C95

27 32 36 41 5 5 5 5 5 5 12 15 15 20 20 25 5.5 5.5 6.5 6.5 10 10 30 35 40 45 45 55 10 12 12 16 16 20 9.5 12 12 16 16 20 6.6 6.6 9 9 11 11 6.5 6.5 8.5 8.5 11 12 48 56 64 75 95 115 45 52 60 70 90 110 26 28 32 40 50 60 32 40 50 63 80 100 C85 C76 CG1 Rear Sngle Clevis DS MB MB1 Bore (mm) E B1 H B2 B3 L3 L1 TG1 T d1 FL d2 d3 CN XD 45 55 65 75 95 115 14 16 21 21 25 25 5 5 5 5 5 5 11.5 12 14 14

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Component parts Cable length 1.5 m 3 m 5 m 8 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 Plug MIL standard Number of terminals: 25 Cable: 25 cores x 0.3 mm2 Applicable base VV5Z3-45F For details, refer to page 3-3-8.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Grommet (G), (H): 10-SY9 40(R)03 04 3 4 5 G H 3/8, 1/2 [4(A), 2(B) port] 29 30 17.5 (Light/surge voltage suppressor) 2 x 5.4 (For mounting) 60 86.5 5 25 27 Manual override 4 A 2 B PE 57 47 + + A B X EB 3 P 1 EA 5 27 25 96.2 23.7 1/8 (Pilot EXH port) 45.9 [48.1] 164.3 [168.7] G: Approx. 300 H: Approx. 600 1/8 (External

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

F 6.8 4 LC LZ X Y Z ZZ 1/8 8 8 8 42.5 34.5 30 24 46.5 37.5 33.5 28 7 5.5 5.5 5 88 64 62 62 22 17 17 13 41 32 32 26 6 6 5 50 45 45 41 40 32 25 20 24 22 22 18 14 12 10 8 171 137 135 131 21 19.5 19.5 15.5 M26 x 1.5 M26 x 1.5 M20 x 1.5 27 25 25 21 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M10

MLGP

Modification method D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Number of auto switches D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Part number 20, 25, 32 1 to 349 Applicable stroke (mm) 40 to 80 5 to 345 1 pc. 15 5 10 20 25 100 25 to 345 2 pcs. 15 5 15 20 25 Part no.: MLGPM2039F A 1mm spacer is installed in MLGPM2040F. Dimension C is 77mm. Note) Model D-P5DW can only be mounted with bore sizes 40 to 100.

MLGP

Modification method D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Number of auto switches D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Part number 20, 25, 32 1 to 349 Applicable stroke (mm) 40 to 80 5 to 345 1 pc. 15 5 10 20 25 100 25 to 345 2 pcs. 15 5 15 20 25 Part no.: MLGPM2039F A 1mm spacer is installed in MLGPM2040F. Dimension C is 77mm. Note) Model D-P5DW can only be mounted with bore sizes 40 to 100.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

27 2 x 5.4 (For mounting) 5 47 B 2 A 4 PE 57 SMC A B B A Manual override X A side: Orange B side: Green 5 EA 1 P 3 EB 96.5 11.8 27 25 (Light/surge voltage suppressor) 1/8 (External pilot port) (L = 300 to 5000) 153.8 148.2 M12 waterproof connector 71.5 34.5 17.5 25 25 15.5 29.5 29.5 3/8, 1/2 (Piping port) 44.5 3 position closed center / exhaust center / pressure center [M12 waterproof connector

CQM

Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 0 5 1 0 1 Y (Example) Manual override B C Flat cable with power supply terminal block and 3m cable VV5Q11-08C6G2 VQ1100-5 VQ1200-5 VQ1300-5 Series Non-locking push style Push-locking slotted style Push-locking lever style 1 set Manifold base No. 4 setsValve No. (Stations 1 to 4) 1 set Valve No. (Stations 5) 3 setsValve No.

MGG

Parts changed to stainless steel Symbol Part number Note Bore size (mm) 20, 25, 32, 40, 50 !9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!

Tie-rod Type Hydraulic Cylinder

x 28l SWRM Polished round 18SPCC 113 5 18 123 5 80 clevis type C1 100 5 x 30l SWRM Polished round 20SPCC 132 7.5 20 147 5 100 clevis type E B 125 Polished round 22SPCC 5 x 35l SWRM 154 7.5 22 169 5 125 clevis type A 160 Polished round 24SPCC 5 x 35l SWRM 190 7.5 25 205 5 160 clevis type Note) Does not come with other accessories.

SMC Pneumatic Clean Series

4 4 LC 30 25 22 20 LH 16.5 16 15 15 X 60 69 69 69 LS 4 3.5 3.5 3 M 3 3 3 3 LT B 8.5 8 7 7 Y 10 10 10 10 W 54 44 36 32 LX 187 175 173 163 ZZ 71 58 49 44 LZ Z Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 10 12 55 74 4.5 100 125 5 20 28.5 80 101 6 11 65 74 6 120 150 7 20 30 100 121 6 14 With air cushion 5 5 40 45 50 63 22 22 67 67 5 5 4.5 4.5 11 13 66 82 218 218 86 106 17.5 17.5 70.5

MTS

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Locked condition Released condition 8-21-5 5 Guide Cylinder Series MGG 20, 25, 32, 40, 50, 63, 80, 100 How to Order MGG L B 32 100 H7BW Number of auto switches Bearing type Nil S n 2 pcs. 1 pc. n pcs.

Basic Type/Direct Mount Type

(mm) Auto switch model Bore size (mm) 6 10 15 20 25 32 40 50 63 Bore size (mm) Auto switch model D-A9 25 to 63 8 11 8 6 6 7 9 8 8 D-M9 D-A9 D-M9 D-M9W D-M9A D-M9W D-M9A D-Z7/Z80 4.5 6.5 4.5 5 5 5.5 5.5 6.5 7 BMG2-012 9 9 11 9 10 D-Y59/Y7P/Y7W/Y7BA 5 5 6 6 6 D-A9/M9/M9W/M9A The auto switches cannot be mounted in some cases.

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

V

0 Single 36.0 (2.0) 20 or less 22 or less 2 P o s i t i o n s 3 P o s i t i o n s Rubber Seal VQ41(0, 5)0 39.6 (2.2) 25 or less 27 or less Double Metal Seal VQ42(0, 5)0 36.0 (2.0) 12 or less 12 or less Rubber Seal VQ42(0, 5)0 39.6 (2.2) 15 or less 15 or less Closed Metal Seal VQ43(0, 5)0 32.4 (1.8) 45 or less 47 or less Center Rubber Seal VQ43(0, 5)0 36.0 (2.0) 50 or less 52 or less Exhaust

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

CJ2X/CUX/CQSX/CQ2X/CM2X

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion