MXS

11 24 27 34 42 MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 A3 13 13 26 30 36 44 A4 16 20 25 31 38 46 A5 16 20 25 31 38 46 A6 6 7.5 8.5 10 14.5 19 A2 6 7.5 8.5 10 14.5 19 MXP MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 Allowable moment coefficient: Graph 2 MG 1.0 MGP 0.7 Allowable moment coefient: MGQ 0.5 Max. allowable moment: Mmax (Nm) Table 4 0.4 MGG Stroke (mm) 100 Model 10 0.7 2.0 4.2 11.3 19.4 30.6

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

CXS

Internal circuits D-Y7NW(V) Weights DC(+) Brown [Red] (g) Main circuit of switch OUT Black [White] Lead wire length Auto switch part no. 3m 0.5m 54 11 D-Y7NW, D-Y7NWV, D-Y7PW, D-Y7PWV DC() Blue [Black] 54 11 D-Y7BW, D-Y7BWV Dimensions D-Y7PW(V) D-Y7NW, D-Y7PW D-Y7BW M2.5 x 4 Slotted set screw DC(+) Brown [Red] 2.5 Indicator light Main circuit of switch 3.4 OUT Black [White] SMC SMC 6.2 5

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

Speed Controller with Indicator

AS301FS, AS311FS AS401FS, AS411FS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 06, 07 1000 500 500 0 0 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate characteristic curves in the charts show the applicable tubing

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

cable -# L 33 4.8 10.7 11 Terminating connector for -@ LEC CYRM * LEC-CYRM is JEPMC-W6022-E manufactured by YASKAWA CONTROLS CO., LTD. 19 16 46 774 AC Servo Motor Driver LECY M U Series Options LEF USB cable LEJ PC LECYM2 LECYU2 LEL Drivers Setup software (SigmaWin+TM) (LECYM/LECYU common) LEM * Please download the SigmaWin+TM via our website.

Series KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Series SV

SX5000-57-6 SX3000-146-2 SX5000-138-1 SV2000-55-1SV2000-55-2A SV2000-21-1 (M3 x 30) VZ1000-11-1SV1000-69A SX7000-57-5 SX3000-146-2 SV3000-65-1 SV3000-55-1SV3000-55-2A SV3000-21-1 (M4 x 35) VZ1000-11-4SV3000-69A SX3000-57-4 SX3000-146-2 SX3000-181-1 SV1000-55-1SV1000-55-2-1 SX3000-22-2 (M2 x 24) VZ1000-11-1SV1000-69A SY9000-11-2 SX3000-146-2 SV4000-65-1 SV4000-55-1SV4000-55-2A SV2000-21-2

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

9 9 8 94 83 77 75 16 13 12 11 5.5, 9.5 counterbore depth 6 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 37 1/8 55 135 33 1/8 45 117 29 1/8 44 111 27 1/8 38 104 26 21 18 15 32 24 22 18 6.6, 11 counterbore depth 7 9, 14 counterbore depth 9 11, 17.5 counterbore depth 12 38 32 46 41 50 1/4 64 161 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 12 12 27 20 45 11 2 7 39 33 18

SYJ300/500/700

Base mounted (with sub-plate) 65 (51) 1/8 61 (47) 60 (46) 82 (68) V100 Note) Value for DC. Add 1 g for AC. ( ): Without sub-plate.

A

36 ANA1-10 1 160 180 132 50 41 ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871 271 86 70 D I M E N S I O N S ANA1-10~20 ANB1-06~14 ANA1

C76

Construction 6-10-46

C76

Construction 6-10-46

Series VQ Metal Seal/Rubber Seal Body Ported

185.5 77.5 88 162.5 173 67 77.5 150 160.5 56.5 67 150 160.5 25 35.5 112.5 123 46 56.5 137.5 148 L1 L2 (L3) (L4) 35.5 46 125 135.5 VQZ VQD Dimensions/Top entry connector [PU] (mm) n L 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 VZS 250 260.5 237.5 248 225 235.5 212.5 223 200 210.5 187.5 198 187.5 198 175 185.5 162.5 173 150 160.5 137.5 148 125 135.5 125 135.5 112.5 123 100 110.5 L3 L4 87.5 98

Speed Controller with One-touch Fitting

23 41.2 26.1 62.5 15.6 46 (46) AS331F-03-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 50.1 42.3 40.7 37.1 35.5 13.3 34 (35) AS331F-03-09(S)A 5/16" 13.2 37.1 23.5 52.2 14.2 35 (36) AS331F-03-11(S)A 3/8" 15.9 17.4 23 41.2 26.1 54.8 15.6 38 (39) AS431F-04-11(S)A 3/8" 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 (46.3) 26.1 61.2 50.8 49.2 43.7 42.1 15.6 61 (59) AS431F-04-13(S)A 1/2" 18.5 21 26.2