MGQ

20 25 25 28 36 24 17.5 25 20 18.5 21 16 16 20 20 25 30 Grooves (Except 12, 16, 20, 25) (mm) Use grooves section a and section b in the figure below of the cylinder body for firmly fixing in the following case.

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

3

X MKF16-Z 393 MK Series Dimensions: 20, 25 The outline dimensions shown are when the rod is retracted.

Guide Cylinder Series MGG

37 55 182 M14 x 2 depth 25 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) O P Y Z Y X W V U T S R Q R 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100mm or more Rc 1/8 M6 x 1 depth 9 88 157 80 30 40 48 82 12 26 12 250 to 400 14 21 Rc 1/8 M6 x 1 depth 13 88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Bore size (mm) 16 20 25 32 40 50 63 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm Stroke adjusting unit Nil A L AL Without adjusting unit With adjusting bolt With low load shock absorber + Adjusting bolt With one A unit and one L unit Shock Absorbers for L Unit Bore size (mm) Unit no. 16 50 63 20 25 32 40 L unit RB1007 RB1412 RB0806 RB2015 Applicable Auto Switch For 16, 20 /Refer to page 8-30

CL

7 7 8 8.5 20 25 32 40 For long stroke, refer to page 9-2-32.

energy saving effect

temperature 32C Facility water temperature 32C 25 25 Cooling capacity [kW] Cooling capacity [kW] 20.5 20.6 Ambient temperature 43C 20 20 15 15 Ambient temperature 45C Facility water temperature 40C 10 10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH250-A-20/40HRSH250-W-20/4030 30 Ambient temperature 32C Facility water

Compact

ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 Load [N] Load [N] Load [N] MXZ20 MXZ20 MXZ20 0.25 0.40 0.25 ST 35, 40 ST 45, 50 ST 45, 50 ST 45, 50 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.35 0.20 0.20 0.30 ST 25, 30 ST 35, 40 ST 35, 40 0.25 0.15 0.15 ST 25, 30 ST 15, 20 ST 25, 30 0.20 0.1

Magnetically Coupled Rodless Cylinder

25 25 400 0.2 Minimum operating pressure (MPa) 20 20 0.16 0.16 300 0.14 0.15 0.12 0.15 15 15 200 0.1 100 0.05 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0 10 15 20 25 32 40 Supply pressure (MPa) Bore size (mm) Main Material Weights kg 15 20 25 32 40 Description Note Bore size (mm) Material 0.275 0.351 0.672 1.287 2.070 Aluminum alloy Electroless nickel plated Head cover Basic weight 0.015

CQM

Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

Cylinder with Lock

n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 1 10 25 2 (Different surfaces, same surface) 1 15 20 D-A5 D-A6 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 20 25 n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 D-A59W 1 15 25 2

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13 13 16 16 20 20 Table (1) Vacuum Entry/Mounting Thread Diameter 25 25 32 32 Mounting thread diameter (Male thread) 40 40 20 to 50 10 to 16 Pad dia.

SMC

) 20, 25 TN NPT 20, 25 TF G MXS 12 13 50 M9N 12 22 50 MXS M9N Number of auto switches Copper, fluorine and silicon-free + low particle generation Nil 2 pcs.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

25 None Note) The minimum bending radius of each cable is 20 mm.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

25 25 400 0.2 Minimum operating pressure (MPa) 20 20 0.16 0.16 300 0.14 0.15 0.12 0.15 15 15 200 0.1 100 0.05 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0 10 15 20 25 32 40 Supply pressure (MPa) Bore size (mm) Main Material Weights kg 15 20 25 32 40 Description Note Bore size (mm) Material 0.275 0.351 0.672 1.287 2.070 Aluminum alloy Electroless nickel plated Head cover Basic weight 0.015

MNB

40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6

HRX-OM-M090

[] 60Hz 50Hz Fig 9.5-1 Heating capacity(HRS012--10, HRS018--10) 9.5.2 HRS012--20,HRS018--20, HRS024--20 1000 1000 Ambient Ambient temperature temperature 800 800 5 20 25 5 Heating capacity [W] 20 25 32 40 [W] 600 600 32 40 400 400 200 200 0 0 5 15 25 35 45 5 15 25 35 45 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9.5-2 Heating capacity(HRS012--20, HRS018

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Bore size (mm) 16 20 25 32 40 50 63 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm Stroke adjusting unit Nil A L AL Without adjusting unit With adjusting bolt With low load shock absorber + Adjusting bolt With one A unit and one L unit Shock Absorbers for L Unit Bore size (mm) Unit no. 16 50 63 20 25 32 40 L unit RB1007 RB1412 RB0806 RB2015 Applicable Auto Switch For 16, 20 /Refer to page 8-30

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

25 32 40 400 300 300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20