Form w 1 Material e Vacuum inlet r Width across flats K Connection thread 10 13 A5 67 46 29.9 21 2.5 M5 x 0.8 21 8 4 10 8 M5 x 0.8 16 67.5 46.5 30.4 21.5 10 13 A Q 72 46 29.9 21 2.5 10 8 M5 x 0.8 16 72.5 46.5 30.4 21.5 20 25 83.5 57.6 39.8 29 3.5 25.9 12 12 M8 x 1.25 32 84 58.1 40.3 29.5 40 86.5 60.6 42.8 32 4 50 87.5 61.6 43.8 33 20 25 A8 26 D C B N S U F GN GS M A6 M6 x 1 8 4 04 06 08 ZP
(For 4) C6 (For 6) C8 (For 8) Side P kit: Flat ribbon cable 26P 1 to 12 stations 35 580 20P 1 to 9 stations C10 (For 10) 10-SQ231 J kit: Flat ribbon cable PC wiring system compatible 10-SS5Q23-1 to 8 stations 35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.
/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.
) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Pressure switch with piping adapter 02 03 04 IS1000E-40 (6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04 Y14
A1 L1 R1 U1 NDH10 U(H8) E1 MM NX Applicable bore size (mm) Applicable bore size (mm) I-02 I-03 I-04 IA-04 Part no.
HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity . 8-14 8.5.1 HRS100/150-A/W-20/40/46. 8-14 8.6 Types of Hazard Labels (HRS--40/46-) . 8-15 8.6.1 Positions of danger warning label . 8-16 8.7 Standards . 8-17 8.8 Sample DoC. . 8-18 8.9 Daily Check Sheet . 8-19 Chapter 9 Product Warranty
Thread R(PT) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 64 65.5 67.5 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 8 4 KM14-04-08-01S-3 30 38 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5
Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-
) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Pressure switch with piping adapter 02 03 04 IS1000E-40 (6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04 Y14
-06 02 03 04 06 E400E500-06 Piping adapter Note 5) E20001 02 03 E30002 03 04 E30002 03 04 02 03 04 06 IS1000E-40 Pressure switch with piping adapter Note 5) IS1000E-20 01 02 03 IS1000E-30 02 03 04 IS1000E-30 02 03 04 Cross interface Note 5) Y2401 02 Y3401 02 Y3401 02 Y4402 03 Y5403 04 Note 1) in part number for the round pressure gauge indicates a type of connection thread.
Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15
) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS201 02 02 03 02 03 VHS3000VHS3000VHS402 03 04 E600Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) E60006 10 E60006 10 06 10 E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04
For AC2030 For AC2530 For AC3030 For AC4030 For AC4030-06 Model Description 02 03 04 06 E50-06 E2001 02 03 E3002 03 04 E3002 03 04 E40Piping adapter 02 03 04 4 4 4 06 4 IS1000EY 01 02 03 2 2 2 Y IS1000E02 03 04 3 3 3 Y IS1000E02 03 04 3 3 3 Y IS1000EY54-03 04 Attachment Accessory Pressure switch with piping adapter IS1000M-2Y IS1000M-3Y IS1000M-3Y IS1000M-4Y IS1000M-5Y Y21-01 (02) Y31-02
)VXA2130-02 4.1-59 VXA21/22 Dimensions (Orifice size 3 mm, 4.5 mm, 6 mm) VXA212m, VXA213m, VXA223m, VXA224m Model Port size P Rc(PT) A B C D E F With bracket G H I J VXA21 VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 1 4 3 8 10 1 8 1 4 VX 11.5 VNl Dimensions (Orifice size 8mm, 10mm) VXA225m, VXA226m VQ Thread fixed: (VXA226 2 0 -04 0nly) Bracket E Port size Rc(PT) Model
Applicable Model D L A Fitting Size d Inch 3.2(1/8) KQP-01 5 31.5 16 Applicable Model D L A Fitting Size d mm 3.2 KQP-23 3.2 31.5 16 4(5/32) KQP-03 6 32 16 4 KQP-04 6 32 16 4.8(3/16) KQP-05 6.8 34 17.5 6 KQP-06 8 35 18 6.3(1/4) KQP-07 8.5 35 18 8 KQP-08 10 39 20.5 8(5/16) KQP-09 10 39 20.5 10 KQP-10 12 43 22 9.5(3/8) KQP-11 11.5 43 22 12 KQP-12 14 46 24 12.7(1/2) KQP-13 15 46 24 16 KQP-14
Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution
Weight (g) Pad form Flat/Flat with ribs Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Barb fitting Barb fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 26 27 24 22 22 24 26 27 22 10 to 16 10
-F 19 15 LQ1B63-F 25 1" 46 21.2 44.5 LQ1B64-F 19 15 LQ1B66-F 25 1/2" 41 10 29.5 42.5 Note) Products marked are produced upon receipt of order.
Clean One-touch fitting (for blow off) 04 06 08 10 12 4 6 8 10 12 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection Tubing (rod) connection Model H L T Y U R Male connector, Straight union Union elbow, Male elbow Male branch tee, Union tee Male run tee Male branch, Union "Y" Plug-in reducer Plug Same dia. tubing 4 6 8 10 12 Different dia. tubing (plug-in reducer) Clean
Clean One-touch fitting (for blow off) 04 06 08 10 12 4 6 8 10 12 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection Tubing (rod) connection Model H L T Y U R Male connector, Straight union Union elbow, Male elbow Male branch tee, Union tee Male run tee Male branch, Union "Y" Plug-in reducer Plug Same dia. tubing 4 6 8 10 12 Different dia. tubing (plug-in reducer) Clean