Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 1000mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 1000mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 1000mm, CE Compliant: CE Compliant

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RS Q G RS H A RZQ MI W S CEP1 CE1 Series REA CE2 Series REB ML2B C J G5-S CV MVGQ CC RB J Series REA (300 mm/s) Series REB (600 mm/s) DGuide type Model Page Guide type Model Page -X Direct mount type REBR 10-2-63 Basic type REA 10-2-6 20High precision guide type (Single axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision

5 Port Solenoid Valve Series SY3000/5000/7000/9000

position SV Nil 02 2 stations D U D side U side Q CE-compliant 2 to 10 stations ... ...

ZP

-01NS 08 8 KQ2H08-01NS F2 30 (Rotating angle) 10 to 32 Model A B C D E 2 F G H J K L M N P Q R S Vacuum inlet direction q Pad dia.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

10-SS5YJ3-32(-Q) Type 10-SS5YJ3-S32(-Q) Type 10-SS5YJ3-32SA(-Q) Dust cap Manifold base Applicable manifold base 10-SS5YJ3-21P(-Q) 10-SS5YJ3-32P(-Q) Manifold base Note) Manifold gasket SYJ3000-14-2 can be used with the following manifold bases.

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Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

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2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY3000-26-10A(-Q) SY5000-26-21A(-Q) SY7000-26-23A(-Q) 10-SY3000 10-SY5000 10-SY7000 SY9000-GS-2 10-SY9000 10-SY3000 10-SY5000 10-SY7000 10-SY9000 SY9000-26-2A(-Q) SY9000-26-4A(-Q) Note) The gasket assembly consists of 10 sets of mounting screws and a gasket.

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-ASD330F-01-08 10-ASD230F-M5-06 2.

A

25 A I R C U S H I O N E D 32 1, 2, 3, 4, 5, 6, 8, 10, 12 40 40 1, 2, 3, 4, 5, 6, 8, 10, 12 45 50 1, 2, 3, 4, 5, 6, 8, 10, 12 55 63 1, 2, 3, 4, 5, 6, 8, 10, 12 55 Courtesy of Steven Engineering, Inc. !

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Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

Modular Design with Uniform Body Style

5000 0 10 5000 15000 Flow rate [L/min (ANR)] 0 15000 Flow rate [L/min (ANR)] 90 AL20-D to AL60-D Series Dimensions AL20-D T N S J M U Bracket (Option) D R C B V Q IN OUT 2 x P (Port size) A Clearance for maintenance G S N T U D M J AL30-D to AL40-06-D R C V Q IN OUT 2 x P (Port size) B A E Clearance for maintenance G AL50-D to AL60-D T N S J M D U Bracket (Option) R V Q C B IN OUT 2 x P

Modular F.R.L. Units

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 12 1 1 2 2 1 2 1 3 1 2 1 L 14 2 4 12 10 5 1 3 How to Order Refer to page 65 for size 10.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Types Q Q Q Q Q Q Q Q 21 Q Series SYJ3000 Construction Drawings Construction A B A B 2 position single 2 position double PR R PR R 3 5 1 4 2 4 2 5 1 A B A B 7 7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction

2/3 Port Valve

DC Option Material 50 45 20 60 40 15 _ 10 (1) 10 (2) 5 Description No. AC 20 Min. Standard Aluminium VX22 Body q DC Note 1) Dew point 10C or less. Note 2) 50cSt or less. Note 3) "D", "N", etc. in the parenthesis are option symbols.

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VJ10-36-1A-10 . 2 pcs.

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2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Modular F.R.L. Unit

Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G-27-10-R1 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD37 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD37 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD47 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD47 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD47 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48