MHL2

0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 200 200 300 300 0.4MPa 0.4MPa 0.3MPa 150 150 0.3MPa 0.3MPa 200 200 0.3MPa 100 100 0.2MPa 0.2MPa 0.2MPa 0.2MPa 100 100 50 50 0.1MPa 0.1MPa 0.1MPa 0.1MPa 50 100 150 200 50 100 150 200 0 0 40 80 120 160 200 40 80 120 160 200 0 0 Holding point R (mm) Holding point R (mm) Holding point R (mm) Holding point R (mm) 2.2-3 Wide Opening Air Gripper Series MHL2 Example

CQS

Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Mounting bolt Mounting bolt CDQSKB12-5D -10D -15D -20D -25D -30D CDQSKB16-5D -10D -15D -20D -25D -30D CDQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQSKB25-5D -10D -15D -20D

0.5

(Load current: 150 mA) NPN open collector output Maximum load current: 80 mA Residual voltage: 1 V or less (Load current: 80 mA) Maximum load voltage: 26.4 VDC PNP open collector output Maximum load current: 80 mA Residual voltage: 1 V or less (Load current: 80 mA) Maximum load current: 150 mA Switch output Residual voltage: 1 V or less (Load current: 150 mA) Maximum load voltage: 26.4 VDC

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 ZZ 148.5 148.5 148.5 158.5 182.5 207.5 246.5 299.5 324.5 13-/22-MXQ2510

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Applicable strokes:150, 250, 350, 450, 550, 650, 750, 850, 950, 1050 Example) LJ1S2021SC-150-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Mounting orientation Load movement direction Model Pitching Rolling Yawing 5.5 6.0 8.5 a = 500 LJ1S20 150 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a = 1000 a L1 (mm) L2 (mm) L3 (mm) 100 a = 2000 Pitching Rolling

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn X-axis Xn Z-axis Zn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

Series VQ Metal Seal/Rubber Seal Body Ported

length 5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CJ2 Pressure

MY1

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

Series VQ Base Mounted Metal Seal/Rubber Seal

CJ2 Pressure 0.5MPa Load factor 25% Piping length 2m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm Fitting (One-touch fitting) Effective area (mm2) (Cv factor) Cylinder speed (mm/s) Model 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 3.6 (0.2) VQ1000 (Metal seal) 6 5.4 (0.3) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CA1

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

Modular F.R.L. Units

P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for all equipment!

MGC

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 63 80 100 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142 180 210 28 25.5 32.5 88 92 85 (mm) Bore size (mm) X XA XB XC XL YY YL Z 24 28 11 63 80 100 8 10

ISO Standard Hydraulic Cylinder

120 74 13 36 30 32 36 32 80 M10 x 1.25 25 to 800 10.5 M33 x 2 57 32 60 13 42 17 1/2 74 75 96 133 73 100 150 80 45 41 17 41 45 -0.025 -0.064 40 100 M14 x 1.5 25 to 1000 14.5 M42 x 2 58 42 72 38 22 3/4 86 16 115 90 146 79 120 184 50 97 19 56 56 52 Bore size (mm) ZZ V Z 40 6.5 161.5 132 50 8 176 139 63 12 198 153 80 15 223.5 168 100 15 257.5 187 338 CHSD Series ISO Standard Hydraulic Cylinder

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Air Cylinder

25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

VFS

Besides, as lubricant for compressors, Faircoal A-80 (Nippon Mitsubishi Oil Corp.), Dafney CS55, CS49 (Idemitsu Kosan Co., Ltd), etc. are commercially available on the market. 2. When the foreign matters from air source adhere to the spool and sleeve, disassemble the adapter plate section and end plate section (return spring insert section).