2 288 4 300 5 HF3030A-UNHF3040A-UN [:mm] 6-K 3-L 3-L G 1 D 2 E 1 F 2 M J 2 C 1 C 1 H 2 B 2 A 5 [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 8 M5 M4 HF3040A-UN 11 30 11.

Environment

Note 2) 4 x O1 thread depth R L S M Y 4 x O1 thread depth R M EH PC A + Stroke B + Stroke LES LEPY LEPS XA H9 depth XA 6 x MO thread depth MR LER Section XX details MH LEH LEY -X5 LEY -X5 MA ML + Stroke MC MD Section XX XB 11LEFS XA XA H9 (MB) 11LEJS 25A[mm] LEC Size Stroke range [mm] A B C D EH EV H J K L M O1 R PA PB V LEC S 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5

Compact 5-Port Solenoid Valve

E J K L P W Nil Without option V V V V B With DIN rail mounting bracket5 V V V V D With common release pressure supply (PD) port V V V 6 V L Manifold individual supply specification V V V 6 V Selectable wiring for manifold (Refer to How to Order Ejectors on page 122.)

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41 Foot bracket M5 X 0.8 P port M5 X 0.8 R port R 3 P 1 10.7 9 M5 X 0.8 External pilot port 32 (Only external pilot style (R)) L plug connector (L): VQZ115-lLl-C3, C4, C6, M5-PR M plug connector

Series IDG

50M IDG30HM, 50HM IDG30LM, 50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female threads Drain discharge With drain guide With float type auto drain (P) (N) N.C.: Gray N.O.: Black Thread size: 1/4 (without valve mechanism) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 19 With float type auto drain With drain guide Port size A B C D E F G H J K L M N Model P 150 146

T

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

(A) Black zinc chromated MY-16B-stroke (B) Nickel plated MY-16BW-stroke 4 Series MY1W Dimensions: 16, 20 L (LL) 4-MM with depth M 4-B counterbore with depth C LD through hole bottom side J with depth K PA YW PB QW LW 2 x 2-M5 x 0.8 (Hexagon socket head plug) PG Q + Stroke M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) W CH LH RR SS NE RR SS H QQ NH NC This port is not available for

Guide Cylinder/Compact Type Series MGC

Rear plate N C D T A 2 x P (Rc, NPT, G) Q B E W S U M K L R I AP AB J AA A V Y + Stroke X Z + Stroke 8 x AF AC AD AE WH (Max.)

Modular Type Air Filter Series AF

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 26 AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30, 40, 40-06 L Bracket (Option) A D G F M K J B E Drain Min. clearance

REC

Screw-in Piping M5 X 0.8 Relieving port size 50 to 500mm/s Piston speed Mounting Basic, Axial foot, Front flange, Rear flange *Auto switch attachable Dimensions REC B/Basic H2 2-Rc(PT)P Width across flats B2 2-NN G G H1 Width across flats B1 Relieving port M5 X 0.8 Standard port I Relieving port 2-Eh8 D MM AL K A N N F lNA S+Stroke H F ZZ+Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA

Compact Cylinder with Lock Series CLQ

130 85 MNB -45D -45D x 100 L x 115 L x 135 L x 90 L 100 115 135 90 -50D -50D x 105 L x 120 L x 140 L x 95 L 105 120 140 95 CNA -75D -75D x 140 L x 155 L x 175 L x 100 L 140 155 175 100 -100D -100D x 165 L x 180 L x 200 L M5 x 60 L 165 180 200 60 CNS CLQB40-10D CLQB100-10D M5 x 75 L M8 x 90 L M10 x 115 L x 65 L 75 90 115 65 -15D -15D x 80 L x 95 L x 120 L x 70 L 80 95 120 70 CLS -20D -20D

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Operation Manual, Calibration Certificate

Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Operation Manual, Calibration Certificate

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

SMC Pneumatic Clean Series

Basic style / CG1RN, CG1RN 10112122M5 x 0.8 Relief port GA GB X 2-P (Rc, NPT, G) 2-LD H1 RA Width across flats B1 D 0 -0.05 I E LH MM AL Y KA A K N H S + Stroke LX F ZZ + Stroke L Bore size (mm) I H1 H K F E A AL L B1 D Stroke range KA Y GB S GA RA LD MM LX LH 40 30 27 25 6 19 16 47 8 39 Up to 300 52.4 2 32 2219.5 18 5.5 17 12 32 6 38 Up to 200 42.4 2 25 2219.5 14 5.5 17 10 32 6 31 Up to