Vacuum

0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..aAO=s5O', M 6 x 1 , M B x 1 M 6 x 1 , M 8 x 1 . 2 5 \4q,r'tirc How to Order ZPY Pad dia.

Vacuum

0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..aAO=s5O', M 6 x 1 , M B x 1 M 6 x 1 , M 8 x 1 . 2 5 \4q,r'tirc How to Order ) ZPY Pad dia.

7.5

n1 + 10 x n2 + 63.7 M = (L3 + 4)/12.5 + 1 Remove all numbers after the decimal.

ZP

1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows Thin flat/Thin flat with ribs Flat 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, Pad dia.

Large Size Vacuum Module: Series ZR

pressure supply (PD) port M5 EXH PE PE PD PD A 81.5 80.8 PD PD PS PS 56.5 PV PV 52 50 PD PS 42 35.5 31.5 33 28 16.5 13.5 17 PV PV PV 12 Common exhaust (EXH) port 1/2 (Rc, NPTF, G) Common release pressure supply (PD) port 2 x M5 Pilot pressure supply (PS) port M5 3 1.5 1 Common pilot supply (PS) port 2 x M5 4.5 2.5 Air pressure supply (PV) port Rc 1/8 7.5 7.5 Release pressure supply (PD)

Rotary Table/Rack & Pinion Style Series MSQ

5.3 4 5.5 2 34 18.5 12.6 9.2 35 4.5 7.5 29h9 29.5h9 14H9 5.3 2.5 4.2 10 3.3 3.5 M4 x 0.7 M5 x 0.8 7.5 2.5 6 4 5.5 3 38 23 15.5 10.5 40 4.5 9.5 33h9 34 h9 17H9 5.3 2.5 4.2 10 4.2 4.5 M5 x 0.8 M5 x 0.8 7.5 2.5 6 5 5.5 7 45 30 18.4 12.2 50 5 7 39h9 40 h9 20H9 6.5 2.5 4.5 11.5 4.2 4.5 (mm) JK P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 S WD M3 x 0.5 M3 x 0.5

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

) Temperature characteristics Standards Compliant with CE marking, UL (CSA) Piping Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 TSJ 1/4 Port size Rc 1/8 URJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Material Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316L PSE56-: Oil proof heavy-duty vinyl cable with air tube, 3 cores, 5.1, 3 m, Conductor

5 Port Solenoid Valve Series SV1000/2000/3000/4000

EX260 Serial transmission Calculation of dimensions L1 = 12.5 x n1 + 16 x n2 + 88.7 L2 = 12.5 x n1 + 16 x n2 + 48 M = L1/12.5 + 1 Remove all numbers after the decimal.

Metal Seal/Rubber Seal Series VQ Body Ported

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB, CA1 T0425 x 1 m Tube bore x Length VQ0149-C4 Speed controller AS2001F-04 AN103-X233 Silencer Tube bore x Length T0604 x 1 m 30 41 VQ11 -C6 Speed controller AS3001F-06 Silencer AN103-X233 T0806 x 1 m Tube bore x Length VQ2149-C8 Speed controller AS3001F-08 Silencer AN200-KM8

Rotary Clamp Cylinders

Operating range Cylinder model C D 8 8 8 8 Mounting bolt size M3 x 50 L M3 x 60 L M3 x 50 L M3 x 60 L M5 x 75 L M5 x 85 L M5 x 75 L M5 x 85 L M5 x 85 L M5 x 95 L M5 x 75 L M5 x 85 L M6 x 95 L M6 x 130 L M8 x 100 L M8 x 130 L 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

for 4), , C6 (One-touch fitting for 6) M5 x 0.8 1/8 Port size M5 x 0.8 A port M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1R2 (PRA) 2R3 (ARR) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52 Type SS3YJ5-20 Body ported for internal pilot M5 x 0.8 0.47 0.71 0.98 0.71 1.0 0.68 1.0 0.47

ZP

Thread dia. 4, 6 tube 4, 6, 8 tube 6, 8 tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Flat 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20 25, 32, 40, 50 Flat with ribs Deep Bellows Pad

VZ3000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB 4 x 1 m AS1301F-04 AN120-M5 SZ3120-M5 3-3-19 Series VZ3000 Construction 2 position single 2 position double 3 position closed center 3 position closed center/exhaust center/pressure center

REA/REB

8 REAR32 3 1.5 10.5 11 6.5 35 10.5 7 55 53.5 55 52 54 51 7 29 M8 x 1.25 x 10 REAR40 5 2 10 11 6.5 43 13 7 65 63.5 67 62 66 62 8 36 M8 x 1.25 x 10 QW T W X Y LD MM N P PW Q WS Z K L M Model REAR10 14 19.5 20 15 39.5 3.5 M3 x 0.5 4.5 M5 x 0.8 26 68 8 80 9 38 4 REAR15 18 21 25 18 54.5 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 14 53 5 REAR20 17 20.5 40 22 64 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 11 62 5

REA/REB

E K L LD M MM N P PW QW T TC W WP Q Model CC REBR15 M5 x 0.8 x 7 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 32 18 21 17 25 84 REBR25 M6 x 1 x 8 15 70 5.6 6 M5 x 0.8 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 105 RB REBR32 M8 x 1.25 x 10 13 76 7 7 M6 x 1 8.5 Rc 1/8 54 26 33 28 50 27 116 J X Y Z Model REBR15 18 54.5 98 DREBR25 28 72 125 REBR32 35 79 148 -X 20Data 10-2-71 71 Series REBR Proper Auto Switch Mounting

MGP

, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 x 0.8 M5 x 0.8 M5 x 0.8 15 10 19 53 37 10.5 M5 x 0.8 M5 x 0.8 Rc 1/8 12.5 10.5 25 53.5 37.5 11.5 M6 x 1.0 M6 x 1.0 Rc 1/8 12.5 13.5 28.5 WA WB Bore size (mm) Q R S T U VA VB X XA XB YY YL Z 30st or less Over 30st to 100st Over 300st 30st or less Over 30st to 100st 23 24 28 34 Over 100st to 200st 200

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) MM TC W NA P S TA ZZ WA WH 30 30 25 20 20 20 20 20 147 157 159 187 218 218 264 264 16 16 16 16 18 18 22 22 23 25 28.5 33 40.5 47.5 60.5 71 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 M5 x 0.8 M6 x 0.75