SYJ3000/5000/7000

/60 Hz L plug 25 2500 mm LN Without lead wire 2 200 VAC 50/60 Hz connector 30 3000 mm LO Without connector 110 VAC 50/60 Hz 50 5000 mm 3 M With lead wire [115 VAC 50/60 Hz] M plug MN Without lead wire 220 VAC 50/60 Hz connector 4 MO Without connector [230 VAC 50/60 Hz] W0 Without connector cable M8 connector For type W, DC voltage is only available.

REC

13 8 18 15.5 34 26 13 10 41 150 to 700 FX 20 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 20, 25, 32 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to 1000 26 36 40 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to 1000 32 S Z ZZ NN P H1 H2 I K MM N NA Bore size Stroke range 1 8 M20 X 1.5 20 146 191 200 150 to 700 M8 X 1.25 5 8 33.5 5 20 30 1 8 M26 X 1.5 25 146 195 204 150 to 700 M10 X 1.25

CNS

Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range.

Vacuum

50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirens , Pad Diameters @2 . s4 .

Vacuum

50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirensio Pad Diameters @2 . s4 .

3

60 70 50 60 70 75 85 95 75 85 95 85 95 105 125 80 90 100 120 90 100 110 130 95 105 115 135 CKQ 8 8 Arm Proper Tightening Torque 9 Bore size (mm) Proper tightening torque (Nm) 12 16 20, 25 32, 40 50, 63 0.5 to 0.7 2.8 to 3.5 11.5 to 14.0 24 to 30 75 to 90 8 9.5 Fig. 1 Flange Mounting 11 Caution The mounting bolt for the rod flange or head flange should be tightened to the torque shown in

3 Port Solenoid Valve Metal Seal Series VZ200 1

Model VV3Z2-20 VV3Z2-30 VV3Z2-50 -S50 Part no.

VZ100/300/500

(With indicator light 87.5)] Body ported Allowable voltage fluctuation (%) Power consumption (W) [Current mA] DC Note) 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Surge voltage suppressor Indicator light DC: Diode, AC: ZNR

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 63 80 100 50 54 47 38 42 35 128 128 148 28 28 48 110

Short Stroke Electric Actuator Series LX

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s

Compact End Lock Cylinder Series CBQ2

size (mm) FD FT FV FX FZ A B A B FV M 82.5 65.5 75 58 5.5 8 48 56 65 32 92 75 81.5 64.5 5.5 8 54 62 72 40 4FD FX FZ FT L B + Stroke A + Stroke 93.5 75.5 83.5 65.5 6.6 9 67 76 89 50 95 77 89 71 9 9 80 92 108 63 Rod end male threads Bore size (mm) L L1 M 32 17 38.5 34 40 17 38.5 40 50 18 43.5 50 63 Rod end nut L1 18 43.5 60 Rear flange type/CBQ2G, CDBQ2G (mm) Rear flange type With rear lock

Microspeed Cylinder

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber bumper (basic

Modular Type Air Filter Series AF

50 G 27 40 54 54 H 22 23 26 25 E 18 16 17 14 C 10 14 18 20 D 40 53 70 70 P 57 73 73 B 97 129 165 169 A 40 53 70 75 AFD20 AFD30 AFD40 AFD40-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification Model With drain guide With barb fitting Metal bowl Metal bowl with level gauge B B 97 142 178 182 B B AFD20 AFD30 AFD40 AFD40-06 162 198 202 137 173 177 136 172 176 34

Series AP500

, N2) 3.5 (88.9) AP9110 150 psig (1.0 MPa) Inlet pressure: 75 psig (0.52 MPa) A A 90 0.62 80 0.55 1.5 (38.1) Delivery pressure (MPa) 70 0.48 Delivery pressure (psig) 2 x 1/4-20 UNC depth 0.35 (8.9) (Mounting hole) 60 0.41 50 0.34 40 0.28 30 0.21 20 0.14 Connections inch (mm) A 10 0.07 0 0.00 FV8 MV8 TW8 FV12 MV12 TW12 FV16 MV16 TW16 0 500 1000 15002000 2500300035004000 45005000 Flow rate

1.63

75 100 125 150 175 200 20 MGPWM Slide bearing 25 MGPWL Ball bushing 32 40 DMGPWA High precision ball bushing 50 -X 63 497 Compact Guide Cylinder/Wide Type MGPW Series 20, 25, 32, 40, 50, 63 How to Order MGP M W 25 M9BW 50 Compact Guide Cylinder Made to Order For details, refer to page 499.

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Cylinder with Lock Series CNG

Note 1) Note 2) Maximum available stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm) Model Long stroke (mm) 1 pc. 201 to 350 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200 D-C7, C8 D-B5, B6 D-H7 D-G5N 10mm 15mm 1500 25, 50, 75, 100, 125, 150, 200, 250, 300 15mm 10mm 20mm 20mm D-B59W D-H7LF Note 1) Intermediate strokes other than the above are produced upon receipt

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Series LX Acceleration Time Guide

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

MU

Rod non-rotating accuracy DStandard Stroke Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke -X 25, 32, 40 50, 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 20Other intermediate strokes can be manufactured upon receipt of order.