Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

J M N 10-/21-AR20-B 10-/21-AR25-B 10-/21-AR30-B 10-/21-AR40-B 10-/21-AR40-06-B 10-/21-AR50-B 10-/21-AR60-B 2 Note 2) 1/8, 1/4 28.5 1/8 20.5 40 11 67.4 44 26.5 65.5 M28 x 1 30 28.5 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41

VXD21/22/23

02 VXD2130-03 VXD2140-03 VXD2130-04 VXD2140-04 VXD2150-06 10 10 15 10 15 20 0.02 0.02 0.02 0.02 0.02 0.02 2.0 2.4 5.0 2.4 5.5 9.5 0.35 0.35 0.35 0.35 0.35 0.30 8.5 9.2 18 9.2 20 38 46 58 110 58 130 230 0.4 0.4 0.7 0.4 0.7 0.7 0.5 0.5 0.7 0.5 0.7 0.7 0.7 0.7 1.0 0.7 1.0 1.0 0.9 0.9 1.0 0.9 1.0 1.0 0.5 0.5 1.0 0.5 1.0 1.0 420 420 670 500 670 1150 3 8 Courtesy of Steven Engineering, Inc.-230

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

C 6 13.5 4.5 0.5 Width across flats F 10 Tightening torque: Tighten within 10 1 Nm. G1/4 (mm) Part no.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

-02 AS321F AS331F AS421F AS431F Model 3.2, 4, 6 Metric size 3.2, 4 6, 8, 10 4 6 8, 10 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 180 230 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Effective area (mm2) Note)

VR4151/4152

Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25 0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.

A_HEC-OM-J017

Host STX 37H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK CR Host SOH UT STX 37H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK UT CR HEC 4-6 Details of Communication Format 4-10 Offset setting (with writing EEPROM) Set offset of each Thermo-con from host. In this command, offset data is memorized into EEPROM.

Miniature Regulator Series ARJ210

M5 x 0.8 6 3.5 15.5 50 17.2 ARJ1020F-M5-06 22 12.8 6 VY1 Manifold Base (Option)/Dimensions G PPA 2-3.5 (Mounting hole) 31 (ARJ1020F-M5-04) 32 (ARJ1020F-M5-06) AL Applicable tubing O.D. 4, 6 (Mounting hole) IN (Common) Stations Manifold base part no. 4 6 10 B dimension A dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 14-4-5 Miniature Regulator Series ARJ310 F.R.L.

Nozzle Type Ionizer

8 mm, I.D. 5 mm, Length 100 mm to 500 mm O.D. 8 mm, I.D. 5 mm, Length 100 mm to 500 mm Supply pressure [MPa] 0.25 Flow meter 6 Union tee fitting 0.20 O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.15 0.10 O.D. 6 mm, I.D. 4 mm, Length 100 mm O.D. 6 mm, I.D. 4 mm, Length 100 mm 0.05 Ionizer 0.00 0 300 100 200 Flow rate [L/min

A

37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000

Pressure Relief 3 Port Valve with Locking Holes

N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.

Shuttle Valve/AND Valve with One-Touch Fittings

Flow Rate and Effective Area VR1220F VR1210F Model Metric size 10 8 6 8 6 4 3.2 Applicable tubing O.D.

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

AC Servo Motor Driver (CC-Link Type ）

1/2 10 1000 625 Hence, set 32768 to CMX and 625 to CDV. 6 7 6.

5

= 2, 3, 4, 5) D-M9V 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9V 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9 D-A9 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9W 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9A 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7/A80 D-A7H/A80H D-A73C/A80C 5 10 15 + 10 (n 2) (n = 4, 6) Note 4) Rail mounting

AC Servo Motor Driver (CC-Link Type ）

1/2 10 1000 625 Hence, set 32768 to CMX and 625 to CDV. 6 7 6.

CV/MVGQ

For Safety Instructions and Actuator Precautions, refer to pages 10-24-3 to 10-24-6.

CV/MVGQ

For Safety Instructions and Actuator Precautions, refer to pages 10-24-3 to 10-24-6.

FQ1

Symbol Symbol No. x 50 001 005 010 020 050 075 100 005 010 020 040 074 105 q w q 0.01 0.01 e w 0.005 0.005 r 0.002 10 50 100 0.002 5 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Fiber element (Cotton): FQ1011N-06-H HEPO II element (PP): FQ1011N-06-R Symbol Symbol Fluid: Water Temperature: Normal temperatures Filtration material: Fiber (Cotton) Fluid: Water Temperature: Normal temperatures

FQ1

material: HEPO II (PP) 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

VXR21/22/23

IN Model/Valve Specifications Connection Max. operating pressure differential (MPa) Flow characteristics Water, Oil Weight (g) Min.operating pressure differential (MPa) Orifice size (mm) Max. system pressure (MPa) Model Thread Water Oil Cv converted Av x 10 -6 (m 2) 1 2 3 4 VXR2150-04 VXR2150-06 VXR2260-10 VXR2270-12 VXR2380-14 VXR2390-20 20 20 25 35 40 50 1250 160 180 290 530 720 1200 6.5