Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting), Option 3: T (w/o Operation Manual, Calibration Certificate)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: N01 (NPT 1/8), Option 1: w/o Lead Wire, Option 2: None, Option 3: T (w/o Operation Manual, Calibration Certificate)

2

)-B/AR25(K)-B t e q IN OUT t Modular F.R.L. e q r IN OUT w r w AC-A AC-B AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

A

L I D E R T Y P E L O W S P E E D R O D L E S S C Y L I N D E R O P T I O N XB13 NC(D)Y2 S XB13 NCY2 B S W I T C H B O R E S I Z E S T R O K E ( I N C H) B O R E S I Z E S T R O K E A D J U S T M E N T M A G N E T I C H O L D I N G P O W E R M A G N E T I C H O L D I N G P O W E R S T R O K E ( I N C H) Type Basic Type / Slider Type T E C H N I C A L SPECIFICATIONS B A S I C T Y P E X B

smcmaintenancepartslist

(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"

Table of Contents

P. 34 P. 34 KQ2L T KQ2T P. 34 KQ2H Use to branch line from female thread in both 90 directions. VMG Branch Y Male run tee Gasket Use to branch line in the same direction from female thread and in 90 direction. KQ2U KQG P. 35 P. 35 KQ2Y P. 36 Use to branch line in the same direction from female thread.

Table of Contents

(650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M G 1/2 C C 3-Rc P VX3 M 3-Rc P VXA E E K K VN A Bracket B1 B1 A Bracket B1 B2 B1 B2 LVC DIN terminal: D Conduit terminal: T LVA LVH LVD LVQ J J 2-5.3 LQ NO P Port NO P Port LVN 2-5.3 Mounting hole H 35 H TI/ TIL F L L Cable 6 to 12 PA M 35 F D N (44) 34.5 PAX PB 25 C E C M G 1/2 K G 1/2 B1 3-Rc P E Bracket A 10.5

Electric Actuators

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

Table of Contents

K (3.3) D 4-G through R + Clamp stroke X Z C 0.2 2 x 4-H counterbore Q + 2 x Clamp stroke + 0.15 + 0.05 2-3.3 depth 3 K A P Both ends tapped style: MKA A thread (mm) A B Model MKA MKA50 MKA63 32 40 10 M6 x 1.0 14 M8 x 1.25 18 M10 x 1.5 R + Clamp stroke (Basic) (mm) Q A G I J S T B H K L O U C P V D E R X F Yh9 Z Model 0.1 0.2 MKB32 1 8 0 0.15 0.15 31.5 9 depth 7 M10 x 1.5 93.5 71.5 45 5.5

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HB HT HC N X A W K 2-plug H HA CB T 4-counterbore dia.

&snac

Z b K g ( ! ' / i t h A u t o D r a i n : 1 . 3 5 k S ) _ M A S S k s 0 . 2 5 k s ( ! / i t h B r a c k e t : 0 . 3 1 k s ) D i m e n s i o n s 0 n e t o u c h f i t t i n s f o r P u r g e a i r e x h a u s t ( 0 P t i o n : P , P s ) c h e c k e r 9 8 d i a m e t e r i n c h ) p u t ' g i n o a i r D e w p o i n t l n o u t e r 8 rn m(5/16 D l i 0 n : .!.

CRB2/CRBU2/CRB1

Applicable shaft types: J, K, T (mm) (mm) Q2 Q1 L2 + (3 x P) L2 + (3 x P) Shaft type Shaft type K shaft (T shaft) J shaft J K T J K T Size Size Q1 = M L1 + (3 x P) L1 = L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 M3, M4, M5 30 M3, M4, M5 L2= Q2 = M Q2 = M 40 M3, M4, M5 40 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be further shortened by machining

Modular F.R.L. Units

AR20K-B to AR60K-B Series Construction AR10-A AR20(K)-B/AR25(K)-B AC AF+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW t e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

Table of Contents

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.

High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K J K T T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Table of Contents

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K T J K T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K T J K T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Made to Order

P.1729 P.1731 P.1732 P.1733 P.1738 P.1739 P.1742 P.1743 P.1744 P.1747 P.1748 P.1752 P.1755 P.1756 P.1760 P.1765 P.1766 P.1769 P.1770 P.1776 P.1781 P.1786 P.1794 P.1796 P.1801 P.1802 P.1803 P.1804 P.1806 P.1806 P.1807 P.1809 P.1817 P.1818 P.1819 P.1820 P.1822 P.1823 P.1829 P.1829 P.1830 P.1831 P.1832 P.1832 P.1833 P.1836 P.1838 P.1839 P.1839 P.1841 P.1844 P.1844 P.1845 P.1848 P.1849 P.1850