VQ7-6/7-8

)(B port) 16(20)(A port) 16(20)(B port) 16(20)(A port) Manual override Manual override A B PB A B PB 75(86) 62(72) 75(86) 62(72) 50 38 38 50 B B PA R1 R2 P Indicator light PA Indicator light R1 R2 P 49(64) 49(64) Mounting hole 2-6.5 Mounting hole 2-6.5 49(64) 49(64) G1/2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 153(166) 153(166) 141(154) 108.5(121.5) 141(154) 108.5(121.5) 50(63) 50(63) 5 3 38

Series AK1000

22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) AK1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International

Multi-Axis Step Motor Controller

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

PA3000/5000/PAX1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

115 186 125 128 151 222 125 128 191 262 ZPX125HJ100-01-A22 125 128 226 297 1198 Series ZPT/ZPX Vacuum Pad: Large/Heavy Duty Type Construction Series ZPT Series ZPX ZA ZX Component Parts No.

ZPT/ZPX

How to Order B01 H N 40 25 ZPT A18 J Pad diameter (mm) Mounting thread 40 50 40 50 A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Buffer stroke (Rotating) Pad type H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 100 N S NBR Silicon rubber Spring Force U Urethane rubber 40 to 80 Pad diameter 100, 125 F Fluoro rubber E EPR 6.9

rep-modular-e

Nickel plating 1 8 Complete product No. indicated Hexagon socket head plug Handle R(PT) 1/4 Nickel plating 1 2 Flat washer Adjustment screw 10.5 x 20 x 1.2 Zinc chromate treatment 1 1 Zinc chromate treatment 447 Series AMR3000 to 6000 Replacement Procedure of Element 1 1.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Nickel plating 1 8 Complete product No. indicated Hexagon socket head plug Handle R(PT) 1/4 Nickel plating 1 2 Flat washer Adjustment screw 10.5 x 20 x 1.2 Zinc chromate treatment 1 1 Zinc chromate treatment 447 Series AMR3000 to 6000 Replacement Procedure of Element 1 1.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

kV 1.5 kV 1.0 kV Ambient temperature Connector 20 to +80C 20 to +70C 40 to +85C 25 to +90C Cable 20 to +70C Min. bending radius (Fixed) 67 mm 60 mm Protection class 100 IP67 (Only with screw tightened) Allowable repeated insertion/withdrawal 200 Material of knurl Zinc die-cast (Nickel plating) Brass (Nickel plating) Zinc die-cast (Nickel plating) Contact (Surface treatment) CuSn (Au plating

MY1

, 25, 32, 40 50, 63, 80, 100 5000 20 314 62 94 125 157 188 219 251 Strokes are manufacturable in 1mm increments, up to the maximum stroke.

Table of Contents

CDRB2 20 W B 180 S R73 L With auto switch Size: 20, 30, 40 Fittings are sold separately.

Table of Contents

Material Polyolefin (Equivalent to UL-94 standard V-0) 0 20 0 20 40 60 Note) The color of all inner tubing is black.

MY1

20 20 1.

HRX-OM-Q026

/300-A-40. 8-9 8.2.4 HRSH100/150/200/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9 HRSH250

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

/25 CY1H15/20/25 CY1H15/20/25 CY1H15/20 CY1H15/20 CY1H25 CY1H15/20 CY1H25 0.08 0.03 CY1H25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) CY1HT25/32 CY1HT25/32 CY1HT25/32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 0.03 Deflection (mm) Deflection (mm) 0.04

CY1

+ Stroke 62.5 15 7.5 17 20.5 69 54 12 53 Series CY1H Dimensions Single axis type/15, 20, 25 CY1H15, 20, 25 L LL CY1H -B PA 4-M thread depth MM 15 20 25 Guide central axis ZZ XA XB PB Piping port surface S + Stroke LW EB EA 2-P HC HP H HB HA HG HT NT Square nut for body mounting J 8 PP A N W Z + Stroke TW NL (mm) Model A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8

HRL

-Am-20 (CH1) HRL100-Am-20 (CH1) 0.6 0.6 60 60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6 Refer to page 646 for dimensions with connector cable. 631 Series 10-SYJ700 Manifold Specifications [Option] Directional Control Valves Air Grippers Modular F.

Slider Type/Ball Bushing Bearing

(mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 Moment (Nm) 25 25 25 5 10 15 20 0 5 10 15 20 0 Moment (Nm) Moment (Nm) CY1HT25/32 CY1HT25/32 CY1HT25/32 CY1HT25 CY1HT32 CY1HT25 CY1HT25 CY1HT32 0.05 CY3B CY3R 0.03 0.04 Deflection (mm) Deflection (mm) 0.02 CY1S 0.03 0.02 CY1HT32 CY1L 0.02 0.01 0.01 0.01 CY1H CY1H 20 40 0 60 20 40 0 60 20 40 0 60 80 CY1F Moment (Nm) Moment (Nm) Moment (

Modular F.R.L. Unit

43 105 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 105 196 20 11 50 70 98 44.5 84 13 11 6.4 117.5 319 3.3 Note 1) For AC20B only, the position of the pressure gauge is above the piping center.