TA

Note2) The value at temperature of 20C and O.D. variable rate 10% max.

Wedge Cam Operation Provides

53 External hold: 79 Internal hold: 90 MHKL2-16D 16 14 14.6 28.6 164 Double acting MRHQ MHKL2-20D 20 18 16 34 312 Auto switch MHKL2-25D 25 22 19 41 562 MHKL2-12S 90 105 20 9 11 12 9 Normally open Normally closed MHKL2-16S 165 28.6 14.6 14 16 17 MHKL2-20S 314 34 16 18 20 32 MHKL2-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C

Microspeed Cylinder

16" 3/8" 3/16", 1/4" l/min (ANR) (CFM) 7 (0.25) 12 (0.42) 38 (1.33) Flow rate Controlled flow 0.1 (0.006) 0.6 (0.03) 0.2 (0.01) Effective area mm (cv) Free flow l/min (ANR) (CFM) Flow rate 175 (6.1) 350 (12.3) 75 (2.6) 295 (10.3) 5.3 (5.3) 2.7 (0.15) 1.1 (0.06) Effective area mm (cv) 4.5 (0.25) Note 1) Flow rates are the values measured with pressure at 0.5MPa (72psi) and temperature at 20C

Wedge Cam Operation Gripper Series MHK2

46) I.D.holding :12.6 (56) MHK2-20D 20 10 16 26 8.3 O.D. holding:18.0 (80) I.D. holding :19.3 (86) MHK2-25D 25 14 19 33 15.5 MHK2-12S 120 12 2.0 (9) 4 9 13 2.7 Normally open Normally closed MHK2-16S 16 5.2 (23) 6 14.6 20.6 4.0 MHK2-20S 20 7.6 (34) 10 16 26 8.4 L1 MHK2-25S 25 13.0 (58) 14 19 33 15.6 Single acting L2 MHK2-12C 12 2.7 (12) 4 9 13 2.7 MHK2-16C 16 5.6 (25) 6 14.6 20.6 4.1 MHK2-20C

Series AS-FM/AS-M/ASD-FM

3/16" 1/4" 3/16", 1/4" 5/16" Tube O.D. 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 12 7 38 Flow rate l/min (ANR) Controlled flow 0.2 0.1 0.6 Effective area mm Flow direction symbols on body 230 180 100 460 260 390 Flow rate l/min (ANR) Meter-out type Meter-in type Free flow 3.5 2.7 1.5 7 4 6 Effective area mm Note) The flow rate value is at a pressure of 0.5MPa and temperature of 20C

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Inch sizes 1/4", 5/16" 3/16" 5/32" 3/16", 1/4" 1/8", 5/32", 3/16", 1/4" l/min (ANR) {Nl/min} Flow rate 12 38 7 Controlled flow Effective area mm 0.2 0.6 0.1 l/min (ANR) {Nl/min} Flow rate 460 100 290 130 230 Free flow Effective area mm 7 1.5 4.5 2 3.5 Note) Flow rates are values measured with pressure at 0.5MPa and temperature at 20C.

Refrigerated Air dryer Series IDU/IDF

Note) l/min (ANR) is for reference conditions of 20C, 1 ATM and 65% relative humidity. Features 3 Model Selection Data A Correction factor for temperature/Series IDU Inlet air temp.

High Vacuum Angle Valve, XL Series

Flow classification 11 The relation of the average free path of gas molecules and the pipe diameter D expressed as /D is the Knudsen number, and the relation of the pressure p(Torr) converted to air at 20C is expressed as pD.

Title not found

Color Metric sizes (mm) Inch sizes (inch) 1 8 " 3 16 " 1 4 " 3 8 " 1 2 ( ) 5 32 4 ( ) 5 16 8 6 10 12 16 " (3.2) One-touch In/Out connection With quick disconnect and air lock Black General tubing 1.5MPa max. at 20C Nylon Tubing Series T White Red Blue Yellow Green Black White Slightly flexible 1.0MPa max. at 20C Red Blue Yellow Green Soft Nylon Tubing Series TS Black White Flexible 0.8MPa

SZ3000

Response Time Note) Based on JISB8375-1981 dynamic performance test (with coil temperature of 20C and at rated voltage).

Series VQ Base Mounted Metal Seal/Rubber Seal

Characteristic Cable length (L) Multicore vinyl cable 0.3mm2 X 25C Conductor resistance /km, 20C Voltage limit V, 1min, AC 65 or less 1.5m 3m 5m AXT100-DS25-015 Cable 25 core X 24AWG AXT100-DS25-030 10 1000 AXT100-DS25-050 Insulation resistance M/km, 20C 5 or more For other commercial connectors, use a 25-pin female connector made in conformity with MIL-C-24308.

XL

Flow classification 11 The relation of the average free path of gas molecules and the pipe diameter D expressed as /D is the Knudsen number, and the relation of the pressure p(Torr) converted to air at 20C is expressed as pD.

Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: Symmetric, Stroke: 20mm, Adjuster: Metal Stopper Both Ends, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 6mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: C (Both Side Adjusters/Metal Stoppers), Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M

Bore Size: 12mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: C (Both Side Adjusters/Metal Stoppers), Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M

Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: L (Symmetric), Stroke: 20mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Bore Size: 6mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Both Side Adjusters/Metal Stoppers, Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 12mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Both Side Adjusters/Metal Stoppers, Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 8mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Both Side Adjusters/Metal Stoppers, Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 16mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Both Side Adjusters/Metal Stoppers, Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -