Battery-less 35 40 to 50% 160 140 Lead 2.5: LEY16EC 120 Lead 5: LEY16EB LEY32E A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEY16EA 80 LEY40E A 24 to 30 50 to 65% B/C 21 to 30 60 40 Min. 20% 0 20
adjuster CRBU2W10/15/20/30/40-S D With angle adjuster + Auto switch unit CDRBU2WU10/15S D CDRBU2WU20/30/40-S D Parallel keyway for size 40 CRB2 Port side (A, B) Port side (A, B) CRBU2 Port side (A, B) CRB1 MSU CRJ CRA1 CRQ2 MSQ CDRBU2WU10 MRQ D20For single vane type: Illustrations above show actuators for 90 and 180 when B port is pressurized.
ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 With One-touch Fittings
K 8.4 8 10.5 10.5 L 40 53 70 70 H 22 23 26 25 E 18 16 17 14 F 30 41 50 50 G 27 40 54 54 P 57 73 73 B 97 129 165 169 C 10 14 18 20 D 40 53 70 70 A 40 53 70 75 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 AFM20 AFM30 AFM40 AFM40-06 Optional specifications Model With drain guide With barb fitting Metal bowl Metal bowl with level gauge S B B 97 142 178 182 B B AFM20 AFM30 AFM40 AFM40-06 38 45 45 162
LEY25 B 40 20 Lead 12: LEY25 A Lead 12: LEY25 A 20 10 0 0 0 200 400 600 800 1000 1200 0 200 400 600 800 1000 1200 Speed [mm/s] Speed [mm/s] LEY32 V7 (Motor mounting position: Top/Parallel) Vertical Horizontal 50 80 Lead 5: LEY32 C Lead 5: LEY32 C 40 60 Lead 10: LEY32 B Regenerative resistor area Work load [kg] Work load [kg] 30 Lead 10: LEY32 B 40 Lead 20: LEY32 A 20 Lead 20: LEY32 A 20 10
/Y7WV D-Y7BAL D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL Auto switch model D-P5DWL Hs Bore size (mm) A B A B A 40 50 63 80 100 0.5 2.5 3.5 19.5 23.5 26.5 0 0 1 3 4 15 15.5 20 24 27 Ht B It cannot be mounted on models with bore sizes 40 and 50 mm.
V V Interchangeable with the existing model Size 30 V V Size 40 V V V V The new spacer can be connected to the existing AF-A, AR-B, AL-A, and AW-B series.
Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38
ti g ot 9 a t 0 e o Key t 0 0 o r 2 r r 8 y +4 0 y +4 0 0 e y e e K +4 0 K K +4 0 Key Key 0 0 (40) 1 Key e g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Screw Model CRB1BW 50 CRB1BW 63 CRB1BW 80 CRB1BW100 L M6 48 M8 52 M8 60 M10 80 68 Rotary Actuator Vane Type Series CRB1 Rotary Actuator with Built-in
AL A H F N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Stroke range Bore size (mm) S A AL B B1 C D E F H1 MM K KA M N HX J (mm) 40 50 63 80 100 RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6 27 32 32 37 37 6 7 7 11 11 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11
TZ TY TX TT TD S QY Bore size (mm) 20 25 32 40 116 36 52 32 32 10 8 62 14 120 40 60 40 40 10 9 62 14 122 40 60 40 40 10 9 64 16 154 44.5 77 53 53 11 10 88 16 10-15-24 25 Valve Mounted Cylinder Double Acting, Single Rod Series CVM5 Head Side Trunnion Style (T) Bore size Stroke CVM5T Manual override Width across flats B2 Width across flats B1 0.025 0.061 RE A B REC CX CY Width across flats
B port (40) A port * For size 40 actuators, a parallel key will be used instead of chamfer.
95.5 110.5 121.5 136.5 12 12 12 11.5 11.5 B A MY1C (Cam follower guide type) 63 50 40 32 25 Mounting position A 97.5 127.5 157.5 278.5 323.5 B Operating range l Note) 122.5 152.5 182.5 121.5 136.5 12 12 12 11.5 11.5 B A MY1H (High precision guide type) 40 32 25 Mounting position A 180 216 131.5 B 100 124 88.5 Operating range l Note) 11.5 11.5 8.5 B A MY1HT (High rigidity/High precision
rod end fR [N] (40)1 (40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (
(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of
Width across flats 14 31 17 A Width across flats 14 17 31 A A 15 25.5 8 B 3 14.5 25 8 14.5 25 8 B 2 B 2.5 35 32 43 40 53 50 Dimensions Dimensions Dimensions Model A B ZP3E-T32UMl-B8 M8 x 1.25 9.5 ZP3E-T32UMl-B10 M10 x 1.5 13 Model A B ZP3E-T40UMl-B8 M8 x 1.25 9.5 ZP3E-T40UMl-B10 M10 x 1.5 13 Model A B ZP3E-T50UMl-B8 M8 x 1.25 9.5 ZP3E-T50UMl-B10 M10 x 1.5 13 Model Weight [g]/Pad material
C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U
Port size Center of F.R.L. body E F F E E B C Cross spacer E D A F: Without thread Model 1 E (Port size) A B C D Applicable model Y14-M5-A M5 23 16 14 25 AC10l-A Y24-l01-A 1/8 40 40 22 40 AC20l-B Y24-l02-A 1/4 Y34-l01-A 1/8 49 43 28 48 AC25l-B, AC30l-B Y34-l02-A 1/4 Y44-l02-A 1/4 60 48 36 54 AC40l-B Y44-l03-A 3/8 Y54-l03-A 3/8 72 62 40 62 AC40l-06-B Y54-l04-A 1/2 Caution on Mounting 1.
Heater: 422 B XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.
-www.stevenengineering.com 63 50 40 32 25 Mounting position CX A 184.5 278.5 323.5 229.5 139.5 B 95.5 121.5 136.5 110.5 80.5 DOperating range l Note) 5 5.5 5.5 5 5 B A -X 20MY1C (Cam follower guide type) Data (mm) 63 50 40 32 25 Mounting position A 157.5 278.5 127.5 323.5 97.5 B 182.5 121.5 152.5 136.5 122.5 Operating range l Note) 5 5.5 5 5.5 5 B A MY1H (High precision guide type) (mm) 40