53

: 200/400 VAC Note 5) q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: 20C, r Load: Same as the cooling capacity, t Circulating fluid flow rate: Rated flow, y Power supply: 200/400 VAC, u Piping length: Shortest Note 6) With the pressure control mode by inverter.

Series AP500

Pressure gauge unit 2) w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port AP1001S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 2PW 3PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable.

VQZ1000/2000/3000

1 W DC (42 mA), 0.5 W DC (21 mA) 12 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) Power consumption (Current) VQD 100 VAC Inrush 0.5 VA (5 mA), Holding 0.5 VA (5 mA) 110 VAC Inrush 0.55 VA (5 mA), Holding 0.55 VA (5 mA) 200 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 220 VAC Inrush 1.1 VA (5 mA), Holding 1.1 VA (5 mA) Model Response time (ms) (1) Weight (g) Flow characteristics 1 4/2 (P A/B

HRX-OM-X037

. 9-18 HRL Series HRX-OM-X037 Contents 9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300-A-40-T3 CH2 .9-22 9.6 Types of Hazard Labels . 9-23 9.6.1 Positions of danger warning label

C95

W 0 to 0.5s C85 2.

Table of Contents

1 Drain q r e w t i u y o !0 !

MY1

5 4 MY1CW25 MY1CW25 MY1CW20 MY1CW20 1 1 MY1C MY1CW25 MY1CW25 3 MY1CW20 MY1CW20 MY1H MY1CW16 MY1CW16 MY1CW20 MY1CW20 2 0.5 0.5 MY1CW16 MY1CW16 MY1 HT MY1CW16 MY1CW16 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 MY1 W MY1 W Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) MY2C Maximum Load Mass: MY1CW MY2 H/HT MY1CW/m3 MY1CW/m2 MY1CW

MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

25 37.5 50 87 100 325 300 250 275 225 250 200 225 175 200 150 175 125 150 25 100 125 51 75 112 69 64 12.5 25 37.5 50 87 100 325 316 250 291 225 266 200 241 175 216 150 191 125 166 30 100 141 56 75 128 86 68 12.5 25 37.5 50 103 116 341 316 250 291 225 266 200 241 175 216 150 191 125 166 32 100 141 56 75 128 91 76 12.5 25 37.5 50 103 116 341 300 200 280 180 260 160 240 140 220 120 200 100 180

Cylinder with Lock

[mm] Bore size Standard stroke Max. manufacturable stroke Stroke range q Stroke range w 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500,

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

40 Work load: W [kg] Work load: W [kg] 20 Lead 16: LEKFS32EA 30 Lead 16: LEKFS32EA 20 Lead 24: LEKFS32EH 10 Lead 24: LEKFS32EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40EB Lead 10: LEKFS40EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEKFS40EA 30 Lead 30: LEKFS40EH

LEF-OM006xx

16 LEFS 25 LEFS 32 50 8 20 8 6 12 6 W(kg) W(kg) W(kg) W(kg) 40 5 5 W(kg) 10 W(kg) 15 30 8 16 10 16 10 10 20 6 12 5 12 10 4 2 0 0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0

SYJ3000/5000/7000

in the case of W type.

5

96 83 106 0.5 71 61 76 W W 0.7 59 50 62 0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: F Head flange: G L, F 0.3 301 267 330 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: F Head flange: G L, F 0.3 433 386 476 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 D-X 215 CS2Y Series

CA2

MBB50-PS-W MBB50-PS Cushion ring nut Chromium molybdenum steel Quench hard chrome plated @0 MBB63-PS-W MBB63-PS Hexagon socket head cap screw Chromium molybdenum steel Black zinc chromated @1 MBB80-PS-W MBB80-PS Rubber cap Chloroprene rubber @2 MBB100-PS-W MBB100-PS Cap A Black coated Aluminum casted 23A 23B The seal kits consist of items #0, #1, #2, #4 and #6.

Proposals for Energy Saving

8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !

New

M Conduit terminal 24 VDC With surge voltage suppressor 1/8 3.2 N 100 VAC 1/4 Stainless 5/32 4 steel P 110 VAC 7/32 5.6 Q 200 VAC W 1/8 3.2 X Y 5/32 4 3/8 R 230 VAC 7/32 5.6 S Conduit 24 VDC With surge voltage suppressor C E F 1/8 1/8 3.2 VX2 T 100 VAC 1/8 3.2 U 110 VAC 1/4 5/32 4 V 200 VAC G C37 7/32 5.6 W 230 VAC J 1/8 3.2 K L 3/8 5/32 4 Faston terminal Single 7/32 5.6 3 Size 3 Unit Q

42

Figure shows VV5Q41-08C12SQ-W.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

Series SV

100 70% 50% 30% 10% 0 400 MB 40 300 Stroke mm AS2201F -02-08 AS2200-02 200 100 0 ANA1 -C10 T0806 400 MB 50 300 Stroke mm AS3201F -02-08 AS3000-02 200 100 0 400 MB 63 300 Stroke mm AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions,