SZ3000

M5 x 0.8 Mixed C4 C6 M5 M 1 2 3 4 5 5 6 24VDC 12VDC Match to the voltage specifications of the manifold.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

+0.030 0 31 6 x M6 x 1 thread depth 10 N 1 x F 2 +0.030 0 6H9 ( ) depth 6 55.5 2 x M8 x 1.25 thread depth 15 40.5 M 0.5 58.5 62 Z ZZ G H (NN 1) x H 16 34 16 34 A B 11 12 6.6 12 38 2 7 A B NN x M8 x 1.25 thread depth 16 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 GA HA Section AA Section BB (mm) Model ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5 296.5 336.5 M 92 92 92 102 115 156 197

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

U D B M CE-compliant SI unit part no.

Single Axis Electric Actuator Series LJ1H

acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 6 Standard Motor/

AC Servo Motor Driver (CC-Link Type)

/speed specifying system selection 0h PC31 LMPL Software limit 0 10STM m PC32 LMPH 0 10STM m PC33 LMNL Software limit PC34 LMNH (3) [I/O setting parameters (No.

MQQ

B C d H D E F MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 20.5 M5 x 0.8 8 9.2 6 15.5 5 9.2 4 10 10 8 22.5 M6 x 1.0 8 9.2 8 16.5 6 11.5 5 16 16 10 24.5 M8 x 1.25 8 9.2 10 18.5 6 15 5 20 20 13 33.5 M10 x 1.25 10 11.5 12 22.5 11 19.6 6 25 25 17 40.5 M14 x 1.5 14 16 16 28.5 12 25.4 8 28 28 22 Applicable bore size (mm) Part no.

CL

6 !7 !8 !

SMC Pneumatic Clean Series

X Y Z LS + Stroke LX LZ ZZ + Stroke (mm) 7 7 6 6 LD 4 4 4 4 LC 3 3 3 3 LT 30 25 22 20 LH 51 53 53 53 LS Z 135 125.5 123.5 118 ZZ 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 54 44 36 32 LX 10 10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5 192 55 55 60 60 10 12 11 14 5 5 6 6 40 45 55

RSQ

6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

Stroke Reading Cylinder and Counter

each in X, Y, Z directions Impact resistance IP-67 (IEC Standard)(2) Enclosure CE1-R 5 m, 10 m, 15 m, 20 m Extension Cable (Option) Note 1) This includes the digital display error of the counter (CEU5).

MY1

X x m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) "m" is a weight movable by thrust.

VQ5000

(A) 4 (B) 2 Electrical entry 6 1 (P) 5 (R1) 3 (R2) G Coil voltage Lead wire length 0.6 m 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Lead wire length 1.5 m Grommet Body 5: Plug lead sub-plate H Function Nil Y R Standard type (1 W) Low wattage type (0.5 W) External pilot Seal (1) 0 1 Metal seal Rubber seal (2) Note 1) Applicable to

HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s 3 u i ni n w im k C ra c l o Mi 6 3 8 ax n o 1 ti M ta ro e m g u m n ni Mi 180 e ra C s l i o w c k n tio ta ro m mu xi Ma Positioning pin hole Positioning pin hole Position of bottom positioning pin hole Position of bottom positioning pin hole With external shock

Thermo-chiller

Applicable model HRL-BB002 HRLE050-m-m HRL-BB001 HRLE090-m-m y u t Parts List r i No. Description Material Applicable model Size Qty.

MY2

3 MY2C16 @9 %6 !4 #1@3@9 !5@8 @7 %5!

PF2A/PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements Model Selection Allowable lateral load MIW8 MIS8 MIW12 MIS12 0.7 MPa 70 0.7 MPa 30 0.6 MPa RE A B 0.6 MPa 0.5 MPa 60 REC 0.4 MPa 0.5 MPa 0.3 MPa 0.4 MPa Lateral load F (N) Lateral load F (N) 50 CX 0.2 MPa 20 Point of application