SZ3000

(up to 24 solenoids possible) 20 20 20 stations 20 stations Connector mounting position Mounting position Symbol D PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) D Side Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations ... ... ... ...

Intrinsically Safe Valve

53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(For 4) C6 (For 6) M5 (M5 thread) 2 stations: 83 Addition per/station: 19 2 to 20 stations VV3QZ12VQZ115 Rc 1/8 VQZ100 Top V100 2 stations: 68 Addition per/station: 20 C4 (For 4) C6 (For 6) M5 (M5 thread) 2 to 20 stations VV3QZ22VQZ200 Rc 1/8 Top VQZ22 SY SYJ C6 (For 6) C8 (For 8) C10 (For 10) Rc 1/4 2 stations: 114 Addition per/station: 37 2 to 20 stations VQZ32 VV3QZ32VQZ300 Top Rc 1/4

SZ3000

Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications (1) Double wiring specifications 10 02 11 02 10 stations 11 stations Mounting position Symbol D 2 stations 2 stations Specified layout (2) (Up to 21 solenoids possible) D side Specified layout (Up to 22 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable

Aluminum High Vacuum Angle Valve

65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

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DC () IN (1 to 5 V) ZSP ISA2 Analog output or auto shift input Gray 2 DC () Blue 1 20 2 m 20 IS ZSM With bracket A PF2 30 IF 20 46 Data 4.2 10 15 40 31.5 26.5 1.6 7.2 22 35 41 A View ZS-28-B Bracket With panel mount adapter With panel mount adapter + Front protective cover 42.4 34.5 24 7 34.5 24 11 Panel thickness 0.5 to 6 ZS-27-D Panel mount adapter + Front protective cover 8.75 ZS-27-C

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

has an effective area approximately 20% smaller.

5 Port Solenoid Valve SY Series

(4.9) (For mounting) 23.2 (Light/surge voltage suppressor) (40.2) 12.7 40.4 (36.7) 28.1 [35.1] + 20.5 15 0.8 (20) 1.6 For manifold gasket positioning 22.2 die-cast hole (P, EA, EB port) 1/8 27.2 L plug connector: L M plug connector: M DIN terminal (D): M8 connector (W0): SY5 20-L(-F2) 3 4 5 SY5 20-M(-F2) 3 4 5 SY5 20-D(-F2) 3 4 5 SY5 20-W0(-F2) 3 4 5 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Valve Mounting VS After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Clip Circuit with light PR plate qChanging the piping direction from in-line to perpendicular (port on the valve) is possible on the VQZ100 series. Follow the steps below to change piping direction: Remove the fitting clips that hold the fitting and port plug in place.

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Vane Style Size: 1, 3, 7, 20 .

CRB2/CRBU2/CRB1

d1 = d3 for sizes 20 to 40.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Size: 20, 30, 40 CDRB2 20 WU B 180 S R73 L Number of auto switches With auto switch (With switch unit) Size S Nil 1 pc. 20 30 40 With angle adjuster 2 pcs.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CDRB2 20 W B 180 S R73 L With auto switch Size: 20, 30, 40 Fittings are sold separately.

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Formula L1 = 11n + 20 n: Station (Maximum 24) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L L1 L2 L3 152 175 185.5 141 162.5 173 130 150 160.5 119 137.5 148 108 125 135.5 64 87.5 98 97 125 135.5 53 75 85.5 86 112.5 123 31 50 60.5 75 100 110.5 n L 13 14 15 16 17 18 19 20 21 22

Vacuum System Peripherals:

Series ZM 13-14-20 4.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(Max. 20 stations) SUP/EXH block assembly mounting position Valve stations Series 3 5 7 02 2 stations SY3000 SY5000 SY7000 20 20 stations Symbol Mounting position U side D side Both sides Special specifications Applicable stations U D B M 2 to 10 stations 2 to 20 stations In case of special specifications, indicate separately on a manifold specification sheet.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 41 P = 16 Broken lines and dimensions inside ( ) indicate type [-D] (with DIN rail mounting bracket) and horizontal connector entry [-JS].

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

ZQ-OM01401

20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] Pmax Qmax 10 Pmax 2 (P1 Q1 ) 3 Qmax 0 37 - No.ZQ-OM01401-B 11.2 () ZQ000A 11.3 -100 -80 [kPa] -60 -40 -20 0 (V 6 ) 0 5 10 15 20 [L/min (AMR) ] ZQA (PD)() ZQ000A (PD) 100 80 [L/min(ANR)] 70 [L/min(ANR)] 0.5MPa 0.5MPa 80 60 0.4MPa 50 0.35MPa 0.3MPa 60 0.3MPa 40 40 30 20 20 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [