A

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24

SYJ300/500/700

0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5

ZP

flat 15 (Hexagon) 3.5 3.5 3.5 3.5 (12) (12) 5 5 1 1 2.5 2.5 6 10 15 10 ZP2-T06S-B5 ZP2-T08S-B5 ZP2-T04S-B3 Width across flat 5 (Hexagon) M3 x 0.5 M5 x 0.8 Width across flat 8 (Hexagon) M5 x 0.8 Width across flat 7 (Hexagon) 3.5 5 5.5 4 4 5 7 5 7 (10.5) (12) (12) 1 0.8 1 1 1.5 1.5 2.5 4 3 4 6 8 ZP2-T10S-B5 ZP2-T15S-B5 M5 x 0.8 Width across flat 15 (Hexagon) M5 x 0.8 Width across flat 10 (Hexagon

ZP

M6 M8 M5 M6 M8 M5 M6 M8 M4 M5 M6 M8 Rc 1 8 Model ZPT02 to ZPT08 (3.5) except 2, 4 2.5 (3) except 2, 4 3.5 () except 2, 4 (3.5) 2.5 (3) 3.5 () ( )( )( ) 10 (7) 10 (6.5) 12 (6) (13) 10 (6.5) 12 (6) (12) 12 (6) (13) ZPT10 10 (6.5) 12 (6) (13) ZPT13 11 (7) 15 (7) 15 (13) ZPT16 ZPT20 (8.5) 15 (8) 26 (17) (16) (8.5) 15 (8) 26 (17) (16) (10) 15 (10) 15 (18) (17) (8.5) 15 (8) 16

Table of Contents

For bore sizes 12 and 16, M5 x 0.8 is only available.

ZX

Full span (5 to 40C) 5% Full span (0 to 60C) 12 to 24 VDC (Ripple 10% or less ) M5 x 0.8 Unit no.

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type 10-SS3YJ5-40-M5 Type 10-SS3YJ5-40-01 Base mounted for internal pilot C4 1/8 1/8 M5 x 0.8 1/8 Type 10-SS3YJ5-41-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type

CL

(mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300

42

For replacement parts, refer to page 531. 519 A VQ5000 Series Kit (Connector kit) C 61.8 1/8" PE. port 29.5 29.5 12 21 47.5 PE 5 R1 3 R2 1 P SMC 3/4" 1(P), 5(R1), 3(R2) port 123 133 106 15 83.5 9 9 U side 55.5 M5 x 0.8 Ground screw 34.5 n 12 X 3/8", 1/2" 4(A), 2(B) port B 2 A 4 Manual override 6 Indicator light B 2 A 4 A B SMC SMC SMC SMC SMC 5 B B B B B A B 2 A 4 A B 4 A L2 P = 41 58.5 L1

ZP

Size 10, 13, 16 Size 40, 50 Flat Flat Deep: ZPY40D only Deep: ZPY10D/16D only Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 M5 x 0.8 (Miniature tube fitting Series M5) Hexagon width across

Table of Contents

AC55B AC60B 71 11 25 56 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 4.5 27 7 28 20 25 0 26 13.5 89 4.5 2.8 40 114 26.5 40 83 5.5 12 33 24 41.5 30 29.5 2 (1) 2.5 65 132 5.5 3.2 50 143 28 50 110 14 7 35 41 55 28.5 64 13 184 7 4 71 0 146 31 50 110 7 14 35 55 41 66 30.5 7 4 71 10 3.5 187 183 36 75 145 9 18 72.5 40 50 35 74 12 222 9 4 88 3.5 185 36 75 155 9 18 40 77.5

Air Cylinder

10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 13 14 8 29 8 12 2 35 5 26 M4 x 0.7 5 6 14 M8 x 1.25 24 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 16.5 10 33 10 14 2 40 6 31 M5 x 0.8 5.5 8 16 M10 x 1.25 29 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 20 12 40 12 18 2 40 6 38 M5 x 0.8 5.5 10 20 M10 x 1.25 35.5 40 Up to 300 301 to 1500 13 10

Free Mount Cylinder

F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16

3 Port Air Operated Valve Series SYJA300

0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5

Table of Contents

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

) C1 X H1 L1 12 16 20 25 9 10 12 15 10.5 12 14 17.5 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 14 15.5 18.5 22.5 Auto switch shown above is D-A73 type and D-A80 type.

F

19.7 8 14 KQK08-U02 14 15.2 12 20.5 22 35 18.5 19.7 8 38 KQK08-U03 17 15.2 12 20.5 23 36 18.5 19.7 10 18 KQK10-U01 17 18.5 17 24 22 38 21 30.9 10 14 KQK10-U02 17 18.5 17 24 23.5 40.5 21 30.9 10 38 KQK10-U03 17 18.5 17 24 24 41 21 30.9 10 12 KQK10-U04 22 18.5 17 24 27 42 21 30.9 12 14 KQK12-U02 17 20.9 17 25 24 42 22 44.5 12 38 KQK12-U03 17 20.9 17 25 24.5 42.5 22 44.5 12 12 KQK12-U04 22 20.9

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 7 5.5 5.5 5 50 45 45 41 1/4 1/8 1/8 14 12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62