Intrinsically Safe Valve

2position 1 (P) port 1/4 N.C.

Basic Type/Direct Mount Type

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

SMC

/m3) Standard product 105 105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller

Rotary Table/

1 @1 !2 q @0 u !

CLA

i.\4 L, Material: Free cutting sulfer sleel Malenal: Cast lion -NX A 1 ~ 1-05 50-63 74 27 28 60 M18X 1.5 15.5 2Q 121'0711 1 ~ Y-04d 40 22 24 55 M1 4X 1.S 13 25 12171) 1 6'j-~ 38 p .OS 80 91 37 36 71 M22Xl.5 225 26 18,&070 281l V. SO-63 27 28 60 M' 8Xl .5 15 27 12'870 1 6 ~f 38 ~10 100 105 37 40 83 M26Xl .S 24.5 28 20-8-08< 3():gJ Y-08d 80 37 36 71 M22Xl .S 19 28 181. 010 28!

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc 1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9 4.5 M12 x 1.75 10.5 18 10.5 18 M14 x 1.5 19 8.5 19.5 6 Rc 1/8 46 152 14.5 15 75 66 26.5 5H9 5.5 M8 x 1.25

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

23.1 16 27.1 12.7 20.4 14.3 31.1 36.1 27.5 3.2 9.3 1/4" 12 12 32.1 13.5 R 1/8 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

36 21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41

RSQ

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

MHF2

1 Note) There is no protrusion for sections of the table with no values entered. 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 4.5 4.5 4.5 4.5 1 1 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 Hysteresis MHF2-8D D-M9(V) D-M9W(V) MHK MHF2-8D1 Red ON Green ON MHF2-8D MHS 0.5 0.5 1 MHF2-8D2 MHF2-12D 0.5 0.5 1 MHC MHF2-16D 0.5 0.5 1 MHF2-12D MHF2-20D 0.5 0.5 1 MHT MHF2-12D1 MHY Mounting of Auto Switch MHF2-12D2 MHW Insert

MHF2

1 Note) There is no protrusion for sections of the table with no values entered. 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 4.5 4.5 4.5 4.5 1 1 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 Hysteresis MHF2-8D D-M9(V) D-M9W(V) MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHF2-8D1

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

(With stroke adjuster at extension end) 3.5 (With stroke adjuster at retraction end) 26 58 35 62 48 5H9 ( ) depth 4 +0.030 0 F 20 18 N 1 x F 2 2 x M6 x 1 thread depth 10 41 +0.030 0 5H9 ( ) depth 4 30 M 0.5 37.5 40 Z ZZ (NN 1) x H G 10.5 24 10.5 24 H B A 10.5 10.5 5.1 9.5 26 1 5H9 ( ) depth 4 +0.030 0 6 NN x M6 x 1 thread depth 12 B A 5H9 ( ) depth 4 +0.030 0 Section AA Section BB GA HA

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

17 19 19 21 19 21 19 21 21 22 21 22 21 22 19 21 19 21 21 23 21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5

OMU0023

1 0 0 of 2nd byte: 17 4th shift 0 0 1 0 0 0 0 0 0 0 0 0 0 1 1 1 0 "08h" 18 5th shift, ExOR A001h 1 0 1 1 0 0 0 0 0 0 0 0 0 0 1 0 1 19 6th shift 0 1 0 1 1 0 0 0 0 0 0 0 0 0 0 1 0 20 7th shift, ExOR A001h 1 0 0 0 1 1 0 0 0 0 0 0 0 0 0 1 1 21 8th shift,ExOR A001h 1 1 1 0 0 1 1 0 0 0 0 0 0 0 0 1 1 22 Load 3rd byte "00h" 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 23 ExOR step 21with step 22 1 1 1 0 0 1

HRX-OM-W060

temperature C 2 to 45 Circulating fluid CH1 : Clear water / CH2 : Clear water,DI water (pure water) 1 Set temperature range C CH1 : 15 to 25 / CH2 : 20 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa

15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

HRX-OM-W032

HRX-OM-W032 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

Cylinder with Lock

Roller spring Spring steel 1 Zinc chromated 12 Bushing Bearing alloy 1 13 Hexagon socket head cap screw Alloy steel 4 14 Hexagon socket head cap screw Alloy steel 2 15 Wear ring A Resin 2 16 Piston seal A NBR 1 17 Rod seal A NBR 1 18 Gasket NBR 1 19 Element Bronze 1 20 Release bolt Alloy steel 1 21 Seal washer NBR + Stainless steel 1 22 Hexagon socket head cap screw Alloy steel 4 23 Rod cover

CRBB-OM00004

head screw 2 23 Cross recessed round head screw 2 22 Cross recessed round head screw 2 21 Holding block (B) 2 28 20 Holding block (A) 2 19 Magnet 1 27 20 18 Magnet lever 1 Including No.19 17 Switch block (B) 1 16 Switch block (A) 1 15 Cover (B) 1 Gap 14 Cover (A) 1 13 Hexagon nut 1 12 Joint 1 11 Hexagon socket head cap screw 2 10 Hexagon socket head cap screw 2 9 Hexagon socket head cap

Possible to transfer a workpiece at low-speed.

Applicable shaft type: X MSU CRJ Short shaft side X = Y = X = Y = Short shaft side Short shaft side CRA1 CRQ2 Long shaft side MSQ Long shaft side Long shaft side Y = Size 20, 30, 40 Size 10, 15 MSZ (mm) CRQ2X MSQX CRQ2X MSQX Y 1 to 17 1 to 19 1 to 28.5 1 to 30 1 to 34 X 3 to 10 3 to 11 3.5 to 16.5 4 to 20 4 to 22 (mm) Size 10 15 20 30 40 Y 1 to 19.5 1 to 22 1 to 25 Size 20 30 40 MRQ D327