11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP12 Z 3 Metal stopper Air cylinder Rotary actuator Air gripper Directional control valve

VFR

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

40 50 60 60 70 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 Z 66 76 94 107 117 130 148 176 188 M 3.5 4 5 5 6 7 8 10 10 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 Q 60 68 84 95 105 116 134 159 171 QW 10 14 18 17 20 26 34 48 60 T 14.5

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Nozzle Type Ionizer

8 5 Width across flats 12 10.6 17 Nozzle Type Ionizer IZN10E Series Dimensions L-bracket IZN10-B1 17 (Mounting angle adjustable range) 40 2 x M3 7.5 2 x 3.4 2 x R10 25 5 40 50 Internal mounting 2 x 3.4 20.5 33 30 30 52 46 44 26 17 11 26 12 8 x 3.4 2 x Hexagon socket head cap screw M3 x 6 (Accessory) 40 5 22.7 Internal mounting Pivot mounting 21 33 30 (Mounting angle adjustable range) (83)

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/12855 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS15, CXSL15 10-/11221221Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

VFS

1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !

CV/MVGQ

TX TY TZ QY S TD TT Bore size (mm) 20 25 32 40 52 36 116 62 8 10 32 32 14 120 10 40 40 60 40 14 62 9 40 60 40 122 9 10 40 16 64 44.5 154 53 53 77 16 88 10 11 10-15-24 25 Valve Mounted Cylinder Double Acting, Single Rod Series CVM5 Head Side Trunnion Style (T) Bore size Stroke CVM5T Manual override Width across flats B2 Width across flats B1 0.025 0.061 RE A B REC CX CY Width across flats

CV/MVGQ

TZ TY TX TT TD S QY Bore size (mm) 20 25 32 40 116 36 52 32 32 10 8 62 14 120 40 60 40 40 10 9 62 14 122 40 60 40 40 10 9 64 16 154 44.5 77 53 53 11 10 88 16 10-15-24 25 Valve Mounted Cylinder Double Acting, Single Rod Series CVM5 Head Side Trunnion Style (T) Bore size Stroke CVM5T Manual override Width across flats B2 Width across flats B1 0.025 0.061 RE A B REC CX CY Width across flats

Support Guide/11-LEFG Series

500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load

SMC Pneumatic Clean Series

MM 2-LC LX D D I LZ 20, 25 Width across flats B2 Standard port MM Relief port 45 45 Width across flats NA LT N 4-LD N X Y S + Stroke X Y Z LS + Stroke Z + Stroke ZZ + 2 x Stroke 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P N I F A 13 8 AL D K MM NA NN B1 B2 G 54 47 47 40 B ZZ 188 154 152 144 LX 55 40 40 40 LH 30 28 28 25 LT LS LD 4 4 4 4 LC 75 55 55 55 LZ X Y 40 32 25 20 Bore size 1/8 27 25 25 21 24

Electric Actuator with Integrated Guide

(kg) 300 L2 200 Mer a=1000 a=2000 a=3000 L2 (mm) Rolling Yawing m 100 L2 Mer 50 40 30 20 10 0 m Transfer load m (kg) 300 200 a=1000 a=2000 a=3000 L3 (mm) L3 100 m Mey a 50 40 30 20 10 0 Transfer load m (kg) Refer to page 71 for deflection data. 42 46 Non-standard Motor/Horizontal Mount Specification Series LTF8 Dimensions/LTF8FPH(X10) Scale: 13% thread depth 9 4-M6 x 1 1.

A

40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44-02 1/4 60 48 36 54 Y41-02 1/4 14 39 24 Y44-03 3/8 60 48 36 54 Y41-03 3/8 14 39 24 Y54-03 3/8 72 62 40 62 Y51-02 1/4 14 24 41 Y54-04 1/2 72 62 40 62 Y52-03 3/8 14 24 41 Y61-03 3/8 15 30 50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

Vacuum System Peripherals:

40 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Bernoulli Gripper

Material 20 20 mm 60 60 mm 30 30 mm 80 80 mm 40 40 mm VP Resin VS Stainless steel With mounting plate Material: Resin is only selectable for body size 40.

3

m3/h.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

4.5 9.5 33h9 34 h9 17H9 5.3 2.5 4.2 10 4.2 7.5 4.5 2.5 6 4 M5 x 0.8 M5 x 0.8 7 5.5 45 30 18.4 12.2 50 5 7 39h9 40 h9 20H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 2.5 6 5 (mm) JJ M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF