SFOD-OMT0005CN

(IN0ON) (2)DRIVEON No. (2)(5)(10)(13) DRIVE (3)INPOFF (1) IN0 (4)BUSYON (9) PLC IN1 1 (5)DRIVEOFF (7) OUT0 (6)No.1 ON (OUT0ON) No.1 (15) OUT1 (14)(11)(6)(3) INP (16)(12)(8)(4) BUSY *1 (7)INPON (8)BUSYOFF No.1 () No.1 (9)No.2(IN0OFF IN1ON) (10)DRIVEON No.2 (11)INPOFF 100mm 0mm (12)BUSYON 1 (13)DRIVEOFF No.2 () (14)No.2 ON (OUT1ON) (15) INPON (16)BUSYOFF No.2 50mm *1 SVRE

A

-04 1/2 60 36 98 30 24 ANA1-06 3/4 90 110 111 46 36 ANA1-10 1 160 180 132 50 41 ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871 271 86

IDX-OM-W017

. 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 T 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-3 13 V 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 14-1 . 14-1 IDFA Series 2 IDX-OM-W017 i i i 1 () OFF 3 ON OFF i-1 IDFA Series i 1 IDX-OM-W017 i i-1-1 3 IDFA Series i-1-1 i 2 IDX-OM-W017 i i 2 5 i-2-1 IDFA Series IDX-OM-W017 i i-2 i-2-2 3 i-2-3

Refrigerated Air Dryers

Port size Page 50 Hz 60 Hz IDF1E 0.1 0.12 0.75 IDF2E 0.2 0.235 1.5 Rc3/8 IDF3E 0.32 0.37 2.2 IDF4E 0.52 0.57 3.7 Rc1/2 R134a (HFC) p. 7 to 10 IDF6E 0.75 0.82 5.5 35C 0.7 MPa Rc3/4 IDF8E 1.22 1.32 7.5 IDF11E 1.65 1.82 11 IDF15E1 2.8 3.1 15 Rc1 IDF22E 3.9 4.3 22 R1 p. 11 to 13 IDF37E 5.7 6.1 37 R1 1/2 IDF55E 8.4 9.8 55 R2 IDF75E 11.0 12.4 75 IDF100F 16.0 18.8 100 40C 0.7 MPa R407C (HFC) IDF125F

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

C76

bronze 2 2 2 2 2 2 2 2 1 2 !

C76

bronze 2 2 2 2 2 2 2 2 1 2 !

Modular F.R.L. Unit

3/4 3/4, 1 1 1 41.5 43 30 24 33 12 5.5 50 29.5 5.5 3.2 65 2 Note 1) 141 123 36 60 126 55 57 41 35 14 7 71 28.5 7 4 64 0 194 153 38 80 167 55 57 41 35 14 7 7 4 71 66 30.5 3.5 194 153 38 80 167 72.5 75 50 40 18 9 9 4 88 74 35 3.5 226 187 40 110 220 77.5 80 50 40 18 9 88 35 9 4.6 74 3 226 187 38 110 235 93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 110 282 98 96 70 50 20 11 11 6.4

VFS

[dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Weight (kg) Plug-in Non plug-in VF 2.6 2.8 2.6 2.8 2.5 2.7 2.6 2.9 2.7 2.9 2.8 3.1 2.8 3.1 2.3 2.6 2.3 2.4 2.7 2.8 3 8 0.20 0.22 0.20 0.22 0.14 0.22 0.15 0.15 0.22 0.22 VFS4110 11 12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000

High Power Cylinder Series RHC

In-line type 0.1 0.3 1-A 2-B 1-C 2-A 2-B 1-A 2-B 2-A 2-B 2-B 2-B 2-B 2-B 1-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B AS421F (24) AS431F (24) AS4001F (16) AS4200 (26) AS420 (102) AS421F (26) AS431F (24) AS4200 (26) AS420 (102) AS420 (102) AS420 (102) AS420 (102) AS420 (102) AS421F (24) AS431F (24) AS4001F (16) AS4200 (26) AS420 (102) AS420 (102

VHK

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 Q L2 M1 2(A)3(R) 1(P)2(A) VM/VR 11 2.0 3.4 1.2 19 49 11 21 51 13 4 29.1 31.6 55.4 52.9 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-04F-01S VHKl-06F-M5 VHKl-04F-M5 18 41 23.8 16.5 3.5 15.8 1 8 VH 21 50 11 23 53 13 M5 2.0 53.9 29.6 56.9 24.3 32.6 16.5 3.5 16.8 11 7.2 1 8 1 4 3 8 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-01S VHKl-06F-02S VHKl-06F-03S 1.2

CXWM/CXWL

Note 2) 2 magnets for auto switches are installed in the housing. 8-26-28 27 Series CXWM Slide Unit: Build-in Shock Absorber Slide Bearing Type 32 Basic Type: CXWM32Stroke/70 to 200 2-M14 x 1.5 Adjusting bolt 2 x 2-6.9 through 2 x 2-11 counterbore depth 6.5 2 positions for set screws 2 x 4-M6 x 1.0 through thread From the opposite side (8H7 hole pitch) for fixing adjusting bolts (M6) 2 x

RSQ

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 43.5 61 17.5 25 RHC RSQB 16 20 Bore size: 16, 20 4-O counterbore 2-N through E MK(2) Stroke Q 2-P F Y RS Q G RS H A T D RZQ W U MI W S 20 (22) V M 10 (11) H + Stroke A + 2 stroke B + Stroke CEP1 CE1 RSQB Bore size: 32, 40, 50 32 40 50 2 Stroke F Q 2-P CE2 Z J

High Vacuum Angle Valve

40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.

IDX-OM-W011

. 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15 15-1 . 15-1 3 IDX-OM-W011 i i i-1 () 3 i 1 1 3 IDF Series i-1

RQ

Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) YB-05 50, 63 11 60 120 22 6.5 12 YU-03 32, 40 15.8 14 M8 x 1.25 8 25 7 17 6 11 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YB-08 80 14 75 230 28 8.5 16 YU-08 80 M16 x 2 24.8 23 13 90 9 22 8 20 YB-10 100 18 90 455 36 10.5 18 YU-10 100 M20 x 2.5 29.8 28 14 160 11 26 10 26 7-7-15 15 Series RQ Proper Auto Switch Mounting Position (Detection

Compact Manifold Regulator

IN Piping Position 2.

Air Cylinder Series MB

D-J5 D-F5 W D-J59W D-F5BAL D-F59F 110 115 120 95 90 (n4) 2 110 + 55 (n4) 2 (n4) 2 115 + 55 (n4) 2 120 + 55 (n4) 2 (n4) 2 130 + 55 90 + 55 95 + 55 n = 4,8,12,16... n (same side) n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... 1 90 110 115 120 95 130 140 120 125 130 2 (different side or same side) 105 100 (n4) 2 120 + 55 (n4) 2 (n4) 2 125 + 55 (n4) 2 130

ARM10/11

Handle position 2.