CL

27 27 32 41 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 8 11 11 13 16 96 108 115 129 140 27 32 32 37 37 44 52 64 78 92 15 17 17 21 21 60 70 86 102 116 16 20 20 25 30 26 27 26 30 31 32 40 40 52 52 54 59 67 72 76 10 10 10 14 14 10 13 18 23 25 85 95 102 113 124 10 12 15 17 19 25 to 500 25 to 600 32 to 600 41 to 750 45 to 750 25 to 500 25 to 600 32 to 600 41 to 750 45 to 750 M8 X 1.25 M8 X 1.25

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

50 152 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 50 45 150 22 21 25 11 90 170 56 120 152 37 115 194 103 50 55 182 M10 x 1.5 depth 20 M14 x 2 depth 25 17 depth 12 Long Stroke Bracket Mounting Stroke Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V P U Y T R S O R Q 20 20 20 250 to 400 157 80 30 40 48 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/

Pin Clamp Cylinders

Bolt 14.50.1 14.50.1 Manually unlocking Lock ring 1) Remove the dustproof cover. 2) Screw the commercially available bolt (M3 x 25 L or more) into the lock ring shown on the left and raise the lock ring toward the head side. 3) The lock ring and piston rod form a right angle, and the lock is released. (29) LOCK 27 Head side 70 D d 0 0.05 Q Q K SR C 120 45 15.5 14.5 26 (4) MK 8 to 10 14 14

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Symbol NPN output (+ COM) Nil EX510-S002B Stations N PNP output ( COM) EX510-S102B PWB U side D side COM 7 0 1 1 3 2 6 15 14 10-SS5Z3-60S6BD-05U (-Q)1 set (Type 60S6B 5-station manifold part no.) 10-SZ3160-5LOZ-C6 (-Q)2 sets (Single solenoid part no.) 10-SZ3260-5LOZ-C6 (-Q)3 sets (Double solenoid part no.) The asterisk denotes the symbol for assembly.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !

3 Port Solenoid Valve SYJ300/500/700 Series

N.O. 24 VDC 12 VDC Type 42 7 Q Q Q Specifications Series SYJ300/500/700 Low Power Consumption 0.5 W Q Q Q Q Q SYJ300.pages 10-12 Q Q SYJ500.pages 13-15 Q SYJ700.pages 16-18 Q Q Q Specifications Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q 9 Series SYJ300 3 Port Solenoid Valve Valve Specifications Model Weight g Valve model Type of actuation Port

CNA

6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 25 to 500 25 to 600 32 to 600 41 to 750 45 to 750 M18 x 1.5 M8

CNA

GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11

33

Q = qm x C x (T2 T1) r x qv x C x iT 60 = 1 x 10 x 4.2 x 103 x 2.0 60 = Q = qm x C x (T2 T1) 860 = 1400 [J/s] 1400 [W] g x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 1400 [W] x 1.2 = 1680 [W] 1 x 10 x 60 x 1.0 x 103 x 2.0 860 = qv: Circulating fluid flow rate Q: Heat generation amount Users equipment T2: Return temperature 120 [cal/h] 860 = Thermo-chiller

Wedge Cam Operation Gripper Series MHK2

Wedge Cam Operation Gripper 2 Finger 12, 16, 20, 25 Series MHK2 Wedge cam actuation for precision/rigidity Dust cover for adverse environments Compact and Lightweight Mounts from 3 directions Auto switch capable Q Q Q Table of Contents Q Q Q Q Product Features .page 4-5 Operation Guide/Safety Instructions .page 6-9 How to Order .page 10 Specifications .page 11 Construction

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

ZPT32F10-0-A14 16 36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q: 8 K P 5.1 K P Q: 6 Q: 8 K P 5.1 Stroke H I Stroke H I 20 20 3.6 3.6 +10 +10 0 0 30 30 +1 1 +1 1 +6.4 +6.4 +20 +4.9 +20 +4.9 50 50 +25 +25 +51.4 +51.4 +40 +49.9 +40 + 9.9 13-11-110 15 Vacuum Pad: Ball Joint Type Lateral Vacuum Entry Without Buffer/Female

53

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C Cooling capacity = Considering a safety

VCC

C 6 13.5 4.5 0.5 Width across flats F 10 Tightening torque: Tighten within 10 1 Nm. G1/4 (mm) Part no.

MXH Series Compact Slide

10 1 10 1 0.1 Weight m(kg) Weight m(kg) Weight m(kg) 20 16 10 6 20 1 20 16 16 0.1 0.01 10 10 6 6 0.01 0.001 0.1 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L(mm) Overhang L(mm) Overhang L(mm) 1 kg = 2.2046 lb 1 kg = 2.2046 lb 1 kg = 2.2046 lb Graph 5 Load eccentricity 100mm Graph 8 Load eccentricity 100mm Graph 11 Load eccentricity 100mm 1 10 10 0.1 1 Weight m(kg) Weight

Modular F.R.L. Unit

Metal bowl with level gauge w q With bowl guard e q w Drain guide 1/4 N R q w Non-relieving type Flow direction: Right to left Note 1) The circled numbers indicate the order in which the units are assembled.

Series MXP Precision Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q 157 Q MXP Series 6, 10, 12, 16 Traveling parallelism Traveling parallelism: 0.004mm Parallelism: 0.02mm Traveling parallelism on guide block top side Traveling parallelism on guide block side Run out indication when body is fixed on standard base and cylinder is fully extended. MXP10,12,16 Cylinder with built-in linear guide.

HRL

Cooling capacity*2 kW 9 1*8 19 1*8 26 1*8 Heating capacity*3 kW 1.5 1 4.0 1 6.0 1 Temperature stability*4 C CH1: 0.1/CH2: 0.5 Rated flow (Outlet pressure) L/min 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum flow rate L/min 120 16 130 16 180 16 Maximum pump head m 50 49 55 49 68 49 Settable pressure range*5 MPa 0.10 to 0.50 0.10 to 0.49 0.10 to

Series VQ Base Mounted Metal Seal/Rubber Seal

G H J1 J2 K Q R1 R2 V Note 1) Refer to p.1.10160 for details.