Size: 2 (Size 2000 Flow 240Nl/min), Stations: 1 Station, Piping Specification: B2 (IN: Individual OUT: Main Body), Thread: Rc(PT), Accessory: G (Pressure Gauge)

0.5

B1 A2 Blue 0 V IN B2 A3 Green F . G. Ground terminal with 100 or less to use it as a reference electric potential of offset voltage. B1 B5 B3 Yellowish green Ionizer stop signal IN Signal input to turn ON/OFF the ventilation with fan and ion generation. NPN type: To stop fan and ion generation, connect to 0 V.

25

A2 0 V Blue IN B2 Make sure to ground with a ground resistance of 100 or less to use it as a reference electric potential for ionizer. If not grounded, performance cannot be acquired, and also causes failure of the equipment. A3 F.G. Green AWG20 Signal input to turn ON/OFF the ion discharge. NPN specification: Stops ion discharge by connecting to 0 V.

Slider Type Ball Screw Drive/11-LEFS Series

1 I/O cable length [m] Note 4) i Cable type Note 1) Note 2) Nil Without cable 2 2 m 5 5 m A 10 m Nil Without cable H Without cable (Connector only) 1 1.5 Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Size 25 32 40 Nil Without driver V V V A1 LECSA1-S 100 to 120 V V A2 LECSA2-S 200 to 230 V V V B1 LECSB1-S 100 to 120 V V B2

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

Supply(P),Vacuum(V), One-touch Fitting: N (Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2"), Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: B2 (Supply Valve, N.O.), Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: D (Push-turn Locking Slotted

Supply(P),Vacuum(V), One-touch Fitting: N (Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2"), Exhaust Type: P (Rc 1/2 Port Exhaust), Supply/Release Valve Combination: B2 (Supply Valve, N.O.), Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: D (Push-turn Locking Slotted

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: P (Rc 1/2 Port Exhaust), Supply/Release Valve Combination: B2 (Supply Valve, N.O.), Rated Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Horizontal Connector w/Lead Wire 300mm), Light/Surge Voltage Suppressor: S (w/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Vacuum Pressure

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: B2 (TSJ 1/4)

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: B2 (TSJ 1/4), Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 4 [For Positive Pressure (0~500kPa)], Port Size: B2 (TSJ 1/4)

Sensor Range: 4 [For Positive Pressure (0~500kPa)], Port Size: B2 (TSJ 1/4), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 4 [For Positive Pressure (0~500kPa)], Port Size: B2 (TSJ 1/4), Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: B2 (TSJ 1/4), Output Specification: 28 [Current Output (4~20mA) Type]

Sensor Range: 4 [For Positive Pressure (0~500kPa)], Port Size: B2 (TSJ 1/4), Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: B2 (TSJ 1/4), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100.kPa)], Port Size: B2 (TSJ 1/4)

Sensor Range: 3 [For Compound Pressure (-100~100.kPa)], Port Size: B2 (TSJ 1/4), Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: B2 (TSJ 1/4)

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: B2 (TSJ 1/4), Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]