High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Series LX Acceleration Time Guide

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

MU

Rod non-rotating accuracy DStandard Stroke Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke -X 25, 32, 40 50, 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 20Other intermediate strokes can be manufactured upon receipt of order.

MU

, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 Other intermediate strokes can be manufactured upon receipt of order.

CG5-S

20 25, 50, 75, 100, 125, 150, 200 201 to 350 Minimum stroke for mounting auto switches 25 301 to 400 32 301 to 450 Number of auto switches Model 40 301 to 800 25, 50, 75, 100, 125, 150, 200, 250, 300 2 pcs. 1 pc. 50, 63 301 to 1200 D-G5BA 15mm 10mm 80 301 to 1400 Refer to page 15 for details. 100 301 to 1500 Note 1) All non-standard strokes are produced upon receipt of order.

Turntable Cylinder Series MGT

, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Refrigerated Air dryer Series IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Note 1) Actuation Voltage Electrical entry Light/surge voltage suppressor Sonic conductance C [dm3/(sbar)] 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal { } 4/25/3 (A/BEA/EB) Closed center Exhaust center

AZ1000

Diaphragm Nozzle Seat 316L SS Electropolish + Passivation 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 0.00 0.03 0.07 0.10 0.14 0.17 0.21 0.24 0.28 0.31 0.34 0.38 0.41 0.45 0.48 0.52 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 Delivery pressure (MPa) Delivery pressure (psig) 316L SS PCTFE (Option: Vespel, PTFE) PCTFE (Option: PTFE) Dimensions inch (mm) AZ1000 2.12 (53.8) Max. 5.0 (127.0

Swivels

Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis

3 Port Solenoid Valve/

. 3) 3 3 (106.6) 57.6 21 41.5 (69.5) 2 1 56 43.8 43.8 (11.4) 28 37.5 73 73 10 37.5 77 75 45.5 3/4" [1(P) port] 2 x 3/4" [3(R) port] 164.5 3/4" [2(A) port] Should be normally open.

Guide Table Series MGF ø40, ø63, ø100 1

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CNG

Note 1) Note 2) Maximum available stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm) Model Long stroke (mm) 1 pc. 201 to 350 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200 D-C7, C8 D-B5, B6 D-H7 D-G5N 15mm 10mm 1500 25, 50, 75, 100, 125, 150, 200, 250, 300 20mm 20mm 15mm 10mm D-B59W D-H7LF Note 1) Intermediate strokes other than the above are produced upon receipt

MGF

Bore size Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches Lead wire length (m) Load voltage Auto switch model no.

Guide Table Series MGF

Bore size Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches Lead wire length (m) Load voltage Auto switch model no.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Coil voltage 1 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others Valve style Pilot valve style 2 3 VQZ115l-lLl VQ110l-lMl 4 VQZ115l-lMl VQ110l-lLl 5 6 9 Consult SMC when requiring grommet, AC specification and others. 2.10-39

Title not found

Size SCFM 50 PSI 60 PSI 70 PSI 80 PSI 90 PSI 100 PSI 110 PSI 1/2" ID 20 1.8 1.3 1 0.9 0.8 0.7 0.6 30 5 4 3.4 2.8 2.4 2.3 2 40 10.1 8.4 7 6 5.4 4.8 4.3 50 18.1 14.8 12.4 10.8 9.5 8.4 7.6 60 23.4 20 17.4 14.8 13.3 12 70 28.4 25.2 22 19.3 17.6 80 34.6 30.5 27.2 24.6 3/4" ID 20 0.4 0.3 0.2 0.2 0.2 0.2 0.1 30 0.8 0.6 0.5 0.5 0.4 0.4 0.3 40 1.5 1.2 0.9 0.8 0.7 0.6 0.5 50 2.4 1.9 1.5 1.3 1.1 1 0.9

Title not found

Size SCFM 50 PSI 60 PSI 70 PSI 80 PSI 90 PSI 100 PSI 110 PSI 1/2" ID 20 1.8 1.3 1 0.9 0.8 0.7 0.6 30 5 4 3.4 2.8 2.4 2.3 2 40 10.1 8.4 7 6 5.4 4.8 4.3 50 18.1 14.8 12.4 10.8 9.5 8.4 7.6 60 23.4 20 17.4 14.8 13.3 12 70 28.4 25.2 22 19.3 17.6 80 34.6 30.5 27.2 24.6 3/4" ID 20 0.4 0.3 0.2 0.2 0.2 0.2 0.1 30 0.8 0.6 0.5 0.5 0.4 0.4 0.3 40 1.5 1.2 0.9 0.8 0.7 0.6 0.5 50 2.4 1.9 1.5 1.3 1.1 1 0.9

NCA1

~500mm/s) (50~500mm/s) (50~500mm/s) Mounting Basic, foot Basic, foot Basic, foot, rear flange,clevis center trunnion front flange, side tapped side tapped center trunnion, center trunnion side tapped, head trunnion, side lug side lug rod trunnion Non-Rotating Accuracy n/a n/a 0.50c *Rod and head trunnion maximum operating pressure for 325 and 400 bore is up to 150 psi Standard Strokes (in