Number of Ports: 2 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller)

Number of Ports: 2 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 06 (Roller Plunger), Suffix: S (Hard Steel Roller)

Number of Ports: 2 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 07 (Cross Roller Plunger), Suffix: S (Hard Steel Roller)

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 06 (Roller Plunger), Suffix: S (Hard Steel Roller)

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller)

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 02 (One Way Roller Lever), Suffix: S (Hard Steel Roller)

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 07 (Cross Roller Plunger), Suffix: S (Hard Steel Roller)

Number of Ports: 3 Port, Body Option: U (w/Bottom Mouinting Thread), Port Size: F02 (G 1/4), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller)

Number of Ports: 3 Port, Body Option: Side Mounting, Port Size: F02 (G 1/4), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller), Bracket: B (w/Bracket)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

2/3 Port Valve

The right side of the common port provides plug. 4.1-15 VVX21/22/23 Dimensions Common SUP Individual SUP n Mark L1 L2 L1 L2 Model 2 100 86 126 108 3 136 122 172 154 4 172 158 218 200 5 208 194 264 246 6 244 230 310 292 7 280 266 356 338 8 316 302 402 384 9 352 338 448 430 10 388 374 494 476 VVX22m VVX23m VVX21m Grommet Electrical entry Model A B D E F H J K M N Conduit S 39 41.5 44 Conduit

One-touch Fittings

M L1 M L1 L2 D Plug-in Elbow: KQ2L Applicable tubing Effective area [mm2] Min. port size Release button dimensions D2 L1 L2 A M Applicable tubing O.D.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

L2 Metric Size L5 (1) A (2) M1 Weight (g) d T Model H D1 D2 D3 L1 L2 L3 L4 Max.

Compact

L3: Overhang Allowable range: 30 mm L3: Overhang Allowable range: 30 mm Allowable overhang L1, L2 [mm] Allowable overhang L1, L2 [mm] MXZ20 MXZ25 3.5 6.0 V = mm/s V = mm/s 3.0 5.0 Load weight m [kg] Load weight m [kg] 2.5 4.0 2.0 3.0 1.5 V = 50 2.0 V = 50 1.0 V = 100 V = 100 V = 200 V = 200 V = 500 V = 500 1.0 0.5 0.0 0.0 45 40 35 30 25 20 10 15 0 5 0 20 10 30 40 50 60 L3: Overhang Allowable

0.01

Dimensions: Centralized Wiring Type With bracket L1 60 3 38 L2 38 5 LED level meter Terminal block box EXH port End plate R End plate L 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 Rc, NPT, G 1/8 SUP port L3 6.5 36 24 OUT 3 36 OUT 2 OUT 4 n Stations

7

S CAC408 50 50A Flange R 230 VAC G N.O.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.

MXW

Mey: Find the equivalent weight for impact, We Bumper coefficient = 4/100 (With urethane bumper) Mey We W L2 + B Meymax value is from Graph (2) at V = 1.4 Va = 420 mm/s. Mep Mep = 1/3 We x 9.8 (L3 + C) Examine Mep.

MXW Series Long Stroke Slide Table

} L3=50 {mm} L2=50 {mm} L2 {B L3 Item Load factors n Note (1) Max. movable load W B L2 Examine W.

Short Stroke Electric Actuator Series LX

Speed (mm/s) 40 40 2.6 1.3 0.3 0.1 2.6 1.3 0.3 0.1 80 80 1.3 0.7 0.2 0.1 1.3 0.7 0.2 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 10 1 50 10 1 10 10 10 10.1 5.1 1.1 0.2 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 0.3 0.1 1.3 0.3 0.1 1.3 80 80 1.3 0.7 0.2 0.1 0.7