Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Direct Solenoid

Solmldc.pc y indud6 cap, (1)rutbre3 pluo dor 15, (r ) dr 19, (2) (h 13, (2) dn 14, dnd (1) d.r 7 sc@01 t2B sordrdrdcp*3y. t'dud6p, (r) rss$d i@roddng cp...ro.dor t6. 0 ) &l 1q (2) del 13, (2) d.l 14, -d 11 | d.r 7lv5tv rvd'l{1 s6602 Solmidc4 s y. hdude, (1) .ubod a@ds plus rb| r 5, (1) irdi@ro.lign a$nbry dor 1 7& 13, (1 )drr 19, (2) dr 13, 12) d6r 14. and lrl dat 7 (b,vo lve 1"1 1 6 sdendd

Series AP500

No code A 1) Only available with AP501.

ZSE1/ISE1

5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

Vacuum Pad: Ball Joint Type

width across flats 3 ZP3E 3 ZP2 ZP2V 2 A B ZP Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR XT661 Dimensions: 10 mm Stroke (mm) A B C D F H I J Model ZPT20F10-01-A14 20 22 12.5 15.5 36 48.5 1 15 ZPT25F10-01-A14 50 25 28 ZPT32F10-01-A14 32 35 13 16 36.5 49 1 15.5 Additional Dimensions by Stroke (mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +40 +60.5 +25 715 ZPT Series 10 13 16 40 50 J K J K ZPT F

AR20-B to AR60-B

Description Material Model Color Zinc die-cast AR10-A 1 Body White Aluminum die-cast AR20(K)-B to AR60(K)-B AR20K-B to AR60K-B (Regulator with Backflow Function) AR10-A Polyacetal White AR20(K)-B to AR40(K)-B 2 Bonnet A-A Aluminum die-cast AR50(K)-B/ AR60(K)-B y A Replacement Parts [AR10-A] 2 OUT 1 I N No. Description Material Part no.

VZA200/400

Rc 1/8 Body side VZA422-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C.

AS-FPQ/AS-FPG

Installation of tubing 1) Using tube cutters TK-1, 2 or 3, take a tube having no flaws on its periphery and cut it off at a right angle. Do not use pinchers, nippers or scissors, etc.

5 Port Air Operated Valve Series VFA3000 1

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.

AS-FPQ/AS-FPG

Installation of tubing 1) Using tube cutters TK-1, 2 or 3, take a tube having no flaws on its periphery and cut it off at a right angle. Do not use pinchers, nippers or scissors, etc.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B AS Series Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow rate characteristics are representative values.

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

Ozone Resistant

Solenoid valve Air leakage, Malfunction Gasket Seals are coated with a lubricant that has a shielding effect from ozone.

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'

PSE540/560

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.

VFA3000

1 8 1 4 1 8 1 4 1 8 1 4 VFA32302 position double 0.17 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3330-X1 3 position closed center 0.32 1 8 11.7 (0.65) 14.4 (0.8) 01 02 Base mounted (EXH: ) 1 8 VFA3430-X1 3 position exhaust center 0.32 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3530-X1 3 position pressure center 0.32 1 8 14.4 (0.8) 9.9 (0.55) 16.2 (0.9) 10.8 (0.6) 01 02 (EXH: ) 1 8 1 4 3

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

PFxx-OMJ0005CN

N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3

Table of Contents

Model A side B side JIS Symbol A relay output module of devices up to 110 A B is available for control VAC, 3 A. 4(A) 2(B) A B N.C. valve N.C. valve 3(EB) SOL.b SOL.a 1 2 SV A00 5(EA) B side passage symbol: Green B side manual override: Green Tie-rod base manifold (For SV1000/2000/3000/4000) 1(P) 4(A) 2(B) A side coil A side spool valve B side spool valve N.O. valve N.O. valve 1 2 SV B00