End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

12.5 (9.5) 12.5 (9.5) 17 (13) 20 40 38 72.5 80.5 40 31 38.5 31 73 69 81 69 (10.5) 7.5 (11.5) 8.5 50 43.5 78 86 43.5 35 42.5 35 78.5 77 86.5 77 (10.5) 9.5 (13) 12.5 (11.5) 10.5 (14) 13.5 63 50.5 85 93 49 42 48 42 85.5 91 93.5 91 80 59 93.5 101.5 55.5 50 54 50 94 107 102 107 (16.5) 14.5 (18) (14.5) 21 (17) (17.5) 15.5 (19) (15.5) 22 (18) 100 69.5 104 112 63 57.5 62 57.5 104 121 112 121 (11.5

Industrial Filters

Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42.

LEF-OM002xx

Electric actuators / Slider type Common precautions . 39 6.1 Design and selection . 39 6.2 Handling . 39 6.3 Mounting . 40 6.4 Precaution on maintenance . 40 6.5 How to detach and attach the dust seal band . 42 6.6 Replacement of belt . 43 7.

VFR

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

46 56 68.5 L1 3 6.5 10.5 13 13 23 28 32 36 16 19 23 15 16 22 14.5 16 20 6 4 10.5 42 51 59 16 23 27 220 280 340 12 17 8.5 Rc1/16 Rc1/16 Rc1/8 206 264 322 37.5 47 59.5 5.5 6.5 8 7 8 9 12.5 16 19.5 Model MY1H25 MY1H32 MY1H40 17.7 17.7 24.4 29.3 29.3 38 27.3 27.3 35 Hole Size for Centralized Piping on the Bottom R (Machine the mounting side to the dimensions below.)

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (

VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (N.C

energy saving effect

HEB Anchor bolt fixing position A Anchor bolt fixing position B HED 1100 (Dimension of anchor bolt fixing bracket) 756 136 1020 (Dimension of anchor bolt fixing bracket) HEA 12 x 12 670 43 670 138 8 x 12 IDH (850) (Thermo-chiller dimension) 700 (715) (Thermo-chiller dimension) 627 43 617 752 50 (954) (Thermo-chiller dimension) 19 76 984 19 (1035) (Thermo-chiller dimension) 1064 View A-A View

HRX-OM-W038

Fig 3-19 Connecting the connector 3.7.3 Setting items Table 3-9 shows the setting items of the external switch. For details, refer to 5.19 Communication function.

Vacuum

oP X Adaolor olate: incllded shndard Applicable Tube Pad Diameters s10. s13. s16 Bellows type Pad Diameters s4O. o5O Bellows type O _ F l a l s : 1 0 F ats: 19 [ -i 1 0 '16 3 3 9 50 a4 95 5.5 13. 18.527.5 36.452.5 63.5 86.5 97.5 4.7 '19 zPRr6E l '16 1B 20 29 37.9 54 88 99 9.9 8.5 1 1 8 IPY $enies Wllrout Bullm ) Pad Diameters s2. a4' s6' sB Pad Diameters o2o. o25. o32 Oeep Type/ZPY2sD only

Vacuum

oP X Adaolor olate: incllded shndard Applicable Tube Pad Diameters s10. s13. s16 Bellows type Pad Diameters s4O. o5O Bellows type O _ F l a l s : 1 0 F ats: 19 [ -i 1 0 '16 3 3 9 50 a4 95 5.5 13. 18.527.5 36.452.5 63.5 86.5 97.5 4.7 '19 zPRr6E l '16 1B 20 29 37.9 54 88 99 9.9 8.5 1 1 8 IPY $enies Wllrout Bullm Pad Diameters s2. a4' s6' sB Pad Diameters o2o. o25. o32 Oeep Type/ZPY2sD only

OMR0032

Controller Set Up . 42 9.1 Communication Speed and Controller IDs . 42 9.2 Selection of the input type . 42 9.3 Basic parameter setup . 43 9.4 Movement Profile Recommended for Pulse Input Type . 48 (1) Positioning time . 48 (2) Recommended movement profile . 48 9.5 I/O setup . 49 9.6 Step Data setup . 50 10. Monitor and Test Mode of the Controller . 51 11.

AC Servo Motor Driver (Pulse input type/Positioning type)

Parameter Configuration using Setup software (MR Configurator2TM) .19 5.1 PC Setup software (MR Configurator2TM ) . 19 5.1.1 Installation Method . 19 5.2 Basic driver set-up for Initial Test Drive . 19 5.2.1 Start up the Setup software (MR Configurator2TM). 20 5.2.2 System Settings . 21 5.2.3 Model Selection . 21 5.2.4 Driver ON LINE Check . 22 5.2.5 Help Function . 22 5.3 Parameter setting

HRS100/150

L/min 42/56 Pump capacity Maximum flow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating flow rate 50/60 Hz Note 7) L/min 28/42 Tank capacity L 18 Circulating fluid outlet, circulating fluid return port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Pump drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) HEA IDH Supply side pressure range

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 44 27 2 63 46 3 82 65 4 101 84 5 120 103 6 139 122 7 158 141 8 177 160 9 196 179 10 215 198 11 234 217 12 253 236 13 272 255 14 291 274 15 310 293 16 329 312 17 348 331 18 367 350 19 386 369 20 405 388 L1 L2 1427 VK3000 Series Type 42 Manifold/Base mounted (Side ported) VV5K3-42Station -01 Grommet: G DIN terminal: D Applicable

Electric Actuator with Integrated Guide

BIT 2 5 Program designation BIT 3 Pro-no. bit2 5 18 STP-NO BIT 1 Pro-no. bit3 18 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 BIT 2 Stp-no. bit1 6 19 BIT 3 Stp-no. bit2 19 7 BIT 4 20 Stp-no. bit3 7 The terminal that designates the step to be executed.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

thread depth 10 160 20 80 Rc 1/4 Vacuum suction port 100 217 (252) Work piece mounting reference plane Rc 1/4 Vacuum suction port 110 126 Cable entry 199.5 (234.5) 49.5 Stroke + 144 (table movement range) 68 105 120 68 44 Stroke + 393 (428) 2-T-slot 1 170 110 76 2-T-slot 2 8-M10 x 1.5 thread depth 20 Body mounting reference plane 110 (T-slot pitch) 20 3.3 80 5.8 1.7 5.3 76 4-8H10 depth 19

Modular F.R.L. Units

19 19 19 19 19 19 14 Without a valve function 15 The combination of metal bowl: 2 and 8 is not available. 16 For pipe thread type: NPT.

CXS

CXSJ6P-: 0.009 kg, CXSJ10P-: 0.014 kg 8-28-19 19 Series CXSJ Construction: Standard Piping CXSJM (Slide bearing) CXSJL (Ball bushing bearing) CXSJM6 CXSJL6 !5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 @9 !

CXS

Refer to Theoretical Output on page 8-28-19.