Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Flange bracket material: Carbon steel 7-6-19 20 Series CQ2 Accessory Bracket Double Knuckle Joint Single Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Material: Cast iron Material: Carbon steel Material: Cast iron Courtesy of Steven

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Buffer connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 3 A14 2 10 to 16 3 20 to 32 B8 4 40, 50 4 ZP U6 B8 Y [qY type adaptor] B 3 ZP K20 [wBuffer] 3.8-63

Electro-Pneumatic Valve NVEP/NVEF Series

P O Flow Characteristics/Operating Principles P O, O Construction Detail .. PO Dimensions P O Installation PO Power Amp.: Series VEA Model / Spe c i f i c a t i o n s . . . . . P O H o w t o O r d e r . . . . . . . . . P @ Dimensions/ Handling Instructions . . . . . P@, @, @ External Connections P@, @ Features and Functions P@ Sample Applications . . .

Series SY100 3 Port Solenoid Valve Rubber Seal

SY114/SY124, SY114A/SY124A only. 2.1-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) 1 (P) q y e r w i SY SYJ VK VZ VT VT VP A R P o u t !0 !1 VG VP VQ VQZ Part No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XC47 to to XC58 XC58 XC59 XC59 S, W, Y S, W, Y S, W, Y S, W, Y S, W, Y 30 to 100 to Change of port direction to XC61 XC61 XC63 One side hydro, One side air XC62 XC62 Reverse mounting of auto switch 50, 63 80, 100 XC64 One side hydro, One side air Chart 8. Combination between -X and -XC (Refer to page 11-7-49 for made-to-order/details on -X.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XC47 to to XC58 XC58 XC59 XC59 S, W, Y S, W, Y S, W, Y S, W, Y S, W, Y 30 to 100 to Change of port direction to XC61 XC61 XC63 One side hydro, One side air XC62 XC62 Reverse mounting of auto switch 50, 63 80, 100 XC64 One side hydro, One side air Chart 8. Combination between -X and -XC (Refer to page 11-7-49 for made-to-order/details on -X.)

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Meanwhile, the clean compressed air in housing w passes through flow hole A of body q , it is reduced to a specified pressure by the pressure reducing valve, and is discharged from the OUT. !1 SRH MPa e SRP SMC t q SRF OUT IN ITV MC cartridge element u IC i Seperation element Flow hole A ITVH y Auto-drain type w ITVX !

Electric Actuator with Integrated Guide

Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46

SYJ300-OMU0003

D DIN DC24V 24V SY100-61-3-05 N N DC12V 12V SY100-61-3-06 AC100V 100V SY100-61-2-01 D DIN Assy V115-D V115-Y AC200V 200V SY100-61-2-02 AC110V 110V SY100-61-2-03 V111(G,H,L,M,W)V115-Y(DIN) AC220V 220V SY100-61-2-04 Y DIN SY100-82-1 DC24V 24VN SY100-82-3-05 DC12V 12VN SY100-82-3-06 AC100V 100VN SY100-82-2-01 () AC200V 200VN SY100-82-2-02 AC110V(AC115V) 110VN SY100-82-2-03 AC220V

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Low Maintenance Filter Series FN1

Description Device Description Device No. q w e Coolant valve (Series VNC) 5-port solenoid valve (Series SY) OUT side valve Cylinder driving valve r t y Coolant valve (Ball type) Process valve (Series VNB) Drain valve Air supply valve Speed controller (Series AS) Coolant valve (Ball type) Speed controller IN side valve Series inside ( ) indicate P/A products.

HRX-OM-T004

Key-lock set data which is set in 5.8.5 Command:LOC Key-lock setting (W) is not the object to store.

Compact Manifold Regulator

C U O S L H ARM ARM t e A-A A ARP w y IR-A IR r IRV i VEX SRH !

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

ZQ-OM01401

RL a 2 0.54~0.66Nm) 1 Ass'y P.27 1 2 L POM,POM,PET,SUS 3 R POM,POM,PET,SUS 4 () (PET) P.27 2 5 Assy PBT P.27 3 6 Assy () P.27 7 7 NBR P.27 4 8 NBR P.27 5 9 Ass'y P.27 6 26 - No.ZQ-OM01401-B 7.4 1 Ass'y2 ) ZQ1-SR1-04-A (1) 01 1 (1) 02 2 08 8 2 () (2 ) ZQ1-SE2-A 3 Assy (2 ) ZQ1-SC1-A 4 (10 ) ZQ-3-005-10AS 5 (10 ) ZQ-3-009-10AS 6 Assy (4 ) ZQ1-WS3-A (1) 3 M3 () (1) 4 M4 ()

One-touch Fittings

P.7 KQ2H Use to connect tubing in the same direction. KQ2D Use to branch tubing at three right angles. P.15 P.17 KQ2U Different Diameter Straight Double Branch Y Branch Y P.7 KQ2H Use to connect tubing of different sizes. KQ2UD-G Use to four-branch a female thread in the same direction. P.16 KQ2U-G Use to branch a female thread in the same direction.