0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

AC Servo Motor Driver (Pulse input type/Positioning type)

PA05 100 100 Electronic gear numerator *3. PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

ZP

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

energy saving effect

HRS 100/150 HRSH 090 The product will be delivered in the packaging shown below.

Compact Electric Actuator Series LG1

Nonstandard Compatible Motors: Motor model Corresponding driver model Power supply voltage (AC) Motor output (W) MSM011P1A Matsushita Electric Industrial Co., LTD 100/115 MSD011P1E MSM012P1A 100 200/230 MSD013P1E 100/115 MR-C10A1 Mitsubishi Electric Corporation HC-PQ13 100 200/230 MR-C10A Yaskawa Electric Corporation 100/115 SGDE-01BP 100 SGME-01BF12 200/230 SGDE-01AP SGME-01AF12 Refer to

SFOD-OMT0009CN

LERH30K-3LLERH30K-3 0 (a) ) LEY16RA-75LEY16RALEY16RA-100 (b) LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 (c) 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 15 No.SFOD-OMT0009CN-B Execute (Apply) 3.6 (2) 16 No.SFOD-OMT0009CN-B (2) 7. 512 2048 / 0 1 0 1 1 4 1 4 11 () 12 () 1 2 1 11 [] 14096 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

DC Red Black 100 VAC Blue Blue 2 200 VAC Red Red 2 (, +) Other AC Gray Gray With surge voltage suppressor With surge voltage suppressor There is no polarity for DC. (For the low power consumption type, there is polarity.) Description Part no. Seal VCW20-15-6 Note) Please order separately.

HRX-OM-X037

Table 8.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

Compressed Air Preparation Filter

50 250 200 150 100 300 600 450 300 750 1200 900 600 1500 Air flow rate [L/min (ANR)] Air flow rate [L/min (ANR)] Air flow rate [L/min (ANR)] AM50 AM60 6 20 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 5 15 Inlet pressure 0.5 MPa 4 Pressure drop [kPa] Pressure drop [kPa] Inlet pressure 0.5 MPa Max. flow capacity line 3 10 Max. flow capacity line Accessories Sold Separately/ International

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

MXQ

10 0.02 0.02 0 0 400 500 600 100 200 300 0 100 200 300 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr = 200 mm 0.08 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-10 MXQ25-10 MXQ25-20 MXQ25-20 MXQ25-30 MXQ25-30 MXQ25-40 MXQ25-40 MXQ25-100 MXQ25-125 MXQ25-150 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-50 MXQ25-50 MXQ25-75 MXQ25-75 0.12 0.10 MXQ25-75 MXQ25-75 MXQ25-75 MXQ25-40 MXQ25

Uniaxial Electric Actuator Series LJ1

100% Horizontal load 50% Horizontal load 100% Horizontal load 50% 50 100 200 50 100 200 20 20 10 10 5 5 Lateral load 100% Lateral load 50% Lateral load 100% Lateral load 50% 1 2 1 2 0.5 0.5 Horizontal empty weight deflection Lateral empty weight deflection Horizontal empty weight deflection Lateral empty weight deflection 0.1 0.2 0.1 0.2 100 200 300 500 1000 100 200 300 500 1000 Load point

MVGQ

Built-in magnet for auto-switches CE1 CE2 Maximum Driving Speed of Cylinders ML2B 1000 1000 900 900 C J G5-S Load factor: 10% Load factor: 50% 800 800 Cylinder speed (mm/s) Cylinder speed (mm/s) 700 700 600 600 CV 500 500 400 400 MVGQ 300 300 200 200 CC 100 100 0 0 12 16 20 25 32 40 50 63 80 100 RB SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) J Series Variations DDetailed specifications

Stroke Reading Cylinder and Counter

Series Variations CE1 Series CEP1 Series Standard stroke (mm) Standard stroke (mm) Manufacturable stroke range Manufacturable stroke range Bore size (mm) Bore size (mm) 25 50 75 100 125 150 175 200 300 500 25 50 75 100 250 400 12 20 32 40 50 63 12 equivalent 25 to 150 1 to 150 20 equivalent 25 to 300 1 to 300 Strokes other than standard strokes are available upon request.

MU

, 125, 150, 175, 200, 250, 300 300 Other intermediate strokes can be manufactured upon receipt of order.

MU

, 125, 150, 175, 200, 250, 300 300 Other intermediate strokes can be manufactured upon receipt of order.

V100

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

Gun Type Ionizer

100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Electric Actuator Triple Axis P&P Unit

the weight of the work piece and the body. 2) Values in parentheses are those for side mount specification. 100 200 300 400 500 600 700 800 Stroke (mm) 900 1000 1100 1200 1300 1400 1500 Weight of body without motor (kg) 650 Stroke(mm) X axis 100 13.6 150 200 15.7 250 300 17.8 350 400 19.9 450 500 22.0 550 600 24.1 1500 43.0 Stroke(mm) X axis 700 26.2 750 800 28.3 850 900 30.4 950