3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

operating pressure 100 psi (0.7MPa) High pressure type 113 psi (0.8MPa) Min. operating pressure 14 psi (0.1MPa) 21 psi (0.15MPa) Valve specifications Solenoid specifications Note 1) Note 1) Ambient and fluid temperature 14 to 122F 14 to 122F Max. operating frequency 20Hz 5Hz Proof pressure 217 psi (1.5MPa) Lubrication Not required Manual override Non-locking push type/Slotted locking type 150

ITV

IR 0.5 0.5 0.6 Set pressure (MPa) Set pressure (MPa) 0.4 Set point VEX 0.5 0.3 0.4 0.0 AMR 0.3 0.2 0.2 0.5 ITV 0.1 0.1 1.0 0.0 0.0 IC 0 50 100 200 150 0 50 100 150 200 250 0.8 0.2 0.4 0.6 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Supply pressure (MPa) VBA VE Series ITV203 VY1 G Repeatability Linearity Hysteresis 1.0 0.6 1.0 PPA 0.5 Output deviation factor (%F.S.)

Rotary Actuator/Vane Type

Size: 20, 30, 40 Shaft-end shape of size 40 CRB2 CRB2 Y1 X 1.5 2 K CRB1 2 x Q2 Y1 X Plate 4 0 0.030 MSU Chamfer (Rotation range is stated on page 70.) Chamfer (Rotation range is stated on page 70.)

Hydraulic Filters

-196H-V 06 to 08 AL-197H-V 10 to 12 FKM-70 or EPDM-70 AL-198H-V Phosphoric ester 16 AL-199H-V 20 to 24 AL-200H-V 28 to 32 AL-201H-V Note) The material of seals (AL-196H-V to AL-201H-V) is EPDM-70.

Sine Rodless Cylinder Series REBR Direct Mount Type

Weights (kg) Model Standard stroke mm 150 200 300 400 500 600 800 1000 2.5 2.7 3.2 3.6 4.1 REBH15 5.3 6.0 6.6 7.3 8.0 9.4 REBH25 6.2 7.3 8.3 9.4 10.4 12.5 14.6 REBHT25 9.6 10.7 11.9 13.0 14.2 16.5 18.8 REBHT32 Theoretical Output Magnetic Holding Force (N) (N) Bore size (mm) Operating pressure (MPa) Piston area (mm) Bore size (mm) 15 25 32 0.3 70 0.2 0.4 88 0.5 105 0.6 123 0.7 176 Holding

LX Series Compact Electric Actuators

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

2/3 Port Valve

N.O. 10.2 10.4 50 VNC0 VNC02 1 4 VNC814-65F VNC811-65F 65 45 65 70 49 1260 880 15.7 P1 P2 VNC914-80F VNC911-80F 80 56 80 100 73 1800 1400 21.2 Air operated Note)The flange should be JIS B 2210 10K (ordinary type) or equivalent.

Compact

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

MGQ

, 175, 200 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E 30 st or less Over 30 st A

IR1000/2000/3000

55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate

CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200

HRX-OM-X071

/ 70 Dimensions 18 mm W483xD550xH710 Accessory19 Power supply connector,Maintenance handle for particle filter10, Operation manual,Particle filter element10 Weight 20 kg 74 67 1: No condensation should be present.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Power Clamp Cylinder

Space at manual release Leave a space in order to release by hitting with a plastic hammer. 150 Min.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Stations n L1 L2 3 98 70 4 118 90 5 138 110 6 158 130 7 178 150 8 198 170 9 218 190 10 238 210 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 2 stations 78 50 20 stations 438 410 554 10-SYJ7000 Manifold specifications Type 42: Side ported / 10-SS5YJ7-42Stations -C6,N7 C8,N9 [ ]: AC Grommet (G) 122[126.4] Approx. 300 (Lead wire length) Air

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Load Blocking Mass and Center of Gravity for Each Workpiece 5 42.5 65 150 Center of gravity Mass mn Workpiece Wn Y-axis Yn X-axis Xn Z-axis Zn Z X Wa 0 mm 5 mm 0.88 kg 65 mm 111 210 Wb 0 mm 42.5 mm 4.35 kg 150 mm Y Y Wc 111 mm 42.5 mm 0.795 kg 150 mm Wd 210 mm 42.5 mm 0.5 kg 150 mm n = a, b, c, d 3.

Table of Contents

Dimensions . 46 47 48 50 52 52 53 54 54 55 55 56 57 58 60 60 60 61 62 63 65 65 65 66 66 67 67 68 69 69 70 70 71 72 73 75 75 75 77 77 78 78 78 79 80 82 84 84 84 85 86 87 87 88 89 90 Series AS * 2 * 0-D Speed Controller Adjustable by Flat Head Screwdriver: Standard Type Elbow Type \(Metal Body\) . Specifications. How to Order . Construction. Dimensions .