4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

10 10 10 5-M5 0.8 (Piping port) 5-M5 0.8 (Piping port) 14 14 14 14 15 15 [ ] for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 26 Valve Drawings Series SYJ3000 2 Position Double (mm) 10 9 G H Grommet (G), (H) : SYJ3240-M5 5 10 Manual override 37 23.2 (Mounting holes) 22 2.5 B A 11 17.5 A B 14 77.2(GZ:79.2) [79.2] G : About

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable

HRX-OM-W038

Allowable voltage range 10% Electric system Breaker14 A 20 Applicable earth leakage breaker capacity A 20 Maximum operating current A 14 ( For option -T:17) Rated operating current3 (50/60Hz) A 7.9/9.6 6.9/8.4 Rated power consumption3 (50/60Hz) kVA 1.6/1.9 1.5/1.7 Noise level9 (50/60Hz) dB 64 / 66 Dimensions10 mm W377xD592xH676 (W14.8XD23.3xH26.6[Inch]) Accessory Fitting (for drain port)

Solid State Auto Switches

40 40 45 50 45 63 45 80 45 100 Mountable models 50 Note) The operating range above indicates average values at room temperature including hysteresis (assuming approximately 30% dispersion).

HRX-OM-Y098

Table 7.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22

HRX-OM-O021

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

HRX-OM-R005

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage Configuration Note 2) VQ1000 VQ2000 1 2 3 4 5 6 VQ0 100V AC (50/60Hz) 2 position single 1 2 3 4 5 200V AC (50/60Hz) 2 position double (latching) 110V AC (50/60Hz) Electrical entry (2) (1) 3 position closed center 220V AC (50/60Hz) 24V DC 12V DC Grommet (Except for double (latching) and AC.)

MK

MK-50-PS 63 MK-63-PS Bore size (mm) Part no.

Compact Manifold Regulator

Dimensions 28 58 (Max. 60) 37 IN OUT 20 15 5 22 34 14 31 SMC IN OUT 62 4 x 1.5 W O-ring size Holding screw M3 x 0.5 x 20 SMC P K U C S O H L 9 746 ARM10/11 Series Blocks/Specific Product Precautions 1 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 387 to 391 for Precautions on every series.

Possible to transfer a workpiece at low-speed.

SU) S SF A AA YB effective depth YC 2 YA View (mm) AA A AU AV AW AX AY BA BB BC BD BE CA CB D DD DE DF DG FA FB FC FD H J JA JB Size 10 20 30 50 55.4 50 6.6 20 15.5 12 4 9.5 34.5 27.8 60 27 4.5 28.5 45h9 46h9 20H9 6 15H9 8 4 3 4.5 13 6.8 11 6.5 70.8 65 7.6 27.5 16 14 5 12 46 30 76 34 6 30.5 60h9 61h9 28H9 9 17H9 10 6 2.5 6.5 17 8.6 14 8.5 75.4 70 7.6 29 18.5 14 5 12 50 32 84 37 6.5 33.5 65h9

Series IDG

) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.

HRL

50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump Circulating fluid head pressure head pressure Circulating

RZQ

40 72 18 40 50 90 22 50 ML2B 63 108 28 60 FV M C J G5-S CV M L B + Full stroke FT FZ AH + Full stroke MVGQ CC RB Double clevis style: RZQD Double Style (mm) J CT Cap bolt Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW D32 112.5 82.5 10 102.5 5 14 20 -X 40 124 92 10 114 6 14 22 50 134.5 96.5 14 124.5 7 20 28 2063 30 146 102 14 132 8 20 CU Data Bore size (mm) L B + Full stroke RR CW CX+0.2

VQ5000

VQ52 1 16 25 or less 0.60 (0.68) 0.33 28 or less 4.4 28 or less 17 0.31 4.7 Rubber seal VQ53 0 11 50 or less 0.65 (0.73) 0.24 53 or less 2.6 53 or less 11 0.23 2.8 Metal seal Closed center VQ53 1 12 60 or less 0.58 (0.66) 0.33 63 or less 3.4 63 or less 13 0.37 3.7 Rubber seal Rc 1/2 VQ5000 VQ54 0 12 50 or less 0.65 (0.73) 0.13 53 or less 2.9 53 or less 14 0.18 3.4 Metal seal Exhaust center

3 Position Cylinder Series RZQ

9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 14 32 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 40 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 50 45 M16 x 2.0 84 130 102 21 77 39.5 16.5 15 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 36.5 21.5 18 4.5 10.5 6.5 19 63 9 3 Position Cylinder Series RZQ Foot type

•

71 43 19 14 190 230 15 M14x1.5,15 13 0125 Up to 1000 50 47 143 145 17 15 27 171 27 . t3 128 20 212 112 255 '15 'UpJo.1 QOO 50 47 157 1060 32 19 15 43 M14n.. ?

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

to 750 50 55 70 80 100 120 C95 FT FX ZZ + Stroke FZ CA1 CS1 Single clevis/(C) Port Cushion valve Single clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX 0.1 ZZ Z U RR L CD 0.3 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22 22 23 23 30

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5 x 0.8 29 42 52 69 M5 x 0.8