Magnet: D (Built-in Magnet), Mounting: B (Basic), Type: A (Air Cushion), Bore: 25mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Magnet: D (Built-in Magnet), Mounting: L (Axial Foot), Type: A (Air Cushion), Bore: 32mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 100mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Table of Contents

9@0 w!0!1 e !

Aluminum High Vacuum Angle Valve

Maintenance Parts XM XY w Bonnet Assembly Part No. i Bypass Valve Part No.

Table of Contents

0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-74.)

Free Mount Cylinder

Note 4) Figures in ( ) in the table W are D-A93.

ISO Cylinder

W Double knuckle joint V (1 pc.) V (1 pc.) Standard Mounting Bracket/Accessory Part Nos.

Table of Contents

W.

Table of Contents

4 @1 w @4 !0 y !3 !5 @3 !0 !

Rotary Actuator/Vane Type

D77 Free Mount Type Rotary Actuator With Angle Adjuster/Vane Type CRBU2WU Series Size: 10, 15, 20, 30, 40 RoHS How to Order CRBU2 S 20 180 U Z W With auto switch CDRBU2 S 20 180 L U Z M9B W q w e r t y u i o !

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Smooth Cylinder/Low Speed Cylinder

0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 REA Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 REB W W W 0.7 193 172 212 REC 0.3 144 126 156 CY CY G 0.5 109 94 118 0.7 90 78 97 CX Foot: L Rod flange: Head flange: 0.3 433 386 476 F G MQ L, F 0.5 334 297 367 W W W RHC 0.7 281 250 309 0.3 210 185 229 RZQ G 0.5 160 141 175 0.7 134 117 129 D-X 1231 Series CS2Y Construction

NCQ8

M2 bolt circle M1 W I dia.

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

15

Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible

Integrated Controller

/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2 0 0 Speed: V [mm/s] 200

2–4

D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type.