Environment

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

2 0.15 0.3 SY 5 (R1) 1 (P) 3 (R2) 2 Position double SYJ (A) 4 (B) 2 Grommet (G) VQZ2000 SX 5 (R1) 1 (P) 3 (R2) 3 Position closed center 5 Port 3 Port for mixture mounting VK (A) 4 (B) 2 0.45 0.6 5 (R1) 1 (P) 3 (R2) Indicator light and surge voltage suppressor VZ 3 Position exhaust center L plug connector (L) (A) 4 (B) 2 VF Non-locking push style (Flush) VQZ3000 5 (R1) 1 (P) 3 (R2) VFR (Standard

CL

BP BP lock-up port, Unlocked when pressurized A BP BP lock-up port B With rod boot S + Stroke Long stroke 2-Rc P EA D e 4-LD Plug cap 2 positions Plug cap 2 positions Plug cap 2 positions Width across flats KA l LS + Stroke ZZ + Stroke h + l ZZ + l + Stroke Bore size (mm) Stroke range (mm) F FA GA GB GC H1 K KA LD LH J A AL B B1 BX BY C D EA EB BP Without rod boot With rod boot Up to 500

energy saving effect

detected. v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item dt HED < For 400 V type and option B [With earth leakage breaker]> 3.

Refrigerated Air Dryers

Iron (Fe) [mg/L] 1.0 or less Copper (Cu) [mg/L] 0.3 or less Sulfide ion (S2) [mg/L] Should not be detected. Ammonium ion (NH4+) [mg/L] 1.0 or less Residual chlorine (Cl) [mg/L] 0.3 or less Free carbon (CO2) [mg/L] 4.0 or less Refrigerant R407C (HFC) IDU E Reference item *1 In the case of [Mcm], it will be 0.00125 to 0.01.

Slider Type Ball Screw Drive/11-LEFS Series

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Manual override (Pitch) P = 10.5 9 (Pitch) P = 10.5 12.5 L2 3.5 L1 (Station n) (Station 1) (Station 1) (Station n) (Light/surge voltage suppressor) (Light/surge voltage suppressor) 43.5 [50.5] + + + + + + + 28.1 A A B B 15 15 12 12 B B A A 1 1 3 3 (Pitch) P = 10.5 13.5 (Pitch) P = 10.5 M3 x 0.5 (A, B port) M3 x 0.5 (A, B port) 14.5 L plug connector (L) M plug connector (M) M8 connector (W0

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + T When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + T Glossary of Terms Specific Product Precautions 54 JSX/JSXm Series Q : Air flow rate [L/min (ANR)] C : Sonic conductance [dm3/(sbar)], dm3 (Cubic decimeter) of SI units = L (liter) b : Critical pressure

Cylinder with Lock

Auto switch model D-Y59m D-Y69m D-Y7P D-Y7PV D-Y7H D-Y7mW D-Y7mWV D-Y7BA D-Z7m D-Z80 D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NTL D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW A B A B A B A B A B A B A B A B A B A B 32 13.5 10.5 9.5 6.5 10 7 15 12 3.5 0.5 7.5 4.5 3.5 0.5 7 4 9 6 6.5 3.5 40 10.5 14 6.5 10 7 10.5 12 15.5 0.5 4 4.5 8 0.5 4 4

Mechanical Valves Series NVM, NVFM, NVZNI

Rmrye her @kd*d and molnt lcvor in rny po.lllon 36C 1 1 Series NVM MECHANICAL VALVES DIMENSIONS NVM830-N01-01 Steel Roller F O F ' 4 4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' 'Length from center to cenler of r o l l e r = 1 5 i n ( 3 8 1 m m ) 0 0 4 ( 1 ) A B c D e F G H J 4.46 113.4 0.57 14.6) 2.34 t59.5) 1 . 5 7 (40) 1.30 (33) 1.03 '26.2)0.59 (15) 1.03 (26.2\ 1.00 '25.4 A B c o E F G

IIIIIII

Rmrye her @kd*d and molnt lcvor in rny po.lllon 36C 1 1 Series NVM MECHANICAL VALVES DIMENSIONS NVM830-N01-01 Steel Roller F O F ' 4 4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' 'Length from center to cenler of r o l l e r = 1 5 i n ( 3 8 1 m m ) 0 0 4 ( 1 ) A B c D e F G H J 4.46 113.4 0.57 14.6) 2.34 t59.5) 1 . 5 7 (40) 1.30 (33) 1.03 '26.2)0.59 (15) 1.03 (26.2\ 1.00 '25.4 A B c o E F G

Booster Regulator/Air Tank

VEX SRH Product Not Applicable to the ASME Standard ASME Standards Compliant Product SRP VBAT 05 N A 1 E V X105 Product not applicable to the ASME standard VBAT 05 N 1 A X11 SV SRF ITV Tank internal capacity Tank capacity Option Symbol Internal capacity 05 5 L 10 10 L 20 22 L 38 38 L Material Option IC Symbol Option Nil None V Drain valve Symbol Internal capacity 05 5 L 10 10 L Symbol Option

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Manual override (Pitch) P = 10.5 9 (Pitch) P = 10.5 12.5 L2 3.5 L1 (Station n) (Station 1) (Station 1) (Station n) (Light/Surge voltage suppressor) (Light/Surge voltage suppressor) 43.5 [50.5] + + + + + + + 28.1 A A B B 15 15 12 12 B B A A 1 1 3 3 (Pitch) P = 10.5 13.5 (Pitch) P = 10.5 M3 x 0.5 (A, B port) M3 x 0.5 (A, B port) 14.5 L plug connector (L) M plug connector (M) M8 connector (WO

LX Series Compact Electric Actuators

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

CLQ

Knuckle pin (common with double clevis pin) Rod end nut d d Dd9 C m l L t m t H B Material: Carbon steel Material: Rolled steel (mm) (mm) Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l Part no.

IDU/IDF

based on conditions , and 1 1 C = 1.00 based on condition C = 0.90 based on condition 2 2 Based on condition , A and B Based on condition , B-1 and C 3 3 Corrected air flow = 350 (0.85 x 1.00) = 412 l/min (ANR) Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) 4 4 Based on condition ; Based on condition ; IDU4D is selected as the model to process an air flow larger than 412 l/

ZX

ZX1-DR1 How to Order Unit for Replacement Misc. (1) Valve unit (4) Vacuum switch unit Refer to page 13-2-44 for details. 15 C 0X ZSE2 D K1 B V ZX1 5 Z B D M L Piping specifications Vacuum pump for system Unit for replacement Nil L Grommet (0.6 m) Manifold All ports are equipped with plugs.

70pvpump

Since the marked point is below the curve for 50 l/min (ANR), the maximum rate will be about 50 l/min (ANR).

Free Mount Cylinder

Applicable bore size (mm) d H1 B1 C1 Width across flats L 2-P through 4-T counterbore S + Stroke Z + 2 x Stroke W + Stroke 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 5.5 6.4 A' A' M4 x 0.7 2.4 7 8.1 M5 x 0.8 4 8 9.2 M6 x 1.0 5 10 11.5 M8 x 1.25 5 13 15.0 M10 x 1.25 6 17 19.6 Bore size (mm) A GB H A' B J C K D L MM E NN GA P Q QA 6 10 16 20 25 32 15 16.5 16.5

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Mitsubishi Electric Corporation Yaskawa Electric Corporation None F R L T B Nil W Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.