VSA4

VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double 1 4 1 8 Rc 0.70 1 8 Rc VA 1 8 Rc 3 position closed center 1 4 1 8 Rc 0.86 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Air Cylinder

Clevis Pivot Bracket Pin (For CM2E(V)) Trunnion Nut/Material: Carbon steel (mm) (mm) H Material: Carbon steel B d D m m L2 C D t t L1 d Part no. Applicable bore size B C D d H TN-020B 20 26 28 25.5 M20 x 1.5 10 TN-032B 25, 32 32 34 31.5 M26 x 1.5 10 TN-040B 40 41 45 40.5 M32 x 2 10 Part no.

Fluoropolymer Piping Equipment

Dimensions Space saving branch tee: LQ3T-SB Metric Size (L2, L2) 2 x B Model Applicable tubing O.D.

Speed Controller with One-touch Fittings

Applicable series AS-10D AS-20D AS-25D AS-30D AS-40D AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F AS2002F AS2052F AS3002F AS4002F DIN rail mounting bracket L-bracket Bracket for AS1002F-02 is not available. Prepare DIN rail by user.

Battery-less

Positioning Operation Pushing Operation ON OFF ON OFF IN IN Input Input 15 ms or more Output the step data no. 15 ms or more Output the step data no.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Information

ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

AS-FPQ/AS-FPG

T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A1 + 2 (Stroke) L2 + Stroke L3 Flange Style Without auto switch With auto switch Bore size (mm) Stroke range (mm) FD FT FV FX FZ L1 L2 M A B A B 64 40 5 to 50 40 74 50 5.5 8 54 62 72 17 7 40 74 50 75,100 66.5 40.5 10 to 50 50 76.5 50.5 6.6 9 67 76 89 18 8 50 50.5 76.5 75,100 68 42 10 to 50 63 78 52 9 9 80 92 108 18 8 60 78 52 75,100 For details about the rod end nut and accessory brackets

IS3000

(When using switch with neon light: 1000 VAC for 1 min.) 50/60 5 3 4 0.4 3 2 3 0.4 0.1 0.1 How to Order IS3110 (Gasket piping) IS3010-02 (Rc 1/4 thread) IS3 0 02 L1 0 0 JIS Symbol Indicator light Piping method Nil L1 L2 L5 None With neon light/110 VAC With neon light/220 VAC LED/24 VDC Rc 1/4 thread Gasket piping 0 1 Micro switch load type Note) Micro load type: Not available L2 option.

Quick Exhaust Valve Series AQ 1

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

AK Applicable tubing O.D. d L2 L3 M Inch size ASS ASR D2 L1 ASF T2 L4 H1 H1 (Hexagon width across flats) (Hexagon width across flats) H2 H2 (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 A1 L5 D1 A2 T1 Inch Size L4 Weight (g) d T1 D1 A2 A1 D3 M L3 L2 L1 H1 H2 D2 Max. Min.

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

Residual Pressure Release Valve

1/4 Rc 3/8 15.2 20.9 27 29 35.3 40 6 7.5 15.4 21.1 64 89 17 19 Weight (g) Connection thread D L1 L2 Q KEC-02 KEC-03 665

VQ

VQZ Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(Ms) 4 ports Stations 6 7 6 10 1t 12 13 14 15 16 17 t8 19 20 L1 1.32 (33.5)1.73 (44) 2.15 (54.5.i 2.56 2.97 3.39 (86) 3.& 4.21 (s6.s) (107) 4.63 (117.5) 5.04 5.45 (r28) (13s.s) 5.47 (149) 6.28 (159.5) (r7o) 7.11 (180.5) 7.52 (1er) 7.93 (201.5) 8.35 \212) 8.76 \222.5) L2 1.Oa \27.5) 1.50 (88) 1.91 t48.5J 2.32 (5s) 2.74 (6e.5) 3.15 (80) (90.5) 3.94 (10l) 4.39 (111.5) 4.& 5.22 (122) (i32.s)

o

(Ms) 4 ports Stations 6 7 6 10 1t 12 13 14 15 16 17 t8 19 20 L1 1.32 (33.5)1.73 (44) 2.15 (54.5.i 2.56 2.97 3.39 (86) 3.& 4.21 (s6.s) (107) 4.63 (117.5) 5.04 5.45 (r28) (13s.s) 5.47 (149) 6.28 (159.5) (r7o) 7.11 (180.5) 7.52 (1er) 7.93 (201.5) 8.35 \212) 8.76 \222.5) L2 1.Oa \27.5) 1.50 (88) 1.91 t48.5J 2.32 (5s) 2.74 (6e.5) 3.15 (80) (90.5) 3.94 (10l) 4.39 (111.5) 4.& 5.22 (122) (i32.s)