3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Refer to p.2.10-37 for DIN rail model number.

ZPT/ZPX

Width across flats 37 Hexagon width across flats 22 Width across flats 37 Hexagon width across flats 24 A 8 B 34 34 (mm) Model A 63 ZPT63H-B8 B 65 C 14.5 D 26 E M8 x 1.25 Y 3.5 63 ZPT63H-B10 65 14.5 26 M10 x 1.5 3.5 63 ZPT63H-B12 65 14.5 26 M12 x 1.75 3.5 63 ZPT63H-B16 65 14.5 26 M16 x 1.5 3.5 (mm) 80 ZPT80H-B8 82 16.5 28 M8 x 1.25 4.5 80 ZPT80H-B10 82 16.5 28 M10 x 1.5 4.5 Model A 63 ZPT63H-A16

Sine Cylinder Series REC

NT-02 NT-03 NT-04 26 30 25.5 M20 x 1.5 8 13 15.0 12.5 M8 x 1.25 5 32 37 31.5 M26 x 1.5 8 17 19.6 16.5 6 M10 x 1.25 41 47.3 40.5 M32 x 2.0 10 22 25.4 21.0 8 M14 x 1.5 Trunnion Nut Material: Carbon steel (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no.

reduces flow setting time

35.9 15.6 48 (49) AS321FS-03-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-03-11 (S) 3/8" 15.5 26.7 37 28.2 15.6 39 (40) AS421FS-04-11 (S) 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FS-04-13 (S) 1/2" 19.3 30.9 43.8 (43.7) 34.7 17 64 (63

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

35.9 15.6 48 (49) AS321FSG-03-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FSG-03-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-03-11 (S) 3/8" 15.5 26.7 37 28.2 15.6 39 (40) AS421FSG-04-11 (S) 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FSG-04-13 (S) 1/2" 19.3 30.9 43.8 (43.7) 34.7 17 64

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

35.7 15.6 40 AS32l1F-U02-12A 12 18.5 29.7 40 34.5 17 42 AS32l1F-U03-06A 6 10.4 21.8 32.1 36.4 50 48.4 43.6 42 1/4 19 16.6 13.3 39 AS32l1F-U03-08A 8 13.2 22.7 33 14.2 AS32l1F-U03-10A 10 15.9 26.7 37 28 15.6 40 AS32l1F-U03-12A 12 18.5 29.7 40 26.8 17 42 AS42l1F-U04-10A 10 1/2 24 15.9 18.8 27.4 40.3 36.2 50.8 49.2 42.2 40.6 15.6 52 AS42l1F-U04-12A 12 18.5 30.8 43.7 35.1 17 54 AS42l1F-U04-16A

CHKD/CHKG

Bore size (mm) 30 d 20 NTH-020 13 15 M8 x 1 12.5 5 20 NTH-025 17 19.6 M10 x 1.25 16.5 6 25 NTH-032 19 21.9 M12 x 1.25 18 7 32 NTH-040 22 25.4 M16 x 1.5 21 10 D C 40 NTH-050 27 31.2 M20 x 1.5 26 12 50 NTH-060 32 37 M24 x 1.5 31 14 63 NTH-080 41 47.3 M30 x 1.5 40 17 H B 80 NTH-100 55 63.5 M39 x 1.5 54 20 100 NTH-125 70 80.8 M48 x 1.5 69 26 Note) There may be a slight difference between the

NAAMS Standards Compliant

INFORMATION NAAMS Standards Compliant Power Clamp Cylinder 50, 63 Weight reduced by up to 38% Aluminum body with greatly reduced weight Suitable for robot material handling Bore size CKZ2N a CKZ3N-X2742A Reduction rate New New 50 5.1 kg a 3.2 kg 37% reduction 63 7.2 kg a 4.4 kg 38% reduction * Arm opening angle: 135, Arm position: R Simple switch adjustment greatly reduces work hours Switch

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10 833 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP6 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Sine Cylinder Series REC

NT-02 NT-03 NT-04 26 30 25.5 M20 x 1.5 8 13 15.0 12.5 M8 x 1.25 5 32 37 31.5 M26 x 1.5 8 17 19.6 16.5 6 M10 x 1.25 41 47.3 40.5 M32 x 2.0 10 22 25.4 21.0 8 M14 x 1.5 Trunnion Nut Material: Carbon steel (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no.

CXS

MTS Smaller and lightweight MY CY Dimensions/Weight Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length MG Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 CX Basic type 6 Additional dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Note 2) Lead wire entry is inward when the product is shipped. 81 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS6, CXSL6 10-/1122122163.5+ST ST 50+ST 8 5.5 16 2-3.4 through 15+1/2ST M3 x 0.5 x 5L 2.75 19 26.5 counter bore depth 3.3 14 1 OUT 3 3 (Hexagon socket head set screw) 1 3.2 5.6 (16) 280.2 280.2 22.7 35 16 37 6.3 5 6 M2.5 x 0.45 x 6L M3 x 0.5 x 12.5L and M3 x 0.5 (Hexagon

Micro Mechanical Valve Series VM1000

) Push button (Flush) Note 1) Port size Rc 1 8 01 Y 1 8 1 8 NPT G N01 F01 Body option Standard External pilot type 1 0 Twist selector (2 position) Key selector (2 position) Push-pull Except VZM550-01-37 Note 1) When selecting the flush type, it is not necessary to select the suffix for the actuator.

VS 8-2/VS 8-4

(According to ISO1179-1), NPTF 1/8" Pilot exhaust port M4 x 7 earth thread 56.6 30 11.5 8 I E 95 65.4 41.2 3/5 3/5 2 2 2 2 14 12 39 4 4 4 4 30 21 1 1 181.5 24.5 13 17 2n x Rc, G (According to ISO1179-1), NPTF 3/8" 4(A), 2(B) port 2 x Rc, G (According to ISO1179-1), NPTF 1/2" 1(P) port 64.5 27 (n-1) x 27 33.5 Communication connector U side D side n Station number 4 2 1 3 L2 L1 5.5 47n + 37

7

Conduit VXR C E U 280 VXH 23 T VXF G1/2 VX3 A VXA OUT IN OUT IN M B J I F 2 x P Port size (D) L K Flat terminal 11 U E C T A B OUT IN OUT IN M 2 x P Port size J I F L K (D) (mm) Electrical entry Port size P A B C E F I J K L Model Flat terminal Conduit terminal Conduit D M T T U U V T U 55 (61) 99.5 68.5 55 (61) 47.5 61 (67) 23 3/8, 1/2 96.5 (102.5) 25.5 30 4 B VXD2 70 20 11.5 14 50 33 37

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37

Compact Cylinder with Air Cushion

Add the stroke to calculate the length of intermediate strokes. 7 Compact Cylinder with Air Cushion Series RQ Mounting Bracket Dimensions Foot type Foot type/RQL, RDQL mm B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD 20 to 100 32 37 6.6 61.2 21 17 38.5 20 to 100 40 44 6.6 68.2 28 17 38.5 Special cap bolt LH LY 30 to 100 50 49.5 9 75.7 26.5 18 43.5 mm LX X X LG Y Y Bore size

MK

48 14 14 17 17 20 24 30 35 7 7 8 9 4.5 5 7 7 6.5 6.5 7.5 7.5 14 14 19 19 16 16 20 20 3 3 3.5 3.5 M10 x 1.5 M10 x 1.5 M6 x 1.0 M6 x 1.0 17 17 22 28.5 101.5 76 70 81.5 85 37 29.5 34 35 7.5 8 10.5 10.5 0.15 0.15 Data 102.5 0.15 0.15 M12 x 1.75 M8 x 1.25 122 0.15 0.15 14 depth 10.5 M12 x 1.75 M10 x 1.5 125 0.15 0.15 Note 1) This cylinder rod is retracted.

RZQ

345.5 382.5 40 606 37 355 392 CE2 50 631 41 355.5 396.5 ML2B 63 631 44.5 357.5 402 C J G5-S qA port pressurization at initial (retracted) position.

RQ

Add the stroke to calculate the length of intermediate strokes. 7-7-10 10 Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod Mounting Bracket Dimensions Foot Style Foot style: RQL/RDQL B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD 32 20 to 100 61.2 37 21 17 38.5 6.6 40 20 to 100 68.2 44 28 17 38.5 6.6 Special cap bolt LH LY 50 30 to 100 75.7 49.5 26.5 18