HRX-OM-S004

-A-20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100

17

0.1 0.06 1 0.1 0.02 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Technical Data Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 1187 Mechanically Jointed Rodless Cylinder Basic Type 25, 32, 40 MY1B Series RoHS How to Order M9BW 25 Z 300 MY1B Basic type Made to Order Refer to page 1189 for details

AC

VBA4100 20 Rc(PT)1/8 SVBA, #1 SVBA, #2 SVBA, #4 1.13-6 VBA1110 to 4200 Air operated style VBA2200-03, VBA4200-04 A 300 404 B 126.5 167 C 53 96 D 118 150 E 98 130 F 46 62.8 G 43 62 H 60.5 90 J 18 17 K 15 15 L M Rc1/16 Model Port size Rc(PT) 3/8 Rc(PT)1/2 VBA2200-03 VBA4200-04 VBA2200 VBA4200 SVBA, #3 SVBA, #5 20 Rc(PT) 1/8 Air Tank Precautions Be sure to read before handling.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

148 160.5 185.5 198 210.5 235.5 248 L2 112.5 125 137.5 150 175 187.5 200 225 237.5 L3 88 104 120 136 152 168 184 200 216 L4 17.5 15.5 14 12 16.5 15 13 17.5 16 [47.9] R 41.9 34.5 29 22.4 19.1 Manual override (non-locking) (7.5) (DIN rail dimension) Manual override In case of locking type, ( turn after pushing in. ) U side G: Approx. 300 H: Approx. 600 lead wire length ( ) D side (L4) L3 DIN

Slider Type/Ball Bushing Bearing

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Cover diameter 1.4 Cross sectional area 0.2mm2 SMC 35.5 A port PE 16 12 7.5 7.5 14.5 7 7.5 1/8 NPTF P,A,R port M5 x 0.8 PE port L type plug connector (L): VQZ115(R)L -01T M type plug connector (M): VQZ115(R)M -01T 51.5 300 (Lead wire length) 60.5 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light 55.5 Indicator light Cover diameter 1.5 Cross sectional

5 Port Solenoid Valve, Series VQC

160.5 3 76.5 133.5 162.5 173 4 87 144 175 185.5 5 97.5 154.5 175 185.5 6 108 165 187.5 198 7 118.5 175.5 200 210.5 8 129 186 212.5 223 9 139.5 196.5 225 235.5 10 150 207 237.5 248 11 160.5 217.5 237.5 248 12 171 228 250 260.5 13 181.5 238.5 262.5 273 14 192 249 275 285.5 15 202.5 259.5 287.5 298 16 213 270 300 310.5 17 223.5 280.5 300 310.5 18 234 291 312.5 323 19 244.5 301.5 325 335.5 20

VQC

160.5 3 76.5 133.5 162.5 173 4 87 144 175 185.5 5 97.5 154.5 175 185.5 6 108 165 187.5 198 7 118.5 175.5 200 210.5 8 129 186 212.5 223 9 139.5 196.5 225 235.5 10 150 207 237.5 248 11 160.5 217.5 237.5 248 12 171 228 250 260.5 13 181.5 238.5 262.5 273 14 192 249 275 285.5 15 202.5 259.5 287.5 298 16 213 270 300 310.5 17 223.5 280.5 300 310.5 18 234 291 312.5 323 19 244.5 301.5 325 335.5 20

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

310.5 17 251 268.5 300 310.5 16 239.5 257 287.5 298 15 228 245.5 275 285.5 14 216.5 234 262.5 273 13 205 222.5 250 260.5 12 193.5 211 237.5 248 11 182 199.5 225 235.5 10 170.5 188 212.5 223 9 159 176.5 200 210.5 8 147.5 165 187.5 198 7 136 153.5 175 185.5 6 124.5 142 162.5 173 5 113 130.5 150 160.5 4 101.5 119 150 160.5 3 90 107.5 137.5 148 2 78.5 96 125 135.5 1 67 84.5 112.5 123 L1 L2 L3

PF2A/PF2W

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 16-11-16 13 For details about certified products conforming to international standards, visit us at www.smcworld.com.

C95Series

(mm) =~ J Standard Stroke Refer to page 19 on "Minimum Allowable Stroke When Mounting Auto Switches ~. 32 ' 25,50. 75,100, 125,150, 175, 200, 250,300, 350,400, 450,500 700 ~; 40 25, 50, 75, 100, 125, 150, 175. 200, 250, 300, 350, 400, 450, 500 800 SO 1200 25, 50, 75,100, 125, 150, 175, 200, 250, 300, 350, 400,450. 500, 600 63 25. 50,75,100. 125,150, 175,200, 250. 300, 350,400, 450,500, 600

CLQ

175 M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l x 165l M5 x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 150l x 175l 90 95 100 105 110 115 120 125 130 155 180 100 105 110 115 120 125 130 135 140 165 190 M6 x 90l 110 115 120 125 130 135 140 145 150 175 200 125 130 135 140 145 150 155 160 165 190 215 M10 x 110l -10D -15D -15D -15D x 95l x 115l Data -15D

KN Series Nozzles for Blowing

Copper extension nozzle/KNL (mm) Model Nozzle size D Outside diameter L1 Weight (g) KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 1.5 2 2 2.5 2.5 3 1.5 2 2 2.5 2.5 3 6 6 8 8 10 10 6 6 8 8 10 10 300 300 300 300 300 300 600 600 600 600 600 600 43 43 61 61 94 94 84 84 117 117 183 183 O.D.

Ionizer Nozzle type IZN10 Series IZS

150 mm, capacitance: 20 pF) as defined in the U.S.

CQS

Cylinder stroke (mm) Long stroke (mm) 35, 40, 45, 50, 75, 100 Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 Action D Double acting 12, 16 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

SYJ300/500/700

cable L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) M: Common exhaust for the pilot and main valve + + + D: Push-turn locking slotted type + R port P, E port H: Lead wire length 600 mm Pilot valve exhaust is centralized to main valve.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[87.1] (Lead wire length) 300 57.1 [ ] for AC Other dimensions are the same as the grommet

CG5-S

Relationship of liquid entry and sliding distance X Amount of liquid entry (g) 15 10 Standard cylinder Stainless steel cylinder 5 0 50 100 150 200 Sliding distance (km) 250 300 Conditions Working fluid ...Air Pressure .. 0.5MPa Liquid ...