VXA21/22

(ANR) Orifice 3 (VXA3135 4)P1 0.1MPa Orifice 2.2 (VXA3125 4)P1 0.23MPa Orifice 1.5 (VXA311 5 4)P1 0.55MPa How to Calculate Flow/Air qEquation in the domain of subsonic flow P1+0.1013=(1 to 1.8941)(P2+0.1013) Calculation by Cv factor Q=4073.4Cv gP(P2+0.1013)l/min(ANR) Calculation by effective area Q=226.3S gP(P2+0.1013) l/min(ANR) wEquation in the domain of sonic flow P1+0.1013 1.8941

15

Port P2 Port P1 P2 P2 P1 P2 Port P1 Pressure is applied Operating direction P1 Pressure is applied Operating direction P2 Pressure is applied P2 Pressure is applied 1486 Magnetically Coupled Rodless Cylinder 3-Options available for stroke adjustment Bumper bolt (resin tipped) Bumper bolt (Same on the opposite side) Shock absorber + Adjustment bolt (metal ended) Adjustment bolt (Same on

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Stability of suction position,

At this time, read vacuum pressure P1, obtain the suction flow rate from the flow rate characteristics graph for the ejector that is being used, and render this amount as the leakage of the workpiece.

VN-OMP0002

) (P1) (P1) (P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 15A 211 420-04 1/2 B(12.7) 20A 311 500-06 3/4 B(19.1) 25A 411 600-10 1 B(25.4) 2 32A 511 800-12 1 1/4 B(31.8) VNA01 VNA02 VNA03 VNA1 40A 611 900-14 1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B(50.8) (P2) () 10 (),12(P1) 10(P2) EXH , 6 VN-OMP0002 1 2 3 () 4 P2 5 6 7 8 9 10 11 O O 12 13 14 7 VN-OMP0002 No. 1 2 3 4

VN-OMT0001

) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) VND0D VND02D 12(P1) 10(P2) 1mm 12(P1) 10(P2) 2(B) 1(A) 6 VN-OMT0001 No. 7 VN-OMT0001 : TT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

CEx-OMG0106

When P1 is blinking, use UP & DOWN key to reconfirm each and individual present value. When the input, value is blinking, press READ once to shift the operation back to P1. 48 11-2 Program Setting Input desired cylinder positions. 11-2-1 Input Method Turn the controller switching mode to PROGRAM. Note: Step 0 for every program is END. Program no 1 will start blinking.

SMC Basic Pneumatics

v=l t P"p1 + 147 Where V = capacity of rceiver Q = compressor outpul (clm) Pa = atmosphric plsssurc P1 = compressor outsul pressure V = (600'14.7y(10O+14.7) =77lf as a minimum number, a prudent suggestion might begin with 120 ft".

Ejector Valve Unit, Series ZYY/ZYX

A A A B A B P1 B B Section A-A (ejector) Section B-B (solenoid valve) Replacement parts list Parts list No. 1 2 3 4 5 6 7 8 Description Material No. Description Part No.

%silltr

v=l t P"p1 + 147 Where V = capacity of rceiver Q = compressor outpul (clm) Pa = atmosphric plsssurc P1 = compressor outsul pressure V = (600'14.7y(10O+14.7) =77lf as a minimum number, a prudent suggestion might begin with 120 ft".

Smooth Cylinder/Low Speed Cylinder

As a guide, when W + P0a>P0A, adjust P1 to make W + P1a = P0A. W: Load (N) P0: Operating pressure (MPa) P1, P2: Reduced pressure (MPa) a: Rod side piston area (mm2) A: Head side piston area (mm2) D-X 1241 Smooth Cylinder Specific Product Precautions 2 Be sure to read before handling.

0.4

Flow rate characteristics: C Max. operating frequency SZ 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m SUP side pressure (P1) VF VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.

Table of Contents

A Graph 1 Graph 2 120 60 110 B 100 50 C P1 63 63 90 80 40 70 Regulator Circuit C Load weight (kg) Load weight (kg) P2 60 30 50 50 A 50 Regulator valve 40 20 40 40 30 B 32 32 20 10 C P1 10 0 0 0.4 0.3 0.3 0.5 0.6 0.7 Operating pressure (MPa) 0.4 0.5 0.6 0.7 Operating pressure (MPa) Selection example Confirmation of allowable kinetic energy Selection conditions: Transfer direction: Vertical

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L1 L2 L2 Main circuit power supply L3 L3 Regenerative converter N P1 P2 N DC reactor Connect between P1 and P2. (Connected at time of shipping.) P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D L11 L21 Connect between P and D. (Connected at time of shipping.)

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H

VN-OMP0001

) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) Air operated Solenoid Port VNC02 12 (P1) External pilot Bleed port External pilot 10 (P2) Bleed port External pilot Pilot exhaust Ass Ass Ass Ass y y y y VNH VNH VNH VNH () 3 3 3 3 (VNH (VNH (VNH (VNH ) ) ) ) VNH13 3 5MPa 7 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / (VNC (VNC (VNC (VNC ) ) ) ) /30m /30m 0.49MPa

Table of Contents

(mm) D1 Note) A Weight (g) 6-applicable tubing D2 P2 L2 L3 M P1 L1 Model L1 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KQ2ZT04-01S 18.5 54.5 50.5 25 31 44 27 33 46 56 54 62 P2 14 KQ2ZT04-02S 10.4 13.4 21 16 13.4 10.4 4 21.5 57.5 51.5 KQ2ZT04-03S 17 23.5 59.5 53.5 L2 P1 P1 D1 KQ2ZT06-01S 18.5 54.5 50.5 14 6 KQ2ZT06-02S 21.5 57.5 51.5 12.8 13.4 22 17 13.4 12.8 KQ2ZT06-03S

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

1 Q=226S P(P2+0.1013) Sonic flow : P1+0.1013 1.89(P2+0.1013) Do not use in an explosive environment. 2 Q=113S(P1+0.1013) Q : Flow rate [ /min(ANR)] S : Effective area (mm2) P : Differential pressure (P1-P2) [MPa] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] Do not use in locations subject to heavy vibration and/or shock.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).

Vacuum

Analog Output Characteristics Hysteresia mode when the values of P1 and P2 are equal or when P1>P2 but within 3 digits, the hysteresis will be automatically set to 3 digits tor the set value ot P1. Window comparator mods The hysteresis is automatically set to 3 digits, so separate P1 trom P2 by 7 digils or more when programming.