IIIIIIIIII

5 micron Part Number Description F-4103-30F-4103-33F-4103-36F-4103-37F-4103-38F-4103-39F-4103-39NF-4103-40F-4103-50-5 to 5 PSI -5 to 10 PSI -5 to 20 PSI -8 to 5 PSI -8 to 20 PSI -13 to 20 PSI 0 to 10 PSI 0 to 20 PSI, 3:1 RATIO 0 to 20 PSI, 5:1 RATIO XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX BARB OPTIONS ADJUSTING OPTION W/K = WITH ADJUSTING KNOB W/S = WITH 1/4" SHAFT W/0S = FLUSH

V

Stations Max) V A LV E S TAT I O N S 02-10 .Double Wiring Specifications 11-20 .Applicable up to 20 Solenoids.

VQZ1000/2000/3000

Without light AXT100-20-1 With Indicator Light DIN Rail Removal/Mounting Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24V 12V 100V 200V 110V 220V Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Circuit with indicator light Removing 1. Loosen the clamp screw on the (A) side of both ends of the manifold. 2.

Compact manifold regulator ARM5 Series

-1 (One-touch fittings: IN 8, OUT 6) Condition: Inlet pressure 0.5 MPa 0.35 0.7 Outlet pressure (MPa) Outlet pressure (MPa) 0.30 0.6 0.25 0.5 0.20 0.4 0.15 0.3 0.10 0.2 0.05 0.1 0 0 50 100 150 250 200 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics (Representative Value) ARM5AA1-308 Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) Condition: Inlet

MY1

20 1.

Basic Type/Direct Mount Type

Standard stroke 6 10 15 20 25 32 40 50 63 6mm 10mm 15mm Port thread type 20mm Bore size 6, 10, 15 Type M thread Rc NPT G Symbol 25mm 32mm Nil 20, 25, 32, 40 40mm TN TF 50, 63 50mm 63mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 6 50, 100, 150, 200 500 10 15 20 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn X-axis Xn Z-axis Zn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

C95

16 16 20 20 25 12 16 16 20 20 25 50 63 75 90 110 132 49 58 71 87 110 136 64 72 90 100 126 150 79 90 110 120 153 178 50 55 70 80 100 120 32 40 50 63 80 100 Rod boot (gaiter) e max f I h Bore (mm) Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 42 43 52 52 58 65 23 23 25 25 29 29 12.5 12.5 12.5 12.5 12.5 12.5 25 25 25 25 25 25

Environment

20: LEY63A Motorless 50 LAT 0 0 200 400 600 800 1200 1000 Speed [mm/s] LZ Allowable Stroke Speed [mm/s] LC3F2 Model AC servo motor Lead Stroke [mm] Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 600 700 800 A 12 900 600 B 6 450 300 C 3 225 150 LEY25 Motor mounting position: Top/Parallel, In-line 100 W /40 (Motor rotation speed) (4500 rpm) (3000 rpm) A 20 1200 800 B 10 600 400 C

C95Series

B TA ~ TL TU TC TX TE TO TR n TS TH TF Z " TOH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12 g.070 MII-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16 +8-070 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 1 6gmo Mounting plate (Double clevis) MII-S06 63 75 100 70 15 11 0 90 130 20 11 22 14 60 80 105 201.084 80 95 100 70 15 130 11 0 150 20 11 22 14 50 80 129 20 1 1)84 Ma,510

33

HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

LEC-OM02904

(L) W E L d 11 30 11 11.8 (1) ACPWM 30cm 10{IglIgnIgaK(Ig2Igm)}[mA](11.1) K NV M NV-SP NV-SW NV-CP NV-CW NV-HW 1 Ig1 Iga Ig2 Igm Ign BV-C1 NFB 3 NV-L Igl (11.3) Ig2 (11.3) Ign (FR-BIF-(H) ()4.4mA) Iga(11.6) Igm (11.5) 120 120 100 100 80 80 60 60 40 40 [mA] [mA] [mA] [mA] 20 20 0 2 0 2 100 5.5 14 38 14 100 5.5 38 8 3.5 22 60 150 8 3.5 22 60 150 30 80 30 80 2] [mm 2] [mm [mm2] [mm2]

ZP

8 14 40 33 20 52 7 17 150 250 155 40 4 x 14 4 x 9 88 4 x 16 4 x 10 34 Symbol/Type HB: Heavy-duty (Bellows) Heavy-duty Pad 32, 150 Pad diameter For heavy or large work pieces How to Order ZP2 32 HB N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 Symbol Material NBR Silicone rubber FKM CR 32 150 N S F C Note) Silicone rubber is only applicable to the 32 pad.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

WW C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) Bore size S 102.5 101.5 45 45 20 20 NB FB 17.5 19 NN Z 16 10 15 15 18.3 15 20 17 8 8 5 5 6.5 6.5 11 11 M5 x 0.8 M4 x 0.7 D GC B F H MM GB GA C A 28 28 NA WW WA WB FC 5.5 5.5 FT 2.3 2.3 FX 33 33 FY 20 20 FZ 42 42 74.5 73.5 M10 x 1.0 22.9 22.9 13.4 13.4 29.5 29.5 4 5 M12 x 1.0 6 B Air Cylinder CJ2 10-/1121-/22Head Side Flange Style (G) / CJ2G, CJ2G

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WW C B 0 0.3 B 0 0.3 Drawing of view E (mm) S Bore size 102.5 101.5 45 45 20 20 NB FB 17.5 19 NN Z 16 10 15 15 18.3 15 20 17 8 8 5 5 6.5 6.5 11 11 M5 x 0.8 M4 x 0.7 D GC B F H MM GB GA C A 28 28 NA WW WA WB FC 5.5 5.5 FT 2.3 2.3 FX 33 33 FY 20 20 FZ 42 42 74.5 73.5 M10 x 1.0 22.9 22.9 13.4 13.4 29.5 29.5 4 5 M12 x 1.0 691 Air Cylinder CJ2 10-/1121-/22Head Flange (G): CJ2G, CJ2G 10112122Rubber

Adsorption Plate

less 250 x 250 18 625 or less 282 Body size under 100 to 150 350 or less 300 x 300 20 900 or less 339 20 to 350 under 150 to 200 400 or less 23 Over 900 under 200 to 250 450 or less Order a thickness equal to or greater than that shown on the table.

1.63

200 MGPWA -150 32 40 MGPWA20-150 0.3 0.3 MGPWA -100 32 40 MGPWA20-100 0.2 0.2 MGPWA -50 32 40 MGPWA20-50 0.1 0.1 0 0 0 20 40 60 0 20 40 60 80 100 Load from lateral direction (N) Load from lateral direction (N) MGPWA25 MGPWA50, 63 0.5 0.5 Plate displacement amount (mm) Plate displacement amount (mm) MGJ 50 63 MGPWA -200 0.4 0.4 MGPWA25-200 JMGP 0.3 0.3 50 63 MGPWA -150 MGPWA25-150 0.2 0.2

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 22 190 Z section 92 3.3 55 90 82 A section 5.8 1.7 4.8 Stroke + 362 135 A section detail (Switch groove) Stroke + 32 3-8H10 depth 5 92 11.5 20 67 90 (T-slot pitch) 45 9.4 62 92 8-6.6 4.5 10 58

Stroke Reading Cylinder and Counter

Series Variations CE1 Series CEP1 Series Standard stroke (mm) Standard stroke (mm) Manufacturable stroke range Manufacturable stroke range Bore size (mm) Bore size (mm) 25 50 75 100 125 150 175 200 300 500 25 50 75 100 250 400 12 20 32 40 50 63 12 equivalent 25 to 150 1 to 150 20 equivalent 25 to 300 1 to 300 Strokes other than standard strokes are available upon request.