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(PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also. Vacuum Release Using Low Pressure Nitrogen* Solenoid valve / Model ' Consult taclory tor individual or assembly pan numbers. t See p. 2a & 29 also.

(PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also. Vacuum Release Using Low Pressure Nitrogen* Solenoid valve / Model ' Consult taclory tor individual or assembly pan numbers. t See p. 2a & 29 also.

28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil Replacement Parts DIN Connector Part No.

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

RE A B (mm) Mounting Rail mounting style Direct mounting style REC D-A7H/A80H D-A73C/A80C D-F7/F79F/J79 D-F7V/J79C D-F7BA/F7W D-J79W/F7WV D-M9 D-M9V D-F9W VD-F9W D-A79W D-A9 D-A9V D-A7/A8 D-F9BAL D-P5DWL CX Model A 28 28.5 32.5 23.5 28 28 A 28 29 33 24 28.5 28.5 B 6.5 7 6 8.5 11.5 14.5 B 7 7.5 6.5 9 12 15 A 25.5 26 30 21 25.5 25.5 B 4 4.5 3.5 6 9 13 A 19.5 24 24 B 4.5 7.5 10.5 A 31.5 22.5

For details, refer to page 9-15-39. 9-10-28

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

VZ1000-11-4L 8 5.5 (35) (25) (10) Rail mounting hole pitch 12.5 No. 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 L dimension 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 273 285.5 298 310.5 323 Weight [g] 24.8 28 31.1 34.3 37.4 40.6 43.8 46.9 50.1 53.3 56.4 59.6 62.7 65.9 69.1 72.2 75.4 78.6 81.7 No. 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 L dimension

Recommended Torque Unit: Nm AFF20 AM20 AMD20 AMK20 AFF50/AFF60 AM50/AM60 AMD50/AMD60 AMK50/AMK60 AFF30 AM30 AMD30 AMK30 AFF40 AM40 AMD40 AMK40 Connection thread 1/8 1/4 3/8 1/2 3/4 1 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Applicable model 4. When an SMC One-touch fitting is used, refer to the operation manual for the One-touch fitting.

49 35 28 16.8 2.7 12 PF3W711 3/41 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -81No.PF-OMM0004-D PF3W721 A AA B D E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W721 56 91 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78

/IN (/15 V ) 3 DC() 4 INPUT (15 V ) COPY OUT2 OUT1 DC() DC() -16No.PF-OMN0011CN-C ,FG () SMC(1) ZS-28-CA-4() 1.151.35 ZS-28-C-1 1.01.2 AWG23 1.14ZS-28-CA-4 1 2 3 4 PF3W5 M8 A A ,LLL -17No.PF-OMN0011CN-C NPN2 PF3W30A PNP2 PF3W30B DC(+) DC(+) OUT1 OUT1 OUT2 OUT2 DC(-) DC(-) / / Max.28 V80 mA 1 V Max.80 mA 1.5 V NPN PF3W30C NPN PF3W30D PNP PF3W30E PNP PF3W30F

DC() OUT1 OUT2 DC() OUT1 OUT2 DC24V DC24V DC() DC() Max.28 V80 mA 1 V 420 mA 600 Max.28 V80 mA 1 V 15 V 1 k 22 No.LFE*-OMY0008 NPN2 LFEA NPN LFEC LFED OUT1 OUT2(LFE*A***) DC() DC() OUT1 PNP2 LFEB OUT2 OFF( 23 No.LFE*-OMY0008 1 3 (OFF) 1 1 ON OFF ON OFF [L/min [L/min [L/min [L/min] ] ] ] ON ON ON ON OFF OFF OFF OFF ( ( ( ( ) ) ) ) 24 No.LFE*-OMY0008 1 [P_1][n_1] 1

(B contact). (1) (2) (3) Setting of contact output signal 1 to 3 Table 5.4-28 Setting of contact output signal 1 to 3 No.

Table 3-10 Piping port size Description Port Recommended Recommended piping size tightening torque specifications Circulating fluid outlet port Rc1/2 28 to 30Nm 0.4MPa or more*2 Circulating fluid return port Rc1/2 28 to 30Nm 0.4MPa or more*2 Facility water inlet port *3 Rc3/8 22 to 24Nm 1.0MPa or more (Supply puressure: 0.3 to 0.5MPa) Facility water outlet port *3 Rc3/8 22 to 24Nm 1 For NPT

NVHS2000 1/8, 1/4 1/8 40 56 36 28 22 25 NVHS3000 1/4, 3/8 1/4 53 74 45 48 28 30 NVHS4000 1/4, 3/8, 1/2 3/8 70 80 48 54 36 30 D I M E N S I O N S S E R I E S (N)VHS 3 P O R T VA LV E H O W T O O R D E R S E R I E S (N)VHS S H U TO F F V A LV E S (N)VHS 00 W I T H L O C K I N G FA C I L I T Y Standard N North American B O D Y S I Z E A N D A P P L I C A B L E FRL S E R I E S 2 2000 3 2500,

) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22 25 2 position SYJA330 M3 x 0.5 Note 1) Value when used on a manifold.

Bore (mm) H I OA OB E F M N K L Q RA RB T Inch Inch Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 Metric M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 25 29 36 40 5 5 5.5 5.5 #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC 15.5 20 25.5 28 3.5 3.5 5.4 5.4 32 38 47 52 #8-32UNC #8-32UNC #10-32UNF 1/4-28 UNF 3.5 3.5 4.5 5 5.2 6.2 8.2 10.2 12 16 20 25 6.5 6.5 9 9 12.5 12.5 14 16 7 7 10 10 4 4 7 7 0.5 0.5 1 1 For the following

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.