Air Preparation Equipment 2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.
8 e i o!0 !1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.
Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!
Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!
R 2 mgh F1S m Nm C m/s kg S T t m MK(2) E1 + E2 mgS F1S mgS mgS F1S + mgS RS Q G 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E Corresponding weight of impact object 2 2 E 2 2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.
Metal bowl with level gauge w q With bowl guard e q w Drain guide 1/4 N R q w Non-relieving type Flow direction: Right to left Note 1) The circled numbers indicate the order in which the units are assembled.
No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12
VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C
Description Meterial Note q Body Alminum die cast Metal seal Spool/Sleeve Stainless steel w Rubber seal Spool valve Aluminum/NBR r e Piston Resin Pilot valve 1.12-36 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ1000 2 position single Grommet(G): VQZ115 (R)lGl01 0 1 300 68.5 2-3.4Mounting holes (Lead wire length) 47.5 18 7.2 7.2 R3 3 2 4 SY 10 22 SMC B A 5 1 3 SYJ Cover diameter 1.6 Cross
How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !
YY YL Z st25 25
(Refer to pages 2-5-40 to 2-5-43.) 26.4 48.7 3(R2) 5(R1) Rc 3/8 SUP port 54.5 P1 Po 1(P) 25 13.5 Po Circuit diagram Plug-in type Plug lead type SUP/EXH block plate VVQ4000-16A 11.8 When different pressures, high and low, are supplied to manifold, a SUP block plate is inserted between the stations under different pressures. 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
B C Nil None With SUP blocking plate With EXH blocking plate With SUP and EXH blocking plates Port plug A Port plug B 1 2 3 Note) P R PR A B Cylinder port size 4 Note) 5 Note) E Note) The 3 position type uses two stations.
BC PH MM H1 PD E 0 0.05 E 0 0.05 I BZ TH Width across flats B1 Width across flats KA Width across flats NA 8-J TT TY TW C0. 1 TX TE +0.10 0 4-TF TV TZ BC Z ZZ + Stroke f 8 l e h + l ZZ + l + Stroke Z + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BN BP BZ C D E F GA GB GC GK GL
BC PH MM H1 PD E 0 0.05 E 0 0.05 I BZ TH Width across flats B1 Width across flats KA Width across flats NA 8-J TT TY TW C0. 1 TX TE +0.10 0 4-TF TV TZ BC Z ZZ + Stroke f 8 l e h + l ZZ + l + Stroke Z + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BN BP BZ C D E F GA GB GC GK GL
X165US inch rod option dimensional changes R V Integral clevis type (E)/CG5ENS Dim.
VQ7-6-FG-DVQ7-6-FG-D-R FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.
F Femala Connecior R Plug-in Reducer ... L M a l e E l b o w . . . . . . L__ Plug-in Elbow .. ... L Union Elbow . . . . . . LF Female Elbow . K 45" Male Elbow . . . KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .
Heat exchanger Ventilation Circulating fluid Expansion E circuit valve A Expansion Inverter pump valve B E Temp. sensor (Ref. discharge Ball tap Fluid level gauge TS Press. sensor Over flow port (Ref. low press.)