Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

It is already built-in to the rectifier circuit. 50 60 100 VAC Hz 1 2 200 VAC Hz 50 60 50 60 110 VAC Hz [115 VAC Hz] 3 Electrical entry 50 60 50 60 50 60 DIN terminal D With connector 4 220 VAC Hz [230 VAC Hz] DO Without connector DC specifications of type "D" and "DO" is only available with 12 and 24 V DC. Power saving circuit is not available in the case of "D", "DO" type.

33

temperature 40C (200 VAC) Set temperature range 10 to 30C Temperature stability 2.0C 615 Maintenance free Magnet pump Low-noise design 55 dB (A) Power supply 100/200 VAC 50/60 Hz 230 VAC 50/60 Hz 191 Thermo-chiller Basic Type HRSE Series Circulating Fluid Temperature Controller Simple function and performance Cooling capacity 1.2, 1.6, 2.2 kW (60 Hz) Power supply 100/200 VAC (50/60 Hz) 230

LX

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 2kg For transfer load of 0kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

CXS

) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph (15) V = Over 400 mm/s; Up to 100 mm stroke CXSJM CXSJL Graph (14) V = Over 400 mm/s; Up to 75 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 10 15 15 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang

CXS

80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (15) V = Over 400 mm/s; Up to 50 st Graph (16) V = Over 400 mm/s; Up to 75 st 2 2 CXSM CXSL CXSM CXSL 1 1 0.5 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 0.05 20 20 15 15 10 0.01 0 0.01 10 20 40 60 80 100 0 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (17) V = Over 400 mm/s; Up to 100 st 1 CXSM CXSL Weight m (kg) 32

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

, 70, 75, 80, 90, 100 30 10 16 20 25 30 35 40 45 50 60 70 80 75 90 100 10 15 20 25 30 35 40 45 50 60 70 80 75 90 100 Model CXS20 CXS25 CXS32 170 160 150 145 140 130 120 115 110 105 100 95 90 85 80 194 184 174 169 164 154 144 139 134 129 124 119 114 109 104 60 40 172 162 152 147 142 132 122 117 112 107 102 97 92 87 82 196 186 176 171 166 156 146 141 136 131 126 121 116 111 106 60 40 30 182

Guide Cylinder Series MGG

) 500st 300st 400st 1 1 0.5 400st 300st 200st 300st 0.5 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 20 40 60 80 100 10 20 30 40 50 60 70 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGM 40Stroke 3 (Slide bearing type) 2.5 Deflection Y (mm) 800st 2 700st 600st 1.5 500st 1 300st 400st st: Stroke (mm) 0.5 100st 200st 0 0 20 40 60 80 100

CHKD/CHKG

140 145 150 155 160 165 190 215 240 265 290 55 60 65 70 75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120 145 170 195 220 245 12.4 15.5 CHKGB25 CHKGB63 10.4 16 CHKGB32 CHKGB80 10.5 22 CHKGB40 CHKGB100 13.5 26.5 282 Compact Hydraulic Cylinder: 16 MPa CHKG Series Specific Product Precautions

2/3 Port Valve

Oil (D, N) Vacuum (V, R, Y) 50 20 11 60 17 7 50 40 18 60 35 12 50 50 21 60 45 17 AC VX21 60 40 80 AC DC AC DC 60 60 40 100 60 40 Max. DC (1) (2) AC 20 10 Min. 10 5 VX22 Option Material DC No. Description Note 1) Dew point: 10C or less. Note 2) 50cSt or less Note 3) "D", "N", "V", etc. in the parenthesis are option symbols.

Modular Design with Uniform Body Style

-D IS10L-40-m02-D IS10L-40-m03-D IS10L-40-m04-D IS10L-60-m04-D IS10L-60-m06-D IS10L-60-m10-D Pressure switch with L-shaped piping adapter*5, *6 IS10L-20-m01-D IS10L-20-m02-D IS10L-50-m04-D IS10L-50-m06-D p. 56 IS10E-40-m02-D IS10E-40-m03-D IS10E-40-m04-D IS10E-40-m06-D IS10E-60-m06-D IS10E-60-m10-D IS10E-60-m12-D IS10E-60-m14-D IS10E-20-m01-D IS10E-20-m02-D IS10E-20-m03-D IS10E-30-m02-D IS10E

Air Cylinder Series MB

93 105 105 129 129 157 12 16 16 20 20 25 25 92 96 109 109 134 134 163 47 60 60 80 80 100 115 62 80 80 100 100 120 142 7 9 9 11 11 13.5 13.5 MB-S04 MB-S06 MB-S10 MB-S12 Double clevis pivot bracket B DX DB Z + Stroke DD B 90 B 4-DT A DH DS DA DL DU DU 4-DR DE DC DO DO Without air cushion (mm) Bore size (mm) Part No.

100

90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

, 200, 300 10 -X 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 20100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 Data 2 axes 1500 32 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

100 D-A3lC D-G39C D-K39C Different surfaces 20 + 35 (n 2) (n = 2, 3, 4, ) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) n Same surface 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 120 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) 1 10

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

ISO Cylinder

101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 56 (62) 74 (80) 86 (92) 96 (102) 10 56 (60) 74 (78) 86 (90) 96 (100) 12 60 (63.5) 85 (88.5) 101 (104.5) 115 (118.5) 16 66 (69.5) 92 (95.5) 118 (121.5) 92 (95.5) 118 (121.5) 144 (147.5) 108 (111.5) 134 (137.5) 160 (163.5) 121 (124.5) 147 (150.5) 173 (176.5) 20 87 112

MXS

MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 3.11-8 Air Slide Table Series MXS Table defection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment applied at arrow for fully extended stroke of slide table Table yaw deflection due to static

Modular F.R.L. Units

(Long bowl, 0.4 MPa setting, With element service indicator, High pressure, Low temperature, High temperature, Clean series, and Copper, fluorine, and silicone-free + Low particle generation) AL30 to 60 (1000 cm3 tank) added. Number of pages increased from 100 to 116.

MGP

40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series