C95

9 i@2 q r y #0$0 $2 w $3 #8 @9 A C CJ1 CJP CJ2 B CM2 Section A !2 !2 !22 $1 e $8 o $7!1@1!6 @5 u!0 $6 #7 #6 $4@8#9 @6 #4 C85 with through piston rod C76 100 80 63 50 40 32 CG1 #1 #2 Section B Section C MB MB1 80, 100 80, 100 CP95 Description Material Note Parts list Description Material Note Parts list No. q w e r t y u i o !

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

Best Pneumatics Vol. 14

Octagon Port size C B T-interface Center of F .R.L. body D A (mm) C 12 D 14 E 8 B 19 A 11 Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable model AC10, AC10B AC20, AC20B AC20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 AC40

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34 154 63 126 92 20.5 19 2 x 3/4 1/4 113 48 43 173 24 66.5 115 56 38 185 70.5 141 109 31.3 19 2 x 1 1/4 113 48 43 149 24 66.5 115 56 38 161 70.5 141 109 31.3 19 2 x 1 1/4 P Q R S T U Model SGH12-7010 SGH22-7015 SGH321-7020 SGH322-7020 SGH421-7025 SGH422-7025 For M5 M5 169.5 20.8 128.7 81.1 For M6 M6 186.5 20.8 145.7 98.6 For M8 M8 213.5 20.8 172.7 117.6 For M8 M8 198.5 20.8 157.7 117.6 For

Fieldbus System

N.O. 2 2-position double (Rubber) 4-position dual 3-port valve (C) (A) 4 (B) 2 (A) 4 (B) 2 C: Locking type (Manual) Note) C 5 (R1) 3 (R2) 1 (P) 1 (P) 5 (R1) 3 (R2) N.C. N.O.

VM

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5 1 Hand Valve Series VH Specifications SA Fluid Air VA Proof pressure 1.5 MPa SA Max. operating pressure VH200/300/400 1.0 MPa VH600 0.7 MPa VA Ambient temperature and operating fluid temperature 5 to 60C (No freezing) Operating angle 90 VM Courtesy of Steven

13

color 76 41.5 29.5 12 3.2 12 14.2 L type: Black color 76 41.5 29.5 12 3.2 12 14.2 1 8 82 44.5 30.5 12 4.2 12 17.2 86 44.5 30.5 12 4.2 12 17.2 94.5 54 39 14 4.2 17 19.95 99.5 54 39 14 4.2 17 19.95 116.5 58.5 41 17 4.2 19 ZH15DS-02-03-03 22.45 116.5 58.5 41 17 4.2 19 ZH15DL-02-03-03 22.45 (Mounting hole) Model I J K L M N O P Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc

MXS

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5

Compact Manifold Regulator

6 6 8, 5/16 3 11.5 19.5 20 23 10, 3/8 10, 3/8 1/4 1/4 7 11.5 22 22 26 1/4 1/4 19 20.5 737 ARM11A/B Series End Block Pressure Gauge ARM11E L Part no.

Valve Single Unit

SY Flow Characteristics SYJ 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size SX Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv SS5X3-20 SS5X5-20 SS5X7-20 1 8 1 4 1 4 Rc Rc Rc C6 C8 C10 0.21 0.53 0.88 0.36 0.20 0.27 0.80 2.2 3.6 0.18 0.48 0.93 0.29 0.28 0.31 0.72 1.9 3.6 Note) The value is for manifold base with 5 stations and individually

JXCx-OMT0005CN

0V 27 - 21 DC24V EMG DC24V 0V Ry U Ry LK RLS6 Ry (1 ) (3) EMG (2) M 24V (1) C 24V 0V4 DC24V 0V LK RLS6 Ry (2 ) (3)EMG (2)M 24V (1)C 24V 0V4 DC24V 0V LK RLS(6) Ry 3 (3)EMG (2)M 24V (1)C 24V 0V(4) DC24V 0V OFF 28 - 32 DC24V M24V EMG () 0V DC24V Ry (1 ) (3)EMG LK RLS6 Ry (1)C 24V (2)M 24V 0V4 DC24V 0V (2 ) (3)EMG LK RLS6 Ry (1)C 24V (2)M 24V 0V4 DC24V 0V (3 ) (3)EMG

Air Cylinder

V(1 pc.) V(1 pc.) V V L Axial foot V(1 pc.) V(1 pc.)Note 2) V(1 pc.) V(1 pc.)Note 2) V(2 pcs.) V V F Rod flange V(1 pc.) V(1 pc.) V(1 pc.) V(1 pc.) V V G Head flange V(1 pc.) V(1 pc.) V(1 pc.) V(1 pc.) V V C Single clevis V(1 pc.) Note 3) V(1 pc.) V(1 pc.) V(Max. 3 pcs.) Note 3) V V D Double clevis V(1 pc.) Note 3) V(1 pc.) V(1 pc.) V(Max. 3 pcs.) Note 3) V(1 pc.)

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Width across flats P Rc(PT)1/8 Rc(PT)1/8 Width across flats P M14 x 1 M14 x 1 Width across flats 19 Width across flats 19 5 5 I 5 D C I K K 5 D C J J Width across flats 12 M8 x 1.25 M8 x 1.25 Width across flats 12 H F H F Width across flats 12 Width across flats 3 3 Y 2 2.5 A B A B With a stroke of 10mm With a stroke of 10mm Applicable tube O.D. Q Applicable tube O.D.

Valve Single Unit

SY Flow Characteristics SYJ 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size SX Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv SS5X3-20 SS5X5-20 SS5X7-20 1 8 1 4 1 4 Rc Rc Rc C6 C8 C10 0.21 0.53 0.88 0.36 0.20 0.27 0.80 2.2 3.6 0.18 0.48 0.93 0.29 0.28 0.31 0.72 1.9 3.6 Note) The value is for manifold base with 5 stations and individually

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

4 138 17 50 22 M20 x 1.5 10 M10 x 1.5 Up to 1000 19 G 1/2 25 32 55 40 398 65 15 17 6 160 20 58 27 M27 x 2 13 M12 x 1.75 19 Up to 1000 G 1/2 32 40 60 54 Minimum stroke for trunnion mounting are below.

A_HEC-OM-K001

Fig. 5-1 Details of operation panel 1st line Indicates No. corresponding to the alarm which arises and [WRN] comes to light up when temp. upper or lower limit warning occurs. E R R 1 1 W R N P V < 3 1 . 6 C # 1 2nd, 3rd line S V 3 0 . 0 C Current temp.[PV]]and target temp.[SV] during normal operation.

CJ2

1 !

VCC

Manifold C C 1 V V V C C 1 0 0 Valve Specification Sheet Fill in the symbol for stainless steel fitting. For others, mark necessary items with a circle.

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 1 1 1 0 Y 5 LO (Example) Series Manual override D-sub connector kit with 3m cable VV5Q12-08C6FU2-D VQ1110-5LO VQ1210-5LO VQ1310-5LO VVQ1000-10A-1 VQ0 0 1 B C 1 setManifold base No. 4 setsValve No. (Stations 1 to 4) 4 setsValve No. (Stations 5 to 8) 2 setsValve No. (Stations 7 to 8) 1 setBlank plate No.

HRX-OM-X084

G2Yellow/Green 17 Brown Blue 18 (CN1) 1/2 CB Red Brown 19 1A Circuit breaker PT1 White Blue 20 2A Circulating fluid outlet White Blue 21 3A 22 Blue (CN6) 1/3 Blue Brown 23 21 Blue 24 Brown 35 Black Black Black Black 25 Blue Blue 36 FL Flow rate sensor 26 Blue Blue Black 34 27 (CN5) 1/3 Brown Blue 28 White 1 1 1 2 1 3 3 1 2 4 6 7 5 Circulating fluid returnT1 8 9 White Blue (CN1) 2 2 (CN2)