VT307

Ordering Example: VV307-01-052-01-F1 pc. (5 station manifolds base) V0307-1G4 pcs. DXT060-51-13A 1 pc.

•

~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

PSE200

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

High Precision Digital Pressure Switch, Series ZSE40/ISE40

(10G) in X, Y, Z directions for 2hrs. each (deenergized) 980m/s (100G) in X, Y, Z directions 3 times each (deenergized) In a temperature range of 0 to 50C, 2% F.S. or less of pressure measured at 25C Vibration resistance Impact resistance Temperature characteristics 01: R1/8, M5 x 0.8, T1: NPT1/8, M5 x 0.8, W1: Rc1/8 C4: With 4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

Ionizer

Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Installation height of sensor: 10 mm 3 Electrostatic potential [kV] 20 With sensor Ionizer 2 Without sensor Without sensor Discharge time [s] 15 1 With sensor L 0 10 1 Workpiece Without sensor 5 2 With sensor 3 0 500 1000 1500 2000 Installation distance L [mm] 1 2 3 4 Time [s] Run mode after static neutralization (electrostatic potential

60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

PFA/PFW

in X, Y, Z directions for 2 hours each Vibration resistance Impact resistance Weight Enclosure Piping port size 490m/s in X, Y, Z directions, 3 times each 250g (8.8oz) (not including lead wires) Equivalent to IP65 1/8, 1/4 Note 1) The output functions (2 outputs OUT1 and OUT2) operate only with respect to the real-time flow rate display, and do not operate with respect to the accumulated

PSE530/200

and case Insulation resistance 5 M between external terminals and case (at 50 VDC) Vibration resistance 10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized) 980 m/s2 in X, Y, Z directions, 3 times each (De-energized) Impact resistance Temperature characteristics (Based on 25C) 2% F .S. or less based on the

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Refer to page 4-14-3 for silencer for single valve unit. 4-14-17 18 Series VQZ Option Body Ported External Pilot Specifications Inch-size One-touch Fittings and Option Threads External pilot specifications are used when the operating pressure is below the minimum operating pressure 0.1 to 0.15 MPa or when valve is used

ISE20B-L is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

ISE20B-L is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

ISE20B is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

ISE20B is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

ISE20B-L is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

ZQ-OM01401

-*ZQ000MA-K25L-*ZQ000MA-J15L-FPD ZZQ1A-ROC *ZQ000MA-K15L---S *ZQ000MA-K25L---S EA EB FA FB EC EE FC FE *ZQ3MAK1 5L--S *ZQ3MAK2 5LK--S EA EB FA FB EC EE FC FE *ZQ000MAJ1 5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEA EB FA FB EC EE FC FE *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 36 - No.ZQ-OM01401-B 11. ,,, 11.1 / ZQ05A 0.35MPa -100 30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15

VXZ

of 01 to 08 when the suffix 0 is removed, are the same as the solenoid valve model codes.

Micro-Mist Separator with Prefilter Series AMH

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04