SFOD-OMT0005CN

0 () 1 2 () 3 () 4 5 6 1 7 8 9 ON 10 11 12 13 1 14 2 15 Word2/ Word Bit 0 OFF ON*1 1-7 () 2 8-9 1:ABS() 2:INC() *2 10-15 () Word3 Word Bit 3 0-15 1 1 mm/s Word4,5 Word Bit 4 0-15 () (-)(+)*3 0.01 mm 5 0-15 () Word6 Word Bit 6 0-15 1 *1 1 mm/s 2 *1 ON ONOFF PLC *2 1(ABS)2(INC) *3 20(P.83) -39- Word7 Word Bit 7 0-15 1 *1 1 mm/s 2 Word8 Word Bit 8 0-15 *1 1% Word9

MLU

depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 54 68 86 104 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 KA H2 K MM MM1 NA NB NC ND NE NG

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

11 SOL.b Station 20 Station 20 24 11 24 24 SOL.a 3 SOL.b Station 5 3 SOL.b Station 5 SOL.a Station 4 15 SOL.a Station 4 15 Station 2 SOL.b 15 2 SOL.a Station 3 2 SOL.a Station 3 SOL.a 2 SOL.a Station 2 14 SOL.a Station 2 14 Station 1 SOL.b 14 1 SOL.a Station 1 1 SOL.a Station 1 SOL.a 1 The common polarity should be the same as the common specifications of the valve to be used.

Refrigerated Air Dryers

1E 0.75 kW 2E 1.5 kW 3E 2.2 kW 4E 3.7 kW 6E 5.5 kW 8E 7.5 kW 11E 11 kW 15E1 15 kW *1 Note that the above values are for reference only.

IDX-OM-W017

. 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 T 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-3 13 V 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 14-1 . 14-1 IDFA Series 2 IDX-OM-W017 i i i 1 () OFF 3 ON OFF i-1 IDFA Series i 1 IDX-OM-W017 i i-1-1 3 IDFA Series i-1-1 i 2 IDX-OM-W017 i i 2 5 i-2-1 IDFA Series IDX-OM-W017 i i-2 i-2-2 3 i-2-3

AS-FG/ASD-FG

Type Applicable tube outside diameter Metric size Inch size 2 3 Elbow Universal 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 3.2 4 6 8 10 12 23 04 06 08 10 12 Control method 0 1 Meter-out Meter-in With One-touch fittings Use a 1/8" tube.

VFS

Flow Characteristics at the Number of Manifold Stations (Operated individually) Model Passage/Stations Station 1 Station 5 Station 10 b C [dm3/(sbar)] 10.5 0.20 2.5 11 0.20 2.9 10.5 0.20 2.5 11 0.20 2.9 10.5 0.20 2.5 11 0.20 2.9 1 4/2 (P A/B) Non plug-in type: 6 stations (Manifold base) VV5FS4-10-061-04 1 (2 position single) VFS4110-5D 5 (3 position exhaust center) VFS4410-5D 1 (Individual

CG5-S

to 800 1/8 30 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 93 147 50 32 to 1200 1/4 35 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 109 172.5 63 32 to 1200 1/4 35 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 69 109 174 80 37 to 1400 3/8 40 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 130 208 100 37 to 1500 1/2

High Vacuum Angle Valve

40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Pin Clamp Cylinder Series CKQ/CLKQ

1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

13 13 8 10 10 53 8 9 40 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 25 to 500 21 (mm) Bore size (mm) K NN P S T V W ZZ MM NB IA NA -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 M8 x 1.25 15 23f8 17 25 5.5 M24 x 1.5 1/8 81 11 3.5 5.5 143 M10 x 1.25 15 25f8 17 32 7.5 M30 x 1.5 1/8 87 13 3 4 159 M14 x 1.5 15 31f8 18 40 7.5

ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

High Power Cylinder Series RHC

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm

IDX-OM-W011

1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15 15-1 . 15-1 3 IDX-OM-W011 i i i-1 () 3 i 1 1 3 IDF

Compact Manifold Regulator

t y u A B N 1.

Rotary Actuator

Applicable shaft type: K X = X = X = Y = W2 = L2 = L4 = Y = [mm] [mm] [mm] Size Y W2 L2max L4max 30 8.5 to 25 1 to 2 Y-2 L2-2 50 10 to 36 1 to 5.5 Y L2-2 63 11 to 41 1 to 6.5 Y L2-2 80 13.5 to 50 1 to 8 Y L2-3 100 17 to 60 1.5 to 10.5 Y L2-4 Size X 30 3 to 25 50 3.5 to 36 63 3.5 to 41 80 4 to 50 100 5 to 60 Size Y 30 3 to 25 50 1 to 36 63 1 to 41 80 1 to 50 100 1 to 60 Symbol: A53 Note) Except

CXWM/CXWL

depth 7 2-Rc 1/8 Plug (R 1/8) (Cylinder port) 2-Rc 1/8 Cylinder port 2-Rc 1/8 Plug (R 1/8) (Cylinder port) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8H7 +0.015 0 RB1411-X552 shock absorber 2 x 2-6.9 through 2 x 2-11 counterbore depth 6.5 End lock mechanism

RSQ

1 w o @0 !7 i !9 !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.