CS1

18.5 125 227 204 162 115 M18 X 1.5 231 132 60 48 17 41 24 45 63 45 70 20 10 39 M45 X 1.5 3/4 1 Lube Non-lube to 1800 1801 to 2000 18.5 132 245 226 182 115 M20 X 1.5 231 150 63 60 50 74 48 17 20 46 24 10 39 45 M56 X 2 to 2000 2001 to 2400 160 277 225 140 23 M24 X 1.5 301 180 298.5 20 29 71 67 60 86 60 25 56 12 49 55 M64 X 2 1 to 2000 2001 to 2400 200 365 330 270 140 M30 X 1.5 326 212 23 20

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

) Single Solenoid Type (SQ1000/2000) 3 Position Type (SQ1000/2000) Positive common specifications 4 Position Dual 3 Port Type (SQ1000/2000) () Positive common specifications SOL.

Compressed Air Preparation Filter

1500 1000 500 2000 2500 1500 1000 500 3000 3500 Air flow rate [L/min (ANR)] Air flow rate [L/min (ANR)] Specific Product Precautions 20 AMK Series Construction Size 20 to 40 q w OUT IN t Component Parts e No.

Hydraulic

orientation Symbol Mounting orientation F F F F F F F F F F F F Bore size 100 Bore size 125 3000 6 1 5 2 4 3 7 1 5 2 4 3 7 8 9 6 9 2000 6 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 50 1 5 10 20 30 50 Load (kN) Load (kN) Bore size 160 3000 5 2 4 8 3 7 9 1 2000 6 1000 Stroke (mm) 500 100 50 5 10 20 50 100 200 Load (kN) 125 Hydraulic Cylinders: Technical Data 2 Series CH2E, CH2F, CH2G, CH2H

100

ZL112A-Dmmm With vacuum pressure switch Digital vacuum pressure switch (With analog output) P P V Digital vacuum pressure switch (Without analog output) S P Circuit diagram 58.8 57.3 Specific Product Precautions 39 39 (2000) * Tighten to the recommended torque to mount the body.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Example) Lead wire length 2000 mm For AC 10-SYJ3120-1LO-M3 SY100-30-1A-20 Covering retainer Core wire crimping area Core wire Lead wire Socket 0.2 to 0.33 mm2 Max. O.D. of covering: 1.7 mm Hook Covering 3.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed in both energized and de-energized states in the axial direction and at right angles to the main valve and armature.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(Default settings) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed in both energized and de-energized states in the axial direction and at right angles to the main valve and armature.

Ozone Resistant

630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000 1000 2000 3000 1000 2000 1000 3000 5000 7000 3000 5000 7000 3000 5000 7000 20, 30 100 100 200 300 100 300 500 300 500 700 1000 2000 2500 3000 4000 4000-06 5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060 6060

VQZ100V-OMT0001

/VQZ 95 95 95 95 ,N.O. ,N.O. ,N.O. ,N.O. 3 5 3 4(A)5 4(A)2B 1 1 1 1 1 1 1 1 2 2 2 2 0 0 0 0 2 2 2 2 0 0 0 0 3 3 3 3 1 1 1 1 3 3 3 3 1 1 1 1 5 2 3 () () () (3 ) 5 3 NL R LED R 2(B),CM 10 No.VQZ100V-OMT0001 VQZ Series/ / / / DIN DIN DIN DIN DIN DIN 0.30.4Nm VQZ100 VQZ100 VQZ100 VQZ100 300 300 300 300 VQZ200 VQZ200 VQZ200 VQZ200 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000

Angle Seat Valve /

For Air 1.6 1.4 Upstream pressure of valve P1 Downstream pressure P2 [MPa] 1.5 MPa 1.6 MPa 1.2 1.3 MPa 1.4 MPa Subsonic 1.0 Critical pressure 1.2 MPa 1.1 MPa 0.8 1.0 MPa 0.9 MPa 0.8 MPa Sonic 0.6 0.7 MPa 0.6 MPa 0.5 MPa 0.4 0.4 MPa 0.3 MPa 0.2 0.2 MPa 0.1 MPa 0 VXB215A D(H) 10 12000 14000 8000 2000 4000 6000 VXB215B E(H) 16000 14000 10 12000 8000 2000 4000 6000 VXB215C F(H) 10 2000 6000 8000

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Data 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 0.2 Minimum operating pressure (MPa) 40 1500 2000 0.16 0.16 0.14 0.15 0.12 0.15 Note 1) Please contact SMC if the maximum stroke will be exceeded.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

However, when exceeding a 2000 mm stroke, specify -XB11 at the end of the model number. Refer to the made to order specifications on page 8-14-24.

Made to Order

16, 20, 50, 63, 80, 100 16, 20, 25, 32, 40, 50, 63 16, 20, 25, 32, 40, 50, 63 16, 20 16, 25, 40 16, 25, 40 MY1B 100 to 2000 16, 20, 25, 32 25 to 200 CXWL 2001 to 5000 (3000 for 16 only, 3000 for MY1MW) MY1M (W) 100 to 2000 10 to 75 10 80, 90, 100, 110, 120, 125, 150 110, 120, 125, 150 2001 to 5000 (3000 for 16 only, 3000 for MY1CW) MY1C (W) 100 to 2000 CXSJ 10 to 100 15 MY1H MY2C MY2H/HT

Fieldbus System

Note) Except SI Unit Manifold Solenoid Valves Manifold Solenoid Valves Manifold Solenoid Valves Series SY3000/5000 Series SV1000/2000/3000 Series S0700 Series VQC1000/2000/4000 IP67 IP40 IP67 IP67 Note) The SY3000/5000, S0700, and VQC1000/2000/4000 are not UL-compatible.

Secondary Batteries

03 04 1/8 1/4 3/8 1/2 Type of setting Regulating pressure range 0 Basic type (Handle) For 90-IR1000/2000 series 0 1 2 0.005 to 0.2 MPa 0.01 to 0.4 MPa 0.01 to 0.8 MPa For 90-IR3000 series 0.01 to 0.2 MPa 0.01 to 0.4 MPa 0.01 to 0.8 MPa 0 1 2 *Specifications and dimensions for the 90-series are the same as standard products.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

High Power Cylinder Series RHC

2500 3000 28.5 3/8, 16 3/8, 16 3/8, 16 1/2, 16 100 =0.7 38 47 0.5 56.5 0.1 0.3 50 10, 12, 16 1/4, 3/8 500 15 63 1000 1500 2000 2500 3000 30 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 0 45 1,000 2,000 3,000 60 Maximum speed Vmax [mm/s] 75 80 89.5 16 3/8, 1/2 500 24.5 =0.7 1000 1500 2000 2500 3000 500 1000 1500 2000 2500 3000 48.5 3/8, 16 1/2, 16 3/4 3/4 3/4 3/8 1/2, 16 3/4 3/4 3/4 3/4 150 80

7

VX2 Table (1) Indication of Flow Rate Characteristics VXK Indication by international standard Corresponding equipment Other indications Conformed standard VXD VXD ISO 6358: 1989 JIS B 8390: 2000 C, b VXZ Pneumatic equipment JIS B 8390: 2000 Equipment: JIS B 8379, 8381-1, 8381-2 VXS S Cv VXB ANSI/(NFPA)T3.21.3 R1-2008 IEC60534-1: 2005 IEC60534-2-3: 1997 JIS B 2005-1: 2012 JIS B 2005-2-3